2/1/2012	8:27:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2012	8:27:49 AM	Recipe started at 8:27 AM
2/1/2012	8:27:49 AM	Helium valve closed
2/1/2012	8:27:49 AM	H2 valve closed
2/1/2012	8:27:49 AM	BCl3 valve closed
2/1/2012	8:27:49 AM	PH3 valve closed
2/1/2012	8:27:49 AM	SiCl4 pre valve closed
2/1/2012	8:27:49 AM	SiCl4 post valve closed
2/1/2012	8:27:49 AM	Main Vac valve closed
2/1/2012	8:27:49 AM	Bypass valve closed
2/1/2012	8:27:49 AM	Bubbler valve closed
2/1/2012	8:27:49 AM	Helium MFC set to  0.000000
2/1/2012	8:27:49 AM	H2 MFC set to  0.000000
2/1/2012	8:27:49 AM	BCl3 MFC set to  0.000000
2/1/2012	8:27:49 AM	PH3 MFC set to  0.000000
2/1/2012	8:27:49 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:27:49 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:27:49 AM	Tube furnace set to 0
2/1/2012	8:27:52 AM	H2 valve closed
2/1/2012	8:27:52 AM	BCl3 valve closed
2/1/2012	8:27:52 AM	PH3 valve closed
2/1/2012	8:27:52 AM	SiCl4 pre valve closed
2/1/2012	8:27:52 AM	SiCl4 post valve closed
2/1/2012	8:27:52 AM	Main Vac valve closed
2/1/2012	8:27:52 AM	Bypass valve closed
2/1/2012	8:27:52 AM	Bubbler valve closed
2/1/2012	8:27:52 AM	Helium valve opened
2/1/2012	8:27:52 AM	Helium MFC set to  500.000000
2/1/2012	8:27:52 AM	H2 MFC set to  0.000000
2/1/2012	8:27:52 AM	BCl3 MFC set to  0.000000
2/1/2012	8:27:52 AM	PH3 MFC set to  0.000000
2/1/2012	8:27:52 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:27:52 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:27:52 AM	Tube furnace set to 0
2/1/2012	8:28:57 AM	Helium valve closed
2/1/2012	8:28:57 AM	H2 valve closed
2/1/2012	8:28:57 AM	BCl3 valve closed
2/1/2012	8:28:57 AM	PH3 valve closed
2/1/2012	8:28:57 AM	SiCl4 pre valve closed
2/1/2012	8:28:57 AM	SiCl4 post valve closed
2/1/2012	8:28:57 AM	Main Vac valve closed
2/1/2012	8:28:57 AM	Bypass valve closed
2/1/2012	8:28:57 AM	Bubbler valve closed
2/1/2012	8:28:57 AM	Helium MFC set to  0.000000
2/1/2012	8:28:57 AM	H2 MFC set to  0.000000
2/1/2012	8:28:57 AM	BCl3 MFC set to  0.000000
2/1/2012	8:28:57 AM	PH3 MFC set to  0.000000
2/1/2012	8:28:57 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:28:57 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:28:57 AM	Tube furnace set to 0
2/1/2012	8:28:58 AM	Run finished at 8:28 AM
2/1/2012	8:28:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2012	8:39:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	8:39:10 AM	Recipe started at 8:39 AM
2/1/2012	8:39:10 AM	Helium valve closed
2/1/2012	8:39:10 AM	H2 valve closed
2/1/2012	8:39:10 AM	BCl3 valve closed
2/1/2012	8:39:10 AM	PH3 valve closed
2/1/2012	8:39:10 AM	SiCl4 pre valve closed
2/1/2012	8:39:10 AM	SiCl4 post valve closed
2/1/2012	8:39:10 AM	Main Vac valve closed
2/1/2012	8:39:10 AM	Bubbler valve closed
2/1/2012	8:39:10 AM	Bypass valve opened
2/1/2012	8:39:10 AM	Helium MFC set to  0.000000
2/1/2012	8:39:10 AM	H2 MFC set to  0.000000
2/1/2012	8:39:10 AM	BCl3 MFC set to  0.000000
2/1/2012	8:39:10 AM	PH3 MFC set to  0.000000
2/1/2012	8:39:10 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:39:10 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:39:10 AM	Tube furnace set to 0
2/1/2012	8:40:09 AM	Helium valve closed
2/1/2012	8:40:09 AM	H2 valve closed
2/1/2012	8:40:09 AM	BCl3 valve closed
2/1/2012	8:40:09 AM	PH3 valve closed
2/1/2012	8:40:09 AM	SiCl4 pre valve closed
2/1/2012	8:40:09 AM	SiCl4 post valve closed
2/1/2012	8:40:09 AM	Main Vac valve closed
2/1/2012	8:40:09 AM	Bubbler valve closed
2/1/2012	8:40:09 AM	Bypass valve opened
2/1/2012	8:40:09 AM	Helium MFC set to  0.000000
2/1/2012	8:40:09 AM	H2 MFC set to  0.000000
2/1/2012	8:40:09 AM	BCl3 MFC set to  0.000000
2/1/2012	8:40:09 AM	PH3 MFC set to  0.000000
2/1/2012	8:40:09 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:40:09 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:40:09 AM	Tube furnace set to 0
2/1/2012	8:41:09 AM	Helium valve closed
2/1/2012	8:41:09 AM	H2 valve closed
2/1/2012	8:41:09 AM	BCl3 valve closed
2/1/2012	8:41:09 AM	PH3 valve closed
2/1/2012	8:41:09 AM	SiCl4 pre valve closed
2/1/2012	8:41:09 AM	SiCl4 post valve closed
2/1/2012	8:41:09 AM	Bypass valve closed
2/1/2012	8:41:09 AM	Bubbler valve closed
2/1/2012	8:41:09 AM	Main Vac valve opened
2/1/2012	8:41:09 AM	Helium MFC set to  0.000000
2/1/2012	8:41:09 AM	H2 MFC set to  0.000000
2/1/2012	8:41:09 AM	BCl3 MFC set to  0.000000
2/1/2012	8:41:09 AM	PH3 MFC set to  0.000000
2/1/2012	8:41:09 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:41:09 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:41:09 AM	Tube furnace set to 0
2/1/2012	8:41:10 AM	Run finished at 8:41 AM
2/1/2012	8:41:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	8:41:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/1/2012	8:41:50 AM	Recipe started at 8:41 AM
2/1/2012	8:41:50 AM	Helium valve closed
2/1/2012	8:41:50 AM	H2 valve closed
2/1/2012	8:41:50 AM	BCl3 valve closed
2/1/2012	8:41:50 AM	PH3 valve closed
2/1/2012	8:41:50 AM	SiCl4 pre valve closed
2/1/2012	8:41:50 AM	SiCl4 post valve closed
2/1/2012	8:41:50 AM	Main Vac valve closed
2/1/2012	8:41:50 AM	Bubbler valve closed
2/1/2012	8:41:50 AM	Bypass valve opened
2/1/2012	8:41:50 AM	Helium MFC set to  0.000000
2/1/2012	8:41:50 AM	H2 MFC set to  0.000000
2/1/2012	8:41:50 AM	BCl3 MFC set to  0.000000
2/1/2012	8:41:50 AM	PH3 MFC set to  0.000000
2/1/2012	8:41:50 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:41:50 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:41:50 AM	Tube furnace set to 0
2/1/2012	8:41:50 AM	Helium valve closed
2/1/2012	8:41:50 AM	H2 valve closed
2/1/2012	8:41:50 AM	BCl3 valve closed
2/1/2012	8:41:50 AM	PH3 valve closed
2/1/2012	8:41:50 AM	SiCl4 pre valve closed
2/1/2012	8:41:50 AM	SiCl4 post valve closed
2/1/2012	8:41:50 AM	Main Vac valve closed
2/1/2012	8:41:50 AM	Bubbler valve closed
2/1/2012	8:41:50 AM	Bypass valve opened
2/1/2012	8:41:50 AM	Helium MFC set to  0.000000
2/1/2012	8:41:50 AM	H2 MFC set to  0.000000
2/1/2012	8:41:50 AM	BCl3 MFC set to  0.000000
2/1/2012	8:41:50 AM	PH3 MFC set to  0.000000
2/1/2012	8:41:50 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:41:50 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:41:51 AM	Tube furnace set to 0
2/1/2012	8:42:21 AM	Helium valve closed
2/1/2012	8:42:21 AM	H2 valve closed
2/1/2012	8:42:21 AM	BCl3 valve closed
2/1/2012	8:42:21 AM	PH3 valve closed
2/1/2012	8:42:21 AM	SiCl4 pre valve closed
2/1/2012	8:42:21 AM	SiCl4 post valve closed
2/1/2012	8:42:21 AM	Bypass valve closed
2/1/2012	8:42:21 AM	Bubbler valve closed
2/1/2012	8:42:21 AM	Main Vac valve opened
2/1/2012	8:42:21 AM	Helium MFC set to  0.000000
2/1/2012	8:42:21 AM	H2 MFC set to  0.000000
2/1/2012	8:42:21 AM	BCl3 MFC set to  0.000000
2/1/2012	8:42:21 AM	PH3 MFC set to  0.000000
2/1/2012	8:42:21 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:42:21 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:42:21 AM	Tube furnace set to 0
2/1/2012	8:42:51 AM	H2 valve closed
2/1/2012	8:42:51 AM	BCl3 valve closed
2/1/2012	8:42:51 AM	PH3 valve closed
2/1/2012	8:42:51 AM	SiCl4 pre valve closed
2/1/2012	8:42:51 AM	SiCl4 post valve closed
2/1/2012	8:42:51 AM	Bypass valve closed
2/1/2012	8:42:51 AM	Bubbler valve closed
2/1/2012	8:42:51 AM	Helium valve opened
2/1/2012	8:42:51 AM	Main Vac valve opened
2/1/2012	8:42:51 AM	Helium MFC set to  20.000000
2/1/2012	8:42:51 AM	H2 MFC set to  0.000000
2/1/2012	8:42:51 AM	BCl3 MFC set to  0.000000
2/1/2012	8:42:51 AM	PH3 MFC set to  0.000000
2/1/2012	8:42:51 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:42:51 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:42:51 AM	Tube furnace set to 0
2/1/2012	8:43:21 AM	Helium valve closed
2/1/2012	8:43:21 AM	H2 valve closed
2/1/2012	8:43:21 AM	BCl3 valve closed
2/1/2012	8:43:21 AM	PH3 valve closed
2/1/2012	8:43:21 AM	SiCl4 pre valve closed
2/1/2012	8:43:21 AM	SiCl4 post valve closed
2/1/2012	8:43:21 AM	Bypass valve closed
2/1/2012	8:43:21 AM	Bubbler valve closed
2/1/2012	8:43:21 AM	Main Vac valve opened
2/1/2012	8:43:21 AM	Helium MFC set to  0.000000
2/1/2012	8:43:21 AM	H2 MFC set to  0.000000
2/1/2012	8:43:21 AM	BCl3 MFC set to  0.000000
2/1/2012	8:43:21 AM	PH3 MFC set to  0.000000
2/1/2012	8:43:21 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:43:21 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:43:21 AM	Tube furnace set to 0
2/1/2012	8:43:51 AM	H2 valve closed
2/1/2012	8:43:51 AM	BCl3 valve closed
2/1/2012	8:43:51 AM	PH3 valve closed
2/1/2012	8:43:51 AM	SiCl4 pre valve closed
2/1/2012	8:43:51 AM	SiCl4 post valve closed
2/1/2012	8:43:51 AM	Bypass valve closed
2/1/2012	8:43:51 AM	Bubbler valve closed
2/1/2012	8:43:51 AM	Helium valve opened
2/1/2012	8:43:51 AM	Main Vac valve opened
2/1/2012	8:43:51 AM	Helium MFC set to  20.000000
2/1/2012	8:43:51 AM	H2 MFC set to  0.000000
2/1/2012	8:43:51 AM	BCl3 MFC set to  0.000000
2/1/2012	8:43:51 AM	PH3 MFC set to  0.000000
2/1/2012	8:43:51 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:43:51 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:43:51 AM	Tube furnace set to 0
2/1/2012	8:44:21 AM	Helium valve closed
2/1/2012	8:44:21 AM	H2 valve closed
2/1/2012	8:44:21 AM	BCl3 valve closed
2/1/2012	8:44:21 AM	PH3 valve closed
2/1/2012	8:44:21 AM	SiCl4 pre valve closed
2/1/2012	8:44:21 AM	SiCl4 post valve closed
2/1/2012	8:44:21 AM	Bypass valve closed
2/1/2012	8:44:21 AM	Bubbler valve closed
2/1/2012	8:44:21 AM	Main Vac valve opened
2/1/2012	8:44:21 AM	Helium MFC set to  0.000000
2/1/2012	8:44:21 AM	H2 MFC set to  0.000000
2/1/2012	8:44:21 AM	BCl3 MFC set to  0.000000
2/1/2012	8:44:21 AM	PH3 MFC set to  0.000000
2/1/2012	8:44:21 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:44:21 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:44:22 AM	Tube furnace set to 0
2/1/2012	8:44:52 AM	H2 valve closed
2/1/2012	8:44:52 AM	BCl3 valve closed
2/1/2012	8:44:52 AM	PH3 valve closed
2/1/2012	8:44:52 AM	SiCl4 pre valve closed
2/1/2012	8:44:52 AM	SiCl4 post valve closed
2/1/2012	8:44:52 AM	Bypass valve closed
2/1/2012	8:44:52 AM	Bubbler valve closed
2/1/2012	8:44:52 AM	Helium valve opened
2/1/2012	8:44:52 AM	Main Vac valve opened
2/1/2012	8:44:52 AM	Helium MFC set to  20.000000
2/1/2012	8:44:52 AM	H2 MFC set to  0.000000
2/1/2012	8:44:52 AM	BCl3 MFC set to  0.000000
2/1/2012	8:44:52 AM	PH3 MFC set to  0.000000
2/1/2012	8:44:52 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:44:52 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:44:52 AM	Tube furnace set to 0
2/1/2012	8:45:22 AM	Helium valve closed
2/1/2012	8:45:22 AM	H2 valve closed
2/1/2012	8:45:22 AM	BCl3 valve closed
2/1/2012	8:45:22 AM	PH3 valve closed
2/1/2012	8:45:22 AM	SiCl4 pre valve closed
2/1/2012	8:45:22 AM	SiCl4 post valve closed
2/1/2012	8:45:22 AM	Bypass valve closed
2/1/2012	8:45:22 AM	Bubbler valve closed
2/1/2012	8:45:22 AM	Main Vac valve opened
2/1/2012	8:45:22 AM	Helium MFC set to  0.000000
2/1/2012	8:45:22 AM	H2 MFC set to  0.000000
2/1/2012	8:45:22 AM	BCl3 MFC set to  0.000000
2/1/2012	8:45:22 AM	PH3 MFC set to  0.000000
2/1/2012	8:45:22 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:45:22 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:45:22 AM	Tube furnace set to 0
2/1/2012	8:45:52 AM	H2 valve closed
2/1/2012	8:45:52 AM	BCl3 valve closed
2/1/2012	8:45:52 AM	PH3 valve closed
2/1/2012	8:45:52 AM	SiCl4 pre valve closed
2/1/2012	8:45:52 AM	SiCl4 post valve closed
2/1/2012	8:45:52 AM	Bypass valve closed
2/1/2012	8:45:52 AM	Bubbler valve closed
2/1/2012	8:45:52 AM	Helium valve opened
2/1/2012	8:45:52 AM	Main Vac valve opened
2/1/2012	8:45:52 AM	Helium MFC set to  20.000000
2/1/2012	8:45:52 AM	H2 MFC set to  0.000000
2/1/2012	8:45:52 AM	BCl3 MFC set to  0.000000
2/1/2012	8:45:52 AM	PH3 MFC set to  0.000000
2/1/2012	8:45:52 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:45:52 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:45:52 AM	Tube furnace set to 0
2/1/2012	8:46:22 AM	Helium valve closed
2/1/2012	8:46:22 AM	H2 valve closed
2/1/2012	8:46:22 AM	BCl3 valve closed
2/1/2012	8:46:22 AM	PH3 valve closed
2/1/2012	8:46:22 AM	SiCl4 pre valve closed
2/1/2012	8:46:22 AM	SiCl4 post valve closed
2/1/2012	8:46:22 AM	Bypass valve closed
2/1/2012	8:46:22 AM	Bubbler valve closed
2/1/2012	8:46:22 AM	Main Vac valve opened
2/1/2012	8:46:22 AM	Helium MFC set to  0.000000
2/1/2012	8:46:22 AM	H2 MFC set to  0.000000
2/1/2012	8:46:22 AM	BCl3 MFC set to  0.000000
2/1/2012	8:46:22 AM	PH3 MFC set to  0.000000
2/1/2012	8:46:22 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:46:22 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:46:22 AM	Tube furnace set to 0
2/1/2012	8:46:52 AM	H2 valve closed
2/1/2012	8:46:52 AM	BCl3 valve closed
2/1/2012	8:46:52 AM	PH3 valve closed
2/1/2012	8:46:52 AM	SiCl4 pre valve closed
2/1/2012	8:46:52 AM	SiCl4 post valve closed
2/1/2012	8:46:52 AM	Bypass valve closed
2/1/2012	8:46:52 AM	Bubbler valve closed
2/1/2012	8:46:52 AM	Helium valve opened
2/1/2012	8:46:52 AM	Main Vac valve opened
2/1/2012	8:46:52 AM	Helium MFC set to  20.000000
2/1/2012	8:46:52 AM	H2 MFC set to  0.000000
2/1/2012	8:46:52 AM	BCl3 MFC set to  0.000000
2/1/2012	8:46:52 AM	PH3 MFC set to  0.000000
2/1/2012	8:46:52 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:46:52 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:46:53 AM	Tube furnace set to 0
2/1/2012	8:47:23 AM	Helium valve closed
2/1/2012	8:47:23 AM	H2 valve closed
2/1/2012	8:47:23 AM	BCl3 valve closed
2/1/2012	8:47:23 AM	PH3 valve closed
2/1/2012	8:47:23 AM	SiCl4 pre valve closed
2/1/2012	8:47:23 AM	SiCl4 post valve closed
2/1/2012	8:47:23 AM	Bypass valve closed
2/1/2012	8:47:23 AM	Bubbler valve closed
2/1/2012	8:47:23 AM	Main Vac valve opened
2/1/2012	8:47:23 AM	Helium MFC set to  0.000000
2/1/2012	8:47:23 AM	H2 MFC set to  0.000000
2/1/2012	8:47:23 AM	BCl3 MFC set to  0.000000
2/1/2012	8:47:23 AM	PH3 MFC set to  0.000000
2/1/2012	8:47:23 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:47:23 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:47:23 AM	Tube furnace set to 0
2/1/2012	8:47:53 AM	H2 valve closed
2/1/2012	8:47:53 AM	BCl3 valve closed
2/1/2012	8:47:53 AM	PH3 valve closed
2/1/2012	8:47:53 AM	SiCl4 pre valve closed
2/1/2012	8:47:53 AM	SiCl4 post valve closed
2/1/2012	8:47:53 AM	Bypass valve closed
2/1/2012	8:47:53 AM	Bubbler valve closed
2/1/2012	8:47:53 AM	Helium valve opened
2/1/2012	8:47:53 AM	Main Vac valve opened
2/1/2012	8:47:53 AM	Helium MFC set to  20.000000
2/1/2012	8:47:53 AM	H2 MFC set to  0.000000
2/1/2012	8:47:53 AM	BCl3 MFC set to  0.000000
2/1/2012	8:47:53 AM	PH3 MFC set to  0.000000
2/1/2012	8:47:53 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:47:53 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:47:53 AM	Tube furnace set to 0
2/1/2012	8:48:23 AM	Helium valve closed
2/1/2012	8:48:23 AM	H2 valve closed
2/1/2012	8:48:23 AM	BCl3 valve closed
2/1/2012	8:48:23 AM	PH3 valve closed
2/1/2012	8:48:23 AM	SiCl4 pre valve closed
2/1/2012	8:48:23 AM	SiCl4 post valve closed
2/1/2012	8:48:23 AM	Bypass valve closed
2/1/2012	8:48:23 AM	Bubbler valve closed
2/1/2012	8:48:23 AM	Main Vac valve opened
2/1/2012	8:48:23 AM	Helium MFC set to  0.000000
2/1/2012	8:48:23 AM	H2 MFC set to  0.000000
2/1/2012	8:48:23 AM	BCl3 MFC set to  0.000000
2/1/2012	8:48:23 AM	PH3 MFC set to  0.000000
2/1/2012	8:48:23 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:48:23 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:48:23 AM	Tube furnace set to 0
2/1/2012	8:48:53 AM	H2 valve closed
2/1/2012	8:48:53 AM	BCl3 valve closed
2/1/2012	8:48:53 AM	PH3 valve closed
2/1/2012	8:48:53 AM	SiCl4 pre valve closed
2/1/2012	8:48:53 AM	SiCl4 post valve closed
2/1/2012	8:48:53 AM	Bypass valve closed
2/1/2012	8:48:53 AM	Bubbler valve closed
2/1/2012	8:48:53 AM	Helium valve opened
2/1/2012	8:48:53 AM	Main Vac valve opened
2/1/2012	8:48:53 AM	Helium MFC set to  20.000000
2/1/2012	8:48:53 AM	H2 MFC set to  0.000000
2/1/2012	8:48:53 AM	BCl3 MFC set to  0.000000
2/1/2012	8:48:53 AM	PH3 MFC set to  0.000000
2/1/2012	8:48:53 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:48:53 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:48:53 AM	Tube furnace set to 0
2/1/2012	8:49:23 AM	Helium valve closed
2/1/2012	8:49:23 AM	H2 valve closed
2/1/2012	8:49:23 AM	BCl3 valve closed
2/1/2012	8:49:23 AM	PH3 valve closed
2/1/2012	8:49:23 AM	SiCl4 pre valve closed
2/1/2012	8:49:23 AM	SiCl4 post valve closed
2/1/2012	8:49:23 AM	Bypass valve closed
2/1/2012	8:49:23 AM	Bubbler valve closed
2/1/2012	8:49:23 AM	Main Vac valve opened
2/1/2012	8:49:24 AM	Helium MFC set to  0.000000
2/1/2012	8:49:24 AM	H2 MFC set to  0.000000
2/1/2012	8:49:24 AM	BCl3 MFC set to  0.000000
2/1/2012	8:49:24 AM	PH3 MFC set to  0.000000
2/1/2012	8:49:24 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:49:24 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:49:24 AM	Tube furnace set to 0
2/1/2012	8:49:54 AM	H2 valve closed
2/1/2012	8:49:54 AM	BCl3 valve closed
2/1/2012	8:49:54 AM	PH3 valve closed
2/1/2012	8:49:54 AM	SiCl4 pre valve closed
2/1/2012	8:49:54 AM	SiCl4 post valve closed
2/1/2012	8:49:54 AM	Bypass valve closed
2/1/2012	8:49:54 AM	Bubbler valve closed
2/1/2012	8:49:54 AM	Helium valve opened
2/1/2012	8:49:54 AM	Main Vac valve opened
2/1/2012	8:49:54 AM	Helium MFC set to  20.000000
2/1/2012	8:49:54 AM	H2 MFC set to  0.000000
2/1/2012	8:49:54 AM	BCl3 MFC set to  0.000000
2/1/2012	8:49:54 AM	PH3 MFC set to  0.000000
2/1/2012	8:49:54 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:49:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:49:54 AM	Tube furnace set to 0
2/1/2012	8:50:24 AM	Helium valve closed
2/1/2012	8:50:24 AM	H2 valve closed
2/1/2012	8:50:24 AM	BCl3 valve closed
2/1/2012	8:50:24 AM	PH3 valve closed
2/1/2012	8:50:24 AM	SiCl4 pre valve closed
2/1/2012	8:50:24 AM	SiCl4 post valve closed
2/1/2012	8:50:24 AM	Bypass valve closed
2/1/2012	8:50:24 AM	Bubbler valve closed
2/1/2012	8:50:24 AM	Main Vac valve opened
2/1/2012	8:50:24 AM	Helium MFC set to  0.000000
2/1/2012	8:50:24 AM	H2 MFC set to  0.000000
2/1/2012	8:50:24 AM	BCl3 MFC set to  0.000000
2/1/2012	8:50:24 AM	PH3 MFC set to  0.000000
2/1/2012	8:50:24 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:50:24 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:50:24 AM	Tube furnace set to 0
2/1/2012	8:50:54 AM	H2 valve closed
2/1/2012	8:50:54 AM	BCl3 valve closed
2/1/2012	8:50:54 AM	PH3 valve closed
2/1/2012	8:50:54 AM	SiCl4 pre valve closed
2/1/2012	8:50:54 AM	SiCl4 post valve closed
2/1/2012	8:50:54 AM	Bypass valve closed
2/1/2012	8:50:54 AM	Bubbler valve closed
2/1/2012	8:50:54 AM	Helium valve opened
2/1/2012	8:50:54 AM	Main Vac valve opened
2/1/2012	8:50:54 AM	Helium MFC set to  20.000000
2/1/2012	8:50:54 AM	H2 MFC set to  0.000000
2/1/2012	8:50:54 AM	BCl3 MFC set to  0.000000
2/1/2012	8:50:54 AM	PH3 MFC set to  0.000000
2/1/2012	8:50:54 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:50:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:50:54 AM	Tube furnace set to 0
2/1/2012	8:51:24 AM	Helium valve closed
2/1/2012	8:51:24 AM	H2 valve closed
2/1/2012	8:51:24 AM	BCl3 valve closed
2/1/2012	8:51:24 AM	PH3 valve closed
2/1/2012	8:51:24 AM	SiCl4 pre valve closed
2/1/2012	8:51:24 AM	SiCl4 post valve closed
2/1/2012	8:51:24 AM	Bypass valve closed
2/1/2012	8:51:24 AM	Bubbler valve closed
2/1/2012	8:51:24 AM	Main Vac valve opened
2/1/2012	8:51:24 AM	Helium MFC set to  0.000000
2/1/2012	8:51:24 AM	H2 MFC set to  0.000000
2/1/2012	8:51:24 AM	BCl3 MFC set to  0.000000
2/1/2012	8:51:24 AM	PH3 MFC set to  0.000000
2/1/2012	8:51:24 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:51:24 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:51:24 AM	Tube furnace set to 0
2/1/2012	8:51:55 AM	H2 valve closed
2/1/2012	8:51:55 AM	BCl3 valve closed
2/1/2012	8:51:55 AM	PH3 valve closed
2/1/2012	8:51:55 AM	SiCl4 pre valve closed
2/1/2012	8:51:55 AM	SiCl4 post valve closed
2/1/2012	8:51:55 AM	Bypass valve closed
2/1/2012	8:51:55 AM	Bubbler valve closed
2/1/2012	8:51:55 AM	Helium valve opened
2/1/2012	8:51:55 AM	Main Vac valve opened
2/1/2012	8:51:55 AM	Helium MFC set to  20.000000
2/1/2012	8:51:55 AM	H2 MFC set to  0.000000
2/1/2012	8:51:55 AM	BCl3 MFC set to  0.000000
2/1/2012	8:51:55 AM	PH3 MFC set to  0.000000
2/1/2012	8:51:55 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:51:55 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:51:55 AM	Tube furnace set to 0
2/1/2012	8:52:25 AM	Helium valve closed
2/1/2012	8:52:25 AM	H2 valve closed
2/1/2012	8:52:25 AM	BCl3 valve closed
2/1/2012	8:52:25 AM	PH3 valve closed
2/1/2012	8:52:25 AM	SiCl4 pre valve closed
2/1/2012	8:52:25 AM	SiCl4 post valve closed
2/1/2012	8:52:25 AM	Bypass valve closed
2/1/2012	8:52:25 AM	Bubbler valve closed
2/1/2012	8:52:25 AM	Main Vac valve opened
2/1/2012	8:52:25 AM	Helium MFC set to  0.000000
2/1/2012	8:52:25 AM	H2 MFC set to  0.000000
2/1/2012	8:52:25 AM	BCl3 MFC set to  0.000000
2/1/2012	8:52:25 AM	PH3 MFC set to  0.000000
2/1/2012	8:52:25 AM	SiCl4 MFC set to  0.000000
2/1/2012	8:52:25 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:52:25 AM	Tube furnace set to 0
2/1/2012	8:52:26 AM	Run finished at 8:52 AM
2/1/2012	8:52:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/1/2012	9:33:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/1/2012	9:33:24 AM	Recipe started at 9:33 AM
2/1/2012	9:33:24 AM	Helium valve closed
2/1/2012	9:33:24 AM	H2 valve closed
2/1/2012	9:33:24 AM	BCl3 valve closed
2/1/2012	9:33:24 AM	PH3 valve closed
2/1/2012	9:33:24 AM	SiCl4 pre valve closed
2/1/2012	9:33:24 AM	SiCl4 post valve closed
2/1/2012	9:33:24 AM	Main Vac valve closed
2/1/2012	9:33:24 AM	Bypass valve closed
2/1/2012	9:33:24 AM	Bubbler valve closed
2/1/2012	9:33:24 AM	Helium MFC set to  0.000000
2/1/2012	9:33:24 AM	H2 MFC set to  0.000000
2/1/2012	9:33:24 AM	BCl3 MFC set to  0.000000
2/1/2012	9:33:24 AM	PH3 MFC set to  0.000000
2/1/2012	9:33:24 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:33:24 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:33:24 AM	Tube furnace set to 0
2/1/2012	9:33:25 AM	Run finished at 9:33 AM
2/1/2012	9:33:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/1/2012	9:33:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	9:33:39 AM	Recipe started at 9:33 AM
2/1/2012	9:33:39 AM	Helium valve closed
2/1/2012	9:33:39 AM	H2 valve closed
2/1/2012	9:33:39 AM	BCl3 valve closed
2/1/2012	9:33:39 AM	PH3 valve closed
2/1/2012	9:33:39 AM	SiCl4 pre valve closed
2/1/2012	9:33:39 AM	SiCl4 post valve closed
2/1/2012	9:33:39 AM	Main Vac valve closed
2/1/2012	9:33:39 AM	Bubbler valve closed
2/1/2012	9:33:39 AM	Bypass valve opened
2/1/2012	9:33:39 AM	Helium MFC set to  0.000000
2/1/2012	9:33:39 AM	H2 MFC set to  0.000000
2/1/2012	9:33:39 AM	BCl3 MFC set to  0.000000
2/1/2012	9:33:39 AM	PH3 MFC set to  0.000000
2/1/2012	9:33:39 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:33:39 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:33:40 AM	Tube furnace set to 0
2/1/2012	9:33:40 AM	Helium valve closed
2/1/2012	9:33:40 AM	H2 valve closed
2/1/2012	9:33:40 AM	BCl3 valve closed
2/1/2012	9:33:40 AM	PH3 valve closed
2/1/2012	9:33:40 AM	SiCl4 pre valve closed
2/1/2012	9:33:40 AM	SiCl4 post valve closed
2/1/2012	9:33:40 AM	Main Vac valve closed
2/1/2012	9:33:40 AM	Bubbler valve closed
2/1/2012	9:33:40 AM	Bypass valve opened
2/1/2012	9:33:40 AM	Helium MFC set to  0.000000
2/1/2012	9:33:40 AM	H2 MFC set to  0.000000
2/1/2012	9:33:40 AM	BCl3 MFC set to  0.000000
2/1/2012	9:33:40 AM	PH3 MFC set to  0.000000
2/1/2012	9:33:40 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:33:40 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:33:40 AM	Tube furnace set to 0
2/1/2012	9:33:46 AM	Helium valve closed
2/1/2012	9:33:46 AM	H2 valve closed
2/1/2012	9:33:46 AM	BCl3 valve closed
2/1/2012	9:33:46 AM	PH3 valve closed
2/1/2012	9:33:46 AM	SiCl4 pre valve closed
2/1/2012	9:33:46 AM	SiCl4 post valve closed
2/1/2012	9:33:46 AM	Bypass valve closed
2/1/2012	9:33:46 AM	Bubbler valve closed
2/1/2012	9:33:46 AM	Main Vac valve opened
2/1/2012	9:33:46 AM	Helium MFC set to  0.000000
2/1/2012	9:33:46 AM	H2 MFC set to  0.000000
2/1/2012	9:33:46 AM	BCl3 MFC set to  0.000000
2/1/2012	9:33:46 AM	PH3 MFC set to  0.000000
2/1/2012	9:33:46 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:33:46 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:33:46 AM	Tube furnace set to 0
2/1/2012	9:33:47 AM	Run finished at 9:33 AM
2/1/2012	9:33:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	9:34:20 AM	Main Vac valve closed
2/1/2012	9:34:26 AM	Main Vac valve opened
2/1/2012	9:34:51 AM	Main Vac valve closed
2/1/2012	9:35:03 AM	Main Vac valve opened
2/1/2012	9:36:17 AM	Main Vac valve closed
2/1/2012	9:36:25 AM	Main Vac valve opened
2/1/2012	9:36:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/1/2012	9:36:58 AM	Recipe started at 9:36 AM
2/1/2012	9:36:58 AM	Helium valve closed
2/1/2012	9:36:58 AM	H2 valve closed
2/1/2012	9:36:58 AM	BCl3 valve closed
2/1/2012	9:36:58 AM	PH3 valve closed
2/1/2012	9:36:58 AM	SiCl4 pre valve closed
2/1/2012	9:36:58 AM	SiCl4 post valve closed
2/1/2012	9:36:58 AM	Main Vac valve closed
2/1/2012	9:36:58 AM	Bubbler valve closed
2/1/2012	9:36:58 AM	Bypass valve opened
2/1/2012	9:36:58 AM	Helium MFC set to  0.000000
2/1/2012	9:36:58 AM	H2 MFC set to  0.000000
2/1/2012	9:36:58 AM	BCl3 MFC set to  0.000000
2/1/2012	9:36:58 AM	PH3 MFC set to  0.000000
2/1/2012	9:36:58 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:36:58 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:36:58 AM	Tube furnace set to 0
2/1/2012	9:36:58 AM	Helium valve closed
2/1/2012	9:36:58 AM	H2 valve closed
2/1/2012	9:36:58 AM	BCl3 valve closed
2/1/2012	9:36:58 AM	PH3 valve closed
2/1/2012	9:36:58 AM	SiCl4 pre valve closed
2/1/2012	9:36:58 AM	SiCl4 post valve closed
2/1/2012	9:36:58 AM	Main Vac valve closed
2/1/2012	9:36:58 AM	Bubbler valve closed
2/1/2012	9:36:58 AM	Bypass valve opened
2/1/2012	9:36:58 AM	Helium MFC set to  0.000000
2/1/2012	9:36:58 AM	H2 MFC set to  0.000000
2/1/2012	9:36:58 AM	BCl3 MFC set to  0.000000
2/1/2012	9:36:58 AM	PH3 MFC set to  0.000000
2/1/2012	9:36:58 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:36:58 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:36:58 AM	Tube furnace set to 0
2/1/2012	9:37:28 AM	Helium valve closed
2/1/2012	9:37:28 AM	H2 valve closed
2/1/2012	9:37:28 AM	BCl3 valve closed
2/1/2012	9:37:28 AM	PH3 valve closed
2/1/2012	9:37:28 AM	SiCl4 pre valve closed
2/1/2012	9:37:28 AM	SiCl4 post valve closed
2/1/2012	9:37:28 AM	Bypass valve closed
2/1/2012	9:37:28 AM	Bubbler valve closed
2/1/2012	9:37:28 AM	Main Vac valve opened
2/1/2012	9:37:28 AM	Helium MFC set to  0.000000
2/1/2012	9:37:28 AM	H2 MFC set to  0.000000
2/1/2012	9:37:28 AM	BCl3 MFC set to  0.000000
2/1/2012	9:37:28 AM	PH3 MFC set to  0.000000
2/1/2012	9:37:28 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:37:28 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:37:29 AM	Tube furnace set to 0
2/1/2012	9:37:59 AM	H2 valve closed
2/1/2012	9:37:59 AM	BCl3 valve closed
2/1/2012	9:37:59 AM	PH3 valve closed
2/1/2012	9:37:59 AM	SiCl4 pre valve closed
2/1/2012	9:37:59 AM	SiCl4 post valve closed
2/1/2012	9:37:59 AM	Bypass valve closed
2/1/2012	9:37:59 AM	Bubbler valve closed
2/1/2012	9:37:59 AM	Helium valve opened
2/1/2012	9:37:59 AM	Main Vac valve opened
2/1/2012	9:37:59 AM	Helium MFC set to  20.000000
2/1/2012	9:37:59 AM	H2 MFC set to  0.000000
2/1/2012	9:37:59 AM	BCl3 MFC set to  0.000000
2/1/2012	9:37:59 AM	PH3 MFC set to  0.000000
2/1/2012	9:37:59 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:37:59 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:37:59 AM	Tube furnace set to 0
2/1/2012	9:38:22 AM	Helium valve closed
2/1/2012	9:38:22 AM	H2 valve closed
2/1/2012	9:38:22 AM	BCl3 valve closed
2/1/2012	9:38:22 AM	PH3 valve closed
2/1/2012	9:38:22 AM	SiCl4 pre valve closed
2/1/2012	9:38:22 AM	SiCl4 post valve closed
2/1/2012	9:38:22 AM	Bypass valve closed
2/1/2012	9:38:22 AM	Bubbler valve closed
2/1/2012	9:38:22 AM	Main Vac valve opened
2/1/2012	9:38:22 AM	Helium MFC set to  0.000000
2/1/2012	9:38:22 AM	H2 MFC set to  0.000000
2/1/2012	9:38:22 AM	BCl3 MFC set to  0.000000
2/1/2012	9:38:22 AM	PH3 MFC set to  0.000000
2/1/2012	9:38:22 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:38:22 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:38:22 AM	Tube furnace set to 0
2/1/2012	9:38:26 AM	Run aborted at 9:38 AM
2/1/2012	9:38:26 AM	Helium valve closed
2/1/2012	9:38:26 AM	H2 valve closed
2/1/2012	9:38:26 AM	BCl3 valve closed
2/1/2012	9:38:26 AM	PH3 valve closed
2/1/2012	9:38:26 AM	SiCl4 pre valve closed
2/1/2012	9:38:26 AM	SiCl4 post valve closed
2/1/2012	9:38:26 AM	Bypass valve closed
2/1/2012	9:38:26 AM	Main Vac valve closed
2/1/2012	9:38:26 AM	Bubbler valve closed
2/1/2012	9:38:26 AM	Helium MFC set to  0.000000
2/1/2012	9:38:26 AM	H2 MFC set to  0.000000
2/1/2012	9:38:26 AM	BCl3 MFC set to  0.000000
2/1/2012	9:38:26 AM	PH3 MFC set to  0.000000
2/1/2012	9:38:26 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:38:26 AM	Tube furnace set to 0
2/1/2012	9:38:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/1/2012	9:38:32 AM	Tube furnace set to 100
2/1/2012	9:38:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/1/2012	9:38:59 AM	Recipe started at 9:38 AM
2/1/2012	9:38:59 AM	Helium valve closed
2/1/2012	9:38:59 AM	H2 valve closed
2/1/2012	9:38:59 AM	BCl3 valve closed
2/1/2012	9:38:59 AM	PH3 valve closed
2/1/2012	9:38:59 AM	SiCl4 pre valve closed
2/1/2012	9:38:59 AM	SiCl4 post valve closed
2/1/2012	9:38:59 AM	Main Vac valve closed
2/1/2012	9:38:59 AM	Bubbler valve closed
2/1/2012	9:38:59 AM	Bypass valve opened
2/1/2012	9:38:59 AM	Helium MFC set to  0.000000
2/1/2012	9:38:59 AM	H2 MFC set to  0.000000
2/1/2012	9:38:59 AM	BCl3 MFC set to  0.000000
2/1/2012	9:38:59 AM	PH3 MFC set to  0.000000
2/1/2012	9:38:59 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:38:59 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:39:00 AM	Tube furnace set to 0
2/1/2012	9:39:00 AM	Helium valve closed
2/1/2012	9:39:00 AM	H2 valve closed
2/1/2012	9:39:00 AM	BCl3 valve closed
2/1/2012	9:39:00 AM	PH3 valve closed
2/1/2012	9:39:00 AM	SiCl4 pre valve closed
2/1/2012	9:39:00 AM	SiCl4 post valve closed
2/1/2012	9:39:00 AM	Main Vac valve closed
2/1/2012	9:39:00 AM	Bubbler valve closed
2/1/2012	9:39:00 AM	Bypass valve opened
2/1/2012	9:39:00 AM	Helium MFC set to  0.000000
2/1/2012	9:39:00 AM	H2 MFC set to  0.000000
2/1/2012	9:39:00 AM	BCl3 MFC set to  0.000000
2/1/2012	9:39:00 AM	PH3 MFC set to  0.000000
2/1/2012	9:39:00 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:39:00 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:39:00 AM	Tube furnace set to 0
2/1/2012	9:39:30 AM	Helium valve closed
2/1/2012	9:39:30 AM	H2 valve closed
2/1/2012	9:39:30 AM	BCl3 valve closed
2/1/2012	9:39:30 AM	PH3 valve closed
2/1/2012	9:39:30 AM	SiCl4 pre valve closed
2/1/2012	9:39:30 AM	SiCl4 post valve closed
2/1/2012	9:39:30 AM	Bypass valve closed
2/1/2012	9:39:30 AM	Bubbler valve closed
2/1/2012	9:39:30 AM	Main Vac valve opened
2/1/2012	9:39:30 AM	Helium MFC set to  0.000000
2/1/2012	9:39:30 AM	H2 MFC set to  0.000000
2/1/2012	9:39:30 AM	BCl3 MFC set to  0.000000
2/1/2012	9:39:30 AM	PH3 MFC set to  0.000000
2/1/2012	9:39:30 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:39:30 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:39:30 AM	Tube furnace set to 0
2/1/2012	9:40:00 AM	H2 valve closed
2/1/2012	9:40:00 AM	BCl3 valve closed
2/1/2012	9:40:00 AM	PH3 valve closed
2/1/2012	9:40:00 AM	SiCl4 pre valve closed
2/1/2012	9:40:00 AM	SiCl4 post valve closed
2/1/2012	9:40:00 AM	Bypass valve closed
2/1/2012	9:40:00 AM	Bubbler valve closed
2/1/2012	9:40:00 AM	Helium valve opened
2/1/2012	9:40:00 AM	Main Vac valve opened
2/1/2012	9:40:00 AM	Helium MFC set to  20.000000
2/1/2012	9:40:00 AM	H2 MFC set to  0.000000
2/1/2012	9:40:00 AM	BCl3 MFC set to  0.000000
2/1/2012	9:40:00 AM	PH3 MFC set to  0.000000
2/1/2012	9:40:00 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:40:00 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:40:00 AM	Tube furnace set to 0
2/1/2012	9:40:30 AM	Helium valve closed
2/1/2012	9:40:30 AM	H2 valve closed
2/1/2012	9:40:30 AM	BCl3 valve closed
2/1/2012	9:40:30 AM	PH3 valve closed
2/1/2012	9:40:30 AM	SiCl4 pre valve closed
2/1/2012	9:40:30 AM	SiCl4 post valve closed
2/1/2012	9:40:30 AM	Bypass valve closed
2/1/2012	9:40:30 AM	Bubbler valve closed
2/1/2012	9:40:30 AM	Main Vac valve opened
2/1/2012	9:40:30 AM	Helium MFC set to  0.000000
2/1/2012	9:40:30 AM	H2 MFC set to  0.000000
2/1/2012	9:40:30 AM	BCl3 MFC set to  0.000000
2/1/2012	9:40:30 AM	PH3 MFC set to  0.000000
2/1/2012	9:40:30 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:40:30 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:40:31 AM	Tube furnace set to 0
2/1/2012	9:41:01 AM	H2 valve closed
2/1/2012	9:41:01 AM	BCl3 valve closed
2/1/2012	9:41:01 AM	PH3 valve closed
2/1/2012	9:41:01 AM	SiCl4 pre valve closed
2/1/2012	9:41:01 AM	SiCl4 post valve closed
2/1/2012	9:41:01 AM	Bypass valve closed
2/1/2012	9:41:01 AM	Bubbler valve closed
2/1/2012	9:41:01 AM	Helium valve opened
2/1/2012	9:41:01 AM	Main Vac valve opened
2/1/2012	9:41:01 AM	Helium MFC set to  20.000000
2/1/2012	9:41:01 AM	H2 MFC set to  0.000000
2/1/2012	9:41:01 AM	BCl3 MFC set to  0.000000
2/1/2012	9:41:01 AM	PH3 MFC set to  0.000000
2/1/2012	9:41:01 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:41:01 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:41:01 AM	Tube furnace set to 0
2/1/2012	9:41:31 AM	Helium valve closed
2/1/2012	9:41:31 AM	H2 valve closed
2/1/2012	9:41:31 AM	BCl3 valve closed
2/1/2012	9:41:31 AM	PH3 valve closed
2/1/2012	9:41:31 AM	SiCl4 pre valve closed
2/1/2012	9:41:31 AM	SiCl4 post valve closed
2/1/2012	9:41:31 AM	Bypass valve closed
2/1/2012	9:41:31 AM	Bubbler valve closed
2/1/2012	9:41:31 AM	Main Vac valve opened
2/1/2012	9:41:31 AM	Helium MFC set to  0.000000
2/1/2012	9:41:31 AM	H2 MFC set to  0.000000
2/1/2012	9:41:31 AM	BCl3 MFC set to  0.000000
2/1/2012	9:41:31 AM	PH3 MFC set to  0.000000
2/1/2012	9:41:31 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:41:31 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:41:31 AM	Tube furnace set to 0
2/1/2012	9:42:01 AM	H2 valve closed
2/1/2012	9:42:01 AM	BCl3 valve closed
2/1/2012	9:42:01 AM	PH3 valve closed
2/1/2012	9:42:01 AM	SiCl4 pre valve closed
2/1/2012	9:42:01 AM	SiCl4 post valve closed
2/1/2012	9:42:01 AM	Bypass valve closed
2/1/2012	9:42:01 AM	Bubbler valve closed
2/1/2012	9:42:01 AM	Helium valve opened
2/1/2012	9:42:01 AM	Main Vac valve opened
2/1/2012	9:42:01 AM	Helium MFC set to  20.000000
2/1/2012	9:42:01 AM	H2 MFC set to  0.000000
2/1/2012	9:42:01 AM	BCl3 MFC set to  0.000000
2/1/2012	9:42:01 AM	PH3 MFC set to  0.000000
2/1/2012	9:42:01 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:42:01 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:42:01 AM	Tube furnace set to 0
2/1/2012	9:42:31 AM	Helium valve closed
2/1/2012	9:42:31 AM	H2 valve closed
2/1/2012	9:42:31 AM	BCl3 valve closed
2/1/2012	9:42:31 AM	PH3 valve closed
2/1/2012	9:42:31 AM	SiCl4 pre valve closed
2/1/2012	9:42:31 AM	SiCl4 post valve closed
2/1/2012	9:42:31 AM	Bypass valve closed
2/1/2012	9:42:31 AM	Bubbler valve closed
2/1/2012	9:42:31 AM	Main Vac valve opened
2/1/2012	9:42:31 AM	Helium MFC set to  0.000000
2/1/2012	9:42:31 AM	H2 MFC set to  0.000000
2/1/2012	9:42:31 AM	BCl3 MFC set to  0.000000
2/1/2012	9:42:31 AM	PH3 MFC set to  0.000000
2/1/2012	9:42:31 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:42:31 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:42:31 AM	Tube furnace set to 0
2/1/2012	9:43:02 AM	H2 valve closed
2/1/2012	9:43:02 AM	BCl3 valve closed
2/1/2012	9:43:02 AM	PH3 valve closed
2/1/2012	9:43:02 AM	SiCl4 pre valve closed
2/1/2012	9:43:02 AM	SiCl4 post valve closed
2/1/2012	9:43:02 AM	Bypass valve closed
2/1/2012	9:43:02 AM	Bubbler valve closed
2/1/2012	9:43:02 AM	Helium valve opened
2/1/2012	9:43:02 AM	Main Vac valve opened
2/1/2012	9:43:02 AM	Helium MFC set to  20.000000
2/1/2012	9:43:02 AM	H2 MFC set to  0.000000
2/1/2012	9:43:02 AM	BCl3 MFC set to  0.000000
2/1/2012	9:43:02 AM	PH3 MFC set to  0.000000
2/1/2012	9:43:02 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:43:02 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:43:02 AM	Tube furnace set to 0
2/1/2012	9:43:32 AM	Helium valve closed
2/1/2012	9:43:32 AM	H2 valve closed
2/1/2012	9:43:32 AM	BCl3 valve closed
2/1/2012	9:43:32 AM	PH3 valve closed
2/1/2012	9:43:32 AM	SiCl4 pre valve closed
2/1/2012	9:43:32 AM	SiCl4 post valve closed
2/1/2012	9:43:32 AM	Bypass valve closed
2/1/2012	9:43:32 AM	Bubbler valve closed
2/1/2012	9:43:32 AM	Main Vac valve opened
2/1/2012	9:43:32 AM	Helium MFC set to  0.000000
2/1/2012	9:43:32 AM	H2 MFC set to  0.000000
2/1/2012	9:43:32 AM	BCl3 MFC set to  0.000000
2/1/2012	9:43:32 AM	PH3 MFC set to  0.000000
2/1/2012	9:43:32 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:43:32 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:43:32 AM	Tube furnace set to 0
2/1/2012	9:44:02 AM	H2 valve closed
2/1/2012	9:44:02 AM	BCl3 valve closed
2/1/2012	9:44:02 AM	PH3 valve closed
2/1/2012	9:44:02 AM	SiCl4 pre valve closed
2/1/2012	9:44:02 AM	SiCl4 post valve closed
2/1/2012	9:44:02 AM	Bypass valve closed
2/1/2012	9:44:02 AM	Bubbler valve closed
2/1/2012	9:44:02 AM	Helium valve opened
2/1/2012	9:44:02 AM	Main Vac valve opened
2/1/2012	9:44:02 AM	Helium MFC set to  20.000000
2/1/2012	9:44:02 AM	H2 MFC set to  0.000000
2/1/2012	9:44:02 AM	BCl3 MFC set to  0.000000
2/1/2012	9:44:02 AM	PH3 MFC set to  0.000000
2/1/2012	9:44:02 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:44:02 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:44:02 AM	Tube furnace set to 0
2/1/2012	9:44:32 AM	Helium valve closed
2/1/2012	9:44:32 AM	H2 valve closed
2/1/2012	9:44:32 AM	BCl3 valve closed
2/1/2012	9:44:32 AM	PH3 valve closed
2/1/2012	9:44:32 AM	SiCl4 pre valve closed
2/1/2012	9:44:32 AM	SiCl4 post valve closed
2/1/2012	9:44:32 AM	Bypass valve closed
2/1/2012	9:44:32 AM	Bubbler valve closed
2/1/2012	9:44:32 AM	Main Vac valve opened
2/1/2012	9:44:32 AM	Helium MFC set to  0.000000
2/1/2012	9:44:32 AM	H2 MFC set to  0.000000
2/1/2012	9:44:32 AM	BCl3 MFC set to  0.000000
2/1/2012	9:44:32 AM	PH3 MFC set to  0.000000
2/1/2012	9:44:32 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:44:32 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:44:32 AM	Tube furnace set to 0
2/1/2012	9:45:02 AM	H2 valve closed
2/1/2012	9:45:02 AM	BCl3 valve closed
2/1/2012	9:45:02 AM	PH3 valve closed
2/1/2012	9:45:02 AM	SiCl4 pre valve closed
2/1/2012	9:45:02 AM	SiCl4 post valve closed
2/1/2012	9:45:02 AM	Bypass valve closed
2/1/2012	9:45:02 AM	Bubbler valve closed
2/1/2012	9:45:02 AM	Helium valve opened
2/1/2012	9:45:02 AM	Main Vac valve opened
2/1/2012	9:45:02 AM	Helium MFC set to  20.000000
2/1/2012	9:45:02 AM	H2 MFC set to  0.000000
2/1/2012	9:45:02 AM	BCl3 MFC set to  0.000000
2/1/2012	9:45:02 AM	PH3 MFC set to  0.000000
2/1/2012	9:45:02 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:45:02 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:45:03 AM	Tube furnace set to 0
2/1/2012	9:45:33 AM	Helium valve closed
2/1/2012	9:45:33 AM	H2 valve closed
2/1/2012	9:45:33 AM	BCl3 valve closed
2/1/2012	9:45:33 AM	PH3 valve closed
2/1/2012	9:45:33 AM	SiCl4 pre valve closed
2/1/2012	9:45:33 AM	SiCl4 post valve closed
2/1/2012	9:45:33 AM	Bypass valve closed
2/1/2012	9:45:33 AM	Bubbler valve closed
2/1/2012	9:45:33 AM	Main Vac valve opened
2/1/2012	9:45:33 AM	Helium MFC set to  0.000000
2/1/2012	9:45:33 AM	H2 MFC set to  0.000000
2/1/2012	9:45:33 AM	BCl3 MFC set to  0.000000
2/1/2012	9:45:33 AM	PH3 MFC set to  0.000000
2/1/2012	9:45:33 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:45:33 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:45:33 AM	Tube furnace set to 0
2/1/2012	9:46:03 AM	H2 valve closed
2/1/2012	9:46:03 AM	BCl3 valve closed
2/1/2012	9:46:03 AM	PH3 valve closed
2/1/2012	9:46:03 AM	SiCl4 pre valve closed
2/1/2012	9:46:03 AM	SiCl4 post valve closed
2/1/2012	9:46:03 AM	Bypass valve closed
2/1/2012	9:46:03 AM	Bubbler valve closed
2/1/2012	9:46:03 AM	Helium valve opened
2/1/2012	9:46:03 AM	Main Vac valve opened
2/1/2012	9:46:03 AM	Helium MFC set to  20.000000
2/1/2012	9:46:03 AM	H2 MFC set to  0.000000
2/1/2012	9:46:03 AM	BCl3 MFC set to  0.000000
2/1/2012	9:46:03 AM	PH3 MFC set to  0.000000
2/1/2012	9:46:03 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:46:03 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:46:03 AM	Tube furnace set to 0
2/1/2012	9:46:33 AM	Helium valve closed
2/1/2012	9:46:33 AM	H2 valve closed
2/1/2012	9:46:33 AM	BCl3 valve closed
2/1/2012	9:46:33 AM	PH3 valve closed
2/1/2012	9:46:33 AM	SiCl4 pre valve closed
2/1/2012	9:46:33 AM	SiCl4 post valve closed
2/1/2012	9:46:33 AM	Bypass valve closed
2/1/2012	9:46:33 AM	Bubbler valve closed
2/1/2012	9:46:33 AM	Main Vac valve opened
2/1/2012	9:46:33 AM	Helium MFC set to  0.000000
2/1/2012	9:46:33 AM	H2 MFC set to  0.000000
2/1/2012	9:46:33 AM	BCl3 MFC set to  0.000000
2/1/2012	9:46:33 AM	PH3 MFC set to  0.000000
2/1/2012	9:46:33 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:46:33 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:46:33 AM	Tube furnace set to 0
2/1/2012	9:47:03 AM	H2 valve closed
2/1/2012	9:47:03 AM	BCl3 valve closed
2/1/2012	9:47:03 AM	PH3 valve closed
2/1/2012	9:47:03 AM	SiCl4 pre valve closed
2/1/2012	9:47:03 AM	SiCl4 post valve closed
2/1/2012	9:47:03 AM	Bypass valve closed
2/1/2012	9:47:03 AM	Bubbler valve closed
2/1/2012	9:47:03 AM	Helium valve opened
2/1/2012	9:47:03 AM	Main Vac valve opened
2/1/2012	9:47:03 AM	Helium MFC set to  20.000000
2/1/2012	9:47:03 AM	H2 MFC set to  0.000000
2/1/2012	9:47:03 AM	BCl3 MFC set to  0.000000
2/1/2012	9:47:03 AM	PH3 MFC set to  0.000000
2/1/2012	9:47:03 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:47:03 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:47:03 AM	Tube furnace set to 0
2/1/2012	9:47:33 AM	Helium valve closed
2/1/2012	9:47:33 AM	H2 valve closed
2/1/2012	9:47:33 AM	BCl3 valve closed
2/1/2012	9:47:33 AM	PH3 valve closed
2/1/2012	9:47:33 AM	SiCl4 pre valve closed
2/1/2012	9:47:33 AM	SiCl4 post valve closed
2/1/2012	9:47:33 AM	Bypass valve closed
2/1/2012	9:47:33 AM	Bubbler valve closed
2/1/2012	9:47:33 AM	Main Vac valve opened
2/1/2012	9:47:33 AM	Helium MFC set to  0.000000
2/1/2012	9:47:33 AM	H2 MFC set to  0.000000
2/1/2012	9:47:33 AM	BCl3 MFC set to  0.000000
2/1/2012	9:47:33 AM	PH3 MFC set to  0.000000
2/1/2012	9:47:33 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:47:33 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:47:34 AM	Tube furnace set to 0
2/1/2012	9:48:04 AM	H2 valve closed
2/1/2012	9:48:04 AM	BCl3 valve closed
2/1/2012	9:48:04 AM	PH3 valve closed
2/1/2012	9:48:04 AM	SiCl4 pre valve closed
2/1/2012	9:48:04 AM	SiCl4 post valve closed
2/1/2012	9:48:04 AM	Bypass valve closed
2/1/2012	9:48:04 AM	Bubbler valve closed
2/1/2012	9:48:04 AM	Helium valve opened
2/1/2012	9:48:04 AM	Main Vac valve opened
2/1/2012	9:48:04 AM	Helium MFC set to  20.000000
2/1/2012	9:48:04 AM	H2 MFC set to  0.000000
2/1/2012	9:48:04 AM	BCl3 MFC set to  0.000000
2/1/2012	9:48:04 AM	PH3 MFC set to  0.000000
2/1/2012	9:48:04 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:48:04 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:48:04 AM	Tube furnace set to 0
2/1/2012	9:48:34 AM	Helium valve closed
2/1/2012	9:48:34 AM	H2 valve closed
2/1/2012	9:48:34 AM	BCl3 valve closed
2/1/2012	9:48:34 AM	PH3 valve closed
2/1/2012	9:48:34 AM	SiCl4 pre valve closed
2/1/2012	9:48:34 AM	SiCl4 post valve closed
2/1/2012	9:48:34 AM	Bypass valve closed
2/1/2012	9:48:34 AM	Bubbler valve closed
2/1/2012	9:48:34 AM	Main Vac valve opened
2/1/2012	9:48:34 AM	Helium MFC set to  0.000000
2/1/2012	9:48:34 AM	H2 MFC set to  0.000000
2/1/2012	9:48:34 AM	BCl3 MFC set to  0.000000
2/1/2012	9:48:34 AM	PH3 MFC set to  0.000000
2/1/2012	9:48:34 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:48:34 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:48:34 AM	Tube furnace set to 0
2/1/2012	9:49:04 AM	H2 valve closed
2/1/2012	9:49:04 AM	BCl3 valve closed
2/1/2012	9:49:04 AM	PH3 valve closed
2/1/2012	9:49:04 AM	SiCl4 pre valve closed
2/1/2012	9:49:04 AM	SiCl4 post valve closed
2/1/2012	9:49:04 AM	Bypass valve closed
2/1/2012	9:49:04 AM	Bubbler valve closed
2/1/2012	9:49:04 AM	Helium valve opened
2/1/2012	9:49:04 AM	Main Vac valve opened
2/1/2012	9:49:04 AM	Helium MFC set to  20.000000
2/1/2012	9:49:04 AM	H2 MFC set to  0.000000
2/1/2012	9:49:04 AM	BCl3 MFC set to  0.000000
2/1/2012	9:49:04 AM	PH3 MFC set to  0.000000
2/1/2012	9:49:04 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:49:04 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:49:04 AM	Tube furnace set to 0
2/1/2012	9:49:34 AM	Helium valve closed
2/1/2012	9:49:34 AM	H2 valve closed
2/1/2012	9:49:34 AM	BCl3 valve closed
2/1/2012	9:49:34 AM	PH3 valve closed
2/1/2012	9:49:34 AM	SiCl4 pre valve closed
2/1/2012	9:49:34 AM	SiCl4 post valve closed
2/1/2012	9:49:34 AM	Bypass valve closed
2/1/2012	9:49:34 AM	Bubbler valve closed
2/1/2012	9:49:34 AM	Main Vac valve opened
2/1/2012	9:49:34 AM	Helium MFC set to  0.000000
2/1/2012	9:49:34 AM	H2 MFC set to  0.000000
2/1/2012	9:49:34 AM	BCl3 MFC set to  0.000000
2/1/2012	9:49:34 AM	PH3 MFC set to  0.000000
2/1/2012	9:49:34 AM	SiCl4 MFC set to  0.000000
2/1/2012	9:49:34 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:49:34 AM	Tube furnace set to 0
2/1/2012	9:49:35 AM	Run finished at 9:49 AM
2/1/2012	9:49:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/1/2012	10:05:51 AM	Main Vac valve closed
2/1/2012	10:06:07 AM	Main Vac valve opened
2/1/2012	10:06:14 AM	Tube furnace set to 150
2/1/2012	10:06:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/1/2012	10:06:49 AM	Recipe started at 10:06 AM
2/1/2012	10:06:49 AM	Helium valve closed
2/1/2012	10:06:49 AM	H2 valve closed
2/1/2012	10:06:49 AM	BCl3 valve closed
2/1/2012	10:06:49 AM	PH3 valve closed
2/1/2012	10:06:49 AM	SiCl4 pre valve closed
2/1/2012	10:06:49 AM	SiCl4 post valve closed
2/1/2012	10:06:49 AM	Main Vac valve closed
2/1/2012	10:06:49 AM	Bubbler valve closed
2/1/2012	10:06:49 AM	Bypass valve opened
2/1/2012	10:06:49 AM	Helium MFC set to  0.000000
2/1/2012	10:06:49 AM	H2 MFC set to  0.000000
2/1/2012	10:06:49 AM	BCl3 MFC set to  0.000000
2/1/2012	10:06:49 AM	PH3 MFC set to  0.000000
2/1/2012	10:06:49 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:06:49 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:06:49 AM	Tube furnace set to 0
2/1/2012	10:06:50 AM	Helium valve closed
2/1/2012	10:06:50 AM	H2 valve closed
2/1/2012	10:06:50 AM	BCl3 valve closed
2/1/2012	10:06:50 AM	PH3 valve closed
2/1/2012	10:06:50 AM	SiCl4 pre valve closed
2/1/2012	10:06:50 AM	SiCl4 post valve closed
2/1/2012	10:06:50 AM	Main Vac valve closed
2/1/2012	10:06:50 AM	Bubbler valve closed
2/1/2012	10:06:50 AM	Bypass valve opened
2/1/2012	10:06:50 AM	Helium MFC set to  0.000000
2/1/2012	10:06:50 AM	H2 MFC set to  0.000000
2/1/2012	10:06:50 AM	BCl3 MFC set to  0.000000
2/1/2012	10:06:50 AM	PH3 MFC set to  0.000000
2/1/2012	10:06:50 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:06:50 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:06:50 AM	Tube furnace set to 0
2/1/2012	10:07:20 AM	Helium valve closed
2/1/2012	10:07:20 AM	H2 valve closed
2/1/2012	10:07:20 AM	BCl3 valve closed
2/1/2012	10:07:20 AM	PH3 valve closed
2/1/2012	10:07:20 AM	SiCl4 pre valve closed
2/1/2012	10:07:20 AM	SiCl4 post valve closed
2/1/2012	10:07:20 AM	Bypass valve closed
2/1/2012	10:07:20 AM	Bubbler valve closed
2/1/2012	10:07:20 AM	Main Vac valve opened
2/1/2012	10:07:20 AM	Helium MFC set to  0.000000
2/1/2012	10:07:20 AM	H2 MFC set to  0.000000
2/1/2012	10:07:20 AM	BCl3 MFC set to  0.000000
2/1/2012	10:07:20 AM	PH3 MFC set to  0.000000
2/1/2012	10:07:20 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:07:20 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:07:20 AM	Tube furnace set to 0
2/1/2012	10:07:50 AM	H2 valve closed
2/1/2012	10:07:50 AM	BCl3 valve closed
2/1/2012	10:07:50 AM	PH3 valve closed
2/1/2012	10:07:50 AM	SiCl4 pre valve closed
2/1/2012	10:07:50 AM	SiCl4 post valve closed
2/1/2012	10:07:50 AM	Bypass valve closed
2/1/2012	10:07:50 AM	Bubbler valve closed
2/1/2012	10:07:50 AM	Helium valve opened
2/1/2012	10:07:50 AM	Main Vac valve opened
2/1/2012	10:07:50 AM	Helium MFC set to  20.000000
2/1/2012	10:07:50 AM	H2 MFC set to  0.000000
2/1/2012	10:07:50 AM	BCl3 MFC set to  0.000000
2/1/2012	10:07:50 AM	PH3 MFC set to  0.000000
2/1/2012	10:07:50 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:07:50 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:07:50 AM	Tube furnace set to 0
2/1/2012	10:08:16 AM	Helium valve closed
2/1/2012	10:08:16 AM	H2 valve closed
2/1/2012	10:08:16 AM	BCl3 valve closed
2/1/2012	10:08:16 AM	PH3 valve closed
2/1/2012	10:08:16 AM	SiCl4 pre valve closed
2/1/2012	10:08:16 AM	SiCl4 post valve closed
2/1/2012	10:08:16 AM	Bypass valve closed
2/1/2012	10:08:16 AM	Bubbler valve closed
2/1/2012	10:08:16 AM	Main Vac valve opened
2/1/2012	10:08:16 AM	Helium MFC set to  0.000000
2/1/2012	10:08:16 AM	H2 MFC set to  0.000000
2/1/2012	10:08:16 AM	BCl3 MFC set to  0.000000
2/1/2012	10:08:16 AM	PH3 MFC set to  0.000000
2/1/2012	10:08:16 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:08:16 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:08:16 AM	Tube furnace set to 0
2/1/2012	10:08:24 AM	Run aborted at 10:08 AM
2/1/2012	10:08:24 AM	Helium valve closed
2/1/2012	10:08:24 AM	H2 valve closed
2/1/2012	10:08:24 AM	BCl3 valve closed
2/1/2012	10:08:24 AM	PH3 valve closed
2/1/2012	10:08:24 AM	SiCl4 pre valve closed
2/1/2012	10:08:24 AM	SiCl4 post valve closed
2/1/2012	10:08:24 AM	Bypass valve closed
2/1/2012	10:08:24 AM	Main Vac valve closed
2/1/2012	10:08:24 AM	Bubbler valve closed
2/1/2012	10:08:24 AM	Helium MFC set to  0.000000
2/1/2012	10:08:24 AM	H2 MFC set to  0.000000
2/1/2012	10:08:24 AM	BCl3 MFC set to  0.000000
2/1/2012	10:08:24 AM	PH3 MFC set to  0.000000
2/1/2012	10:08:24 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:08:24 AM	Tube furnace set to 0
2/1/2012	10:08:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/1/2012	10:08:26 AM	Main Vac valve opened
2/1/2012	10:10:02 AM	Recipe started at 10:09 AM
2/1/2012	10:10:02 AM	Helium valve closed
2/1/2012	10:10:02 AM	H2 valve closed
2/1/2012	10:10:02 AM	BCl3 valve closed
2/1/2012	10:10:02 AM	PH3 valve closed
2/1/2012	10:10:02 AM	SiCl4 pre valve closed
2/1/2012	10:10:02 AM	SiCl4 post valve closed
2/1/2012	10:10:02 AM	Bypass valve closed
2/1/2012	10:10:02 AM	Bubbler valve closed
2/1/2012	10:10:02 AM	Main Vac valve opened
2/1/2012	10:10:02 AM	Helium MFC set to  0.000000
2/1/2012	10:10:02 AM	H2 MFC set to  0.000000
2/1/2012	10:10:02 AM	BCl3 MFC set to  0.000000
2/1/2012	10:10:02 AM	PH3 MFC set to  0.000000
2/1/2012	10:10:02 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:10:02 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:10:02 AM	Tube furnace set to 150
2/1/2012	10:10:32 AM	H2 valve closed
2/1/2012	10:10:32 AM	BCl3 valve closed
2/1/2012	10:10:32 AM	PH3 valve closed
2/1/2012	10:10:32 AM	SiCl4 pre valve closed
2/1/2012	10:10:32 AM	SiCl4 post valve closed
2/1/2012	10:10:32 AM	Bypass valve closed
2/1/2012	10:10:32 AM	Bubbler valve closed
2/1/2012	10:10:32 AM	Helium valve opened
2/1/2012	10:10:32 AM	Main Vac valve opened
2/1/2012	10:10:32 AM	Helium MFC set to  20.000000
2/1/2012	10:10:32 AM	H2 MFC set to  0.000000
2/1/2012	10:10:32 AM	BCl3 MFC set to  0.000000
2/1/2012	10:10:32 AM	PH3 MFC set to  0.000000
2/1/2012	10:10:32 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:10:32 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:10:33 AM	Tube furnace set to 150
2/1/2012	10:11:03 AM	Helium valve closed
2/1/2012	10:11:03 AM	H2 valve closed
2/1/2012	10:11:03 AM	BCl3 valve closed
2/1/2012	10:11:03 AM	PH3 valve closed
2/1/2012	10:11:03 AM	SiCl4 pre valve closed
2/1/2012	10:11:03 AM	SiCl4 post valve closed
2/1/2012	10:11:03 AM	Bypass valve closed
2/1/2012	10:11:03 AM	Bubbler valve closed
2/1/2012	10:11:03 AM	Main Vac valve opened
2/1/2012	10:11:03 AM	Helium MFC set to  0.000000
2/1/2012	10:11:03 AM	H2 MFC set to  0.000000
2/1/2012	10:11:03 AM	BCl3 MFC set to  0.000000
2/1/2012	10:11:03 AM	PH3 MFC set to  0.000000
2/1/2012	10:11:03 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:11:03 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:11:03 AM	Tube furnace set to 150
2/1/2012	10:11:33 AM	H2 valve closed
2/1/2012	10:11:33 AM	BCl3 valve closed
2/1/2012	10:11:33 AM	PH3 valve closed
2/1/2012	10:11:33 AM	SiCl4 pre valve closed
2/1/2012	10:11:33 AM	SiCl4 post valve closed
2/1/2012	10:11:33 AM	Bypass valve closed
2/1/2012	10:11:33 AM	Bubbler valve closed
2/1/2012	10:11:33 AM	Helium valve opened
2/1/2012	10:11:33 AM	Main Vac valve opened
2/1/2012	10:11:33 AM	Helium MFC set to  20.000000
2/1/2012	10:11:33 AM	H2 MFC set to  0.000000
2/1/2012	10:11:33 AM	BCl3 MFC set to  0.000000
2/1/2012	10:11:33 AM	PH3 MFC set to  0.000000
2/1/2012	10:11:33 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:11:33 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:11:33 AM	Tube furnace set to 150
2/1/2012	10:12:03 AM	Helium valve closed
2/1/2012	10:12:03 AM	H2 valve closed
2/1/2012	10:12:03 AM	BCl3 valve closed
2/1/2012	10:12:03 AM	PH3 valve closed
2/1/2012	10:12:03 AM	SiCl4 pre valve closed
2/1/2012	10:12:03 AM	SiCl4 post valve closed
2/1/2012	10:12:03 AM	Bypass valve closed
2/1/2012	10:12:03 AM	Bubbler valve closed
2/1/2012	10:12:03 AM	Main Vac valve opened
2/1/2012	10:12:03 AM	Helium MFC set to  0.000000
2/1/2012	10:12:03 AM	H2 MFC set to  0.000000
2/1/2012	10:12:03 AM	BCl3 MFC set to  0.000000
2/1/2012	10:12:03 AM	PH3 MFC set to  0.000000
2/1/2012	10:12:03 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:12:03 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:12:03 AM	Tube furnace set to 150
2/1/2012	10:12:33 AM	H2 valve closed
2/1/2012	10:12:33 AM	BCl3 valve closed
2/1/2012	10:12:33 AM	PH3 valve closed
2/1/2012	10:12:33 AM	SiCl4 pre valve closed
2/1/2012	10:12:33 AM	SiCl4 post valve closed
2/1/2012	10:12:33 AM	Bypass valve closed
2/1/2012	10:12:33 AM	Bubbler valve closed
2/1/2012	10:12:33 AM	Helium valve opened
2/1/2012	10:12:33 AM	Main Vac valve opened
2/1/2012	10:12:33 AM	Helium MFC set to  20.000000
2/1/2012	10:12:33 AM	H2 MFC set to  0.000000
2/1/2012	10:12:33 AM	BCl3 MFC set to  0.000000
2/1/2012	10:12:33 AM	PH3 MFC set to  0.000000
2/1/2012	10:12:33 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:12:33 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:12:33 AM	Tube furnace set to 150
2/1/2012	10:13:03 AM	Helium valve closed
2/1/2012	10:13:03 AM	H2 valve closed
2/1/2012	10:13:03 AM	BCl3 valve closed
2/1/2012	10:13:03 AM	PH3 valve closed
2/1/2012	10:13:03 AM	SiCl4 pre valve closed
2/1/2012	10:13:03 AM	SiCl4 post valve closed
2/1/2012	10:13:03 AM	Bypass valve closed
2/1/2012	10:13:03 AM	Bubbler valve closed
2/1/2012	10:13:03 AM	Main Vac valve opened
2/1/2012	10:13:03 AM	Helium MFC set to  0.000000
2/1/2012	10:13:03 AM	H2 MFC set to  0.000000
2/1/2012	10:13:03 AM	BCl3 MFC set to  0.000000
2/1/2012	10:13:03 AM	PH3 MFC set to  0.000000
2/1/2012	10:13:03 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:13:03 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:13:04 AM	Tube furnace set to 150
2/1/2012	10:13:34 AM	H2 valve closed
2/1/2012	10:13:34 AM	BCl3 valve closed
2/1/2012	10:13:34 AM	PH3 valve closed
2/1/2012	10:13:34 AM	SiCl4 pre valve closed
2/1/2012	10:13:34 AM	SiCl4 post valve closed
2/1/2012	10:13:34 AM	Bypass valve closed
2/1/2012	10:13:34 AM	Bubbler valve closed
2/1/2012	10:13:34 AM	Helium valve opened
2/1/2012	10:13:34 AM	Main Vac valve opened
2/1/2012	10:13:34 AM	Helium MFC set to  20.000000
2/1/2012	10:13:34 AM	H2 MFC set to  0.000000
2/1/2012	10:13:34 AM	BCl3 MFC set to  0.000000
2/1/2012	10:13:34 AM	PH3 MFC set to  0.000000
2/1/2012	10:13:34 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:13:34 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:13:34 AM	Tube furnace set to 150
2/1/2012	10:14:04 AM	Helium valve closed
2/1/2012	10:14:04 AM	H2 valve closed
2/1/2012	10:14:04 AM	BCl3 valve closed
2/1/2012	10:14:04 AM	PH3 valve closed
2/1/2012	10:14:04 AM	SiCl4 pre valve closed
2/1/2012	10:14:04 AM	SiCl4 post valve closed
2/1/2012	10:14:04 AM	Bypass valve closed
2/1/2012	10:14:04 AM	Bubbler valve closed
2/1/2012	10:14:04 AM	Main Vac valve opened
2/1/2012	10:14:04 AM	Helium MFC set to  0.000000
2/1/2012	10:14:04 AM	H2 MFC set to  0.000000
2/1/2012	10:14:04 AM	BCl3 MFC set to  0.000000
2/1/2012	10:14:04 AM	PH3 MFC set to  0.000000
2/1/2012	10:14:04 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:14:04 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:14:04 AM	Tube furnace set to 150
2/1/2012	10:14:34 AM	H2 valve closed
2/1/2012	10:14:34 AM	BCl3 valve closed
2/1/2012	10:14:34 AM	PH3 valve closed
2/1/2012	10:14:34 AM	SiCl4 pre valve closed
2/1/2012	10:14:34 AM	SiCl4 post valve closed
2/1/2012	10:14:34 AM	Bypass valve closed
2/1/2012	10:14:34 AM	Bubbler valve closed
2/1/2012	10:14:34 AM	Helium valve opened
2/1/2012	10:14:34 AM	Main Vac valve opened
2/1/2012	10:14:34 AM	Helium MFC set to  20.000000
2/1/2012	10:14:34 AM	H2 MFC set to  0.000000
2/1/2012	10:14:34 AM	BCl3 MFC set to  0.000000
2/1/2012	10:14:34 AM	PH3 MFC set to  0.000000
2/1/2012	10:14:34 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:14:34 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:14:34 AM	Tube furnace set to 150
2/1/2012	10:15:04 AM	Helium valve closed
2/1/2012	10:15:04 AM	H2 valve closed
2/1/2012	10:15:04 AM	BCl3 valve closed
2/1/2012	10:15:04 AM	PH3 valve closed
2/1/2012	10:15:04 AM	SiCl4 pre valve closed
2/1/2012	10:15:04 AM	SiCl4 post valve closed
2/1/2012	10:15:04 AM	Bypass valve closed
2/1/2012	10:15:04 AM	Bubbler valve closed
2/1/2012	10:15:04 AM	Main Vac valve opened
2/1/2012	10:15:04 AM	Helium MFC set to  0.000000
2/1/2012	10:15:04 AM	H2 MFC set to  0.000000
2/1/2012	10:15:04 AM	BCl3 MFC set to  0.000000
2/1/2012	10:15:04 AM	PH3 MFC set to  0.000000
2/1/2012	10:15:04 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:15:04 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:15:05 AM	Tube furnace set to 150
2/1/2012	10:15:35 AM	H2 valve closed
2/1/2012	10:15:35 AM	BCl3 valve closed
2/1/2012	10:15:35 AM	PH3 valve closed
2/1/2012	10:15:35 AM	SiCl4 pre valve closed
2/1/2012	10:15:35 AM	SiCl4 post valve closed
2/1/2012	10:15:35 AM	Bypass valve closed
2/1/2012	10:15:35 AM	Bubbler valve closed
2/1/2012	10:15:35 AM	Helium valve opened
2/1/2012	10:15:35 AM	Main Vac valve opened
2/1/2012	10:15:35 AM	Helium MFC set to  20.000000
2/1/2012	10:15:35 AM	H2 MFC set to  0.000000
2/1/2012	10:15:35 AM	BCl3 MFC set to  0.000000
2/1/2012	10:15:35 AM	PH3 MFC set to  0.000000
2/1/2012	10:15:35 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:15:35 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:15:35 AM	Tube furnace set to 150
2/1/2012	10:16:05 AM	Helium valve closed
2/1/2012	10:16:05 AM	H2 valve closed
2/1/2012	10:16:05 AM	BCl3 valve closed
2/1/2012	10:16:05 AM	PH3 valve closed
2/1/2012	10:16:05 AM	SiCl4 pre valve closed
2/1/2012	10:16:05 AM	SiCl4 post valve closed
2/1/2012	10:16:05 AM	Bypass valve closed
2/1/2012	10:16:05 AM	Bubbler valve closed
2/1/2012	10:16:05 AM	Main Vac valve opened
2/1/2012	10:16:05 AM	Helium MFC set to  0.000000
2/1/2012	10:16:05 AM	H2 MFC set to  0.000000
2/1/2012	10:16:05 AM	BCl3 MFC set to  0.000000
2/1/2012	10:16:05 AM	PH3 MFC set to  0.000000
2/1/2012	10:16:05 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:16:05 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:16:05 AM	Tube furnace set to 150
2/1/2012	10:16:35 AM	H2 valve closed
2/1/2012	10:16:35 AM	BCl3 valve closed
2/1/2012	10:16:35 AM	PH3 valve closed
2/1/2012	10:16:35 AM	SiCl4 pre valve closed
2/1/2012	10:16:35 AM	SiCl4 post valve closed
2/1/2012	10:16:35 AM	Bypass valve closed
2/1/2012	10:16:35 AM	Bubbler valve closed
2/1/2012	10:16:35 AM	Helium valve opened
2/1/2012	10:16:35 AM	Main Vac valve opened
2/1/2012	10:16:35 AM	Helium MFC set to  20.000000
2/1/2012	10:16:35 AM	H2 MFC set to  0.000000
2/1/2012	10:16:35 AM	BCl3 MFC set to  0.000000
2/1/2012	10:16:35 AM	PH3 MFC set to  0.000000
2/1/2012	10:16:35 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:16:35 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:16:35 AM	Tube furnace set to 150
2/1/2012	10:17:05 AM	Helium valve closed
2/1/2012	10:17:05 AM	H2 valve closed
2/1/2012	10:17:05 AM	BCl3 valve closed
2/1/2012	10:17:05 AM	PH3 valve closed
2/1/2012	10:17:05 AM	SiCl4 pre valve closed
2/1/2012	10:17:05 AM	SiCl4 post valve closed
2/1/2012	10:17:05 AM	Bypass valve closed
2/1/2012	10:17:05 AM	Bubbler valve closed
2/1/2012	10:17:05 AM	Main Vac valve opened
2/1/2012	10:17:05 AM	Helium MFC set to  0.000000
2/1/2012	10:17:05 AM	H2 MFC set to  0.000000
2/1/2012	10:17:05 AM	BCl3 MFC set to  0.000000
2/1/2012	10:17:05 AM	PH3 MFC set to  0.000000
2/1/2012	10:17:05 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:17:05 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:17:05 AM	Tube furnace set to 150
2/1/2012	10:17:35 AM	H2 valve closed
2/1/2012	10:17:35 AM	BCl3 valve closed
2/1/2012	10:17:35 AM	PH3 valve closed
2/1/2012	10:17:35 AM	SiCl4 pre valve closed
2/1/2012	10:17:35 AM	SiCl4 post valve closed
2/1/2012	10:17:35 AM	Bypass valve closed
2/1/2012	10:17:35 AM	Bubbler valve closed
2/1/2012	10:17:35 AM	Helium valve opened
2/1/2012	10:17:35 AM	Main Vac valve opened
2/1/2012	10:17:35 AM	Helium MFC set to  20.000000
2/1/2012	10:17:35 AM	H2 MFC set to  0.000000
2/1/2012	10:17:35 AM	BCl3 MFC set to  0.000000
2/1/2012	10:17:35 AM	PH3 MFC set to  0.000000
2/1/2012	10:17:35 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:17:35 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:17:36 AM	Tube furnace set to 150
2/1/2012	10:18:06 AM	Helium valve closed
2/1/2012	10:18:06 AM	H2 valve closed
2/1/2012	10:18:06 AM	BCl3 valve closed
2/1/2012	10:18:06 AM	PH3 valve closed
2/1/2012	10:18:06 AM	SiCl4 pre valve closed
2/1/2012	10:18:06 AM	SiCl4 post valve closed
2/1/2012	10:18:06 AM	Bypass valve closed
2/1/2012	10:18:06 AM	Bubbler valve closed
2/1/2012	10:18:06 AM	Main Vac valve opened
2/1/2012	10:18:06 AM	Helium MFC set to  0.000000
2/1/2012	10:18:06 AM	H2 MFC set to  0.000000
2/1/2012	10:18:06 AM	BCl3 MFC set to  0.000000
2/1/2012	10:18:06 AM	PH3 MFC set to  0.000000
2/1/2012	10:18:06 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:18:06 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:18:06 AM	Tube furnace set to 150
2/1/2012	10:18:36 AM	H2 valve closed
2/1/2012	10:18:36 AM	BCl3 valve closed
2/1/2012	10:18:36 AM	PH3 valve closed
2/1/2012	10:18:36 AM	SiCl4 pre valve closed
2/1/2012	10:18:36 AM	SiCl4 post valve closed
2/1/2012	10:18:36 AM	Bypass valve closed
2/1/2012	10:18:36 AM	Bubbler valve closed
2/1/2012	10:18:36 AM	Helium valve opened
2/1/2012	10:18:36 AM	Main Vac valve opened
2/1/2012	10:18:36 AM	Helium MFC set to  20.000000
2/1/2012	10:18:36 AM	H2 MFC set to  0.000000
2/1/2012	10:18:36 AM	BCl3 MFC set to  0.000000
2/1/2012	10:18:36 AM	PH3 MFC set to  0.000000
2/1/2012	10:18:36 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:18:36 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:18:36 AM	Tube furnace set to 150
2/1/2012	10:19:06 AM	Helium valve closed
2/1/2012	10:19:06 AM	H2 valve closed
2/1/2012	10:19:06 AM	BCl3 valve closed
2/1/2012	10:19:06 AM	PH3 valve closed
2/1/2012	10:19:06 AM	SiCl4 pre valve closed
2/1/2012	10:19:06 AM	SiCl4 post valve closed
2/1/2012	10:19:06 AM	Bypass valve closed
2/1/2012	10:19:06 AM	Bubbler valve closed
2/1/2012	10:19:06 AM	Main Vac valve opened
2/1/2012	10:19:06 AM	Helium MFC set to  0.000000
2/1/2012	10:19:06 AM	H2 MFC set to  0.000000
2/1/2012	10:19:06 AM	BCl3 MFC set to  0.000000
2/1/2012	10:19:06 AM	PH3 MFC set to  0.000000
2/1/2012	10:19:06 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:19:06 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:19:06 AM	Tube furnace set to 150
2/1/2012	10:19:36 AM	H2 valve closed
2/1/2012	10:19:36 AM	BCl3 valve closed
2/1/2012	10:19:36 AM	PH3 valve closed
2/1/2012	10:19:36 AM	SiCl4 pre valve closed
2/1/2012	10:19:36 AM	SiCl4 post valve closed
2/1/2012	10:19:36 AM	Bypass valve closed
2/1/2012	10:19:36 AM	Bubbler valve closed
2/1/2012	10:19:36 AM	Helium valve opened
2/1/2012	10:19:36 AM	Main Vac valve opened
2/1/2012	10:19:36 AM	Helium MFC set to  20.000000
2/1/2012	10:19:36 AM	H2 MFC set to  0.000000
2/1/2012	10:19:36 AM	BCl3 MFC set to  0.000000
2/1/2012	10:19:36 AM	PH3 MFC set to  0.000000
2/1/2012	10:19:36 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:19:36 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:19:36 AM	Tube furnace set to 150
2/1/2012	10:20:06 AM	Helium valve closed
2/1/2012	10:20:06 AM	H2 valve closed
2/1/2012	10:20:06 AM	BCl3 valve closed
2/1/2012	10:20:06 AM	PH3 valve closed
2/1/2012	10:20:06 AM	SiCl4 pre valve closed
2/1/2012	10:20:06 AM	SiCl4 post valve closed
2/1/2012	10:20:06 AM	Bypass valve closed
2/1/2012	10:20:06 AM	Bubbler valve closed
2/1/2012	10:20:06 AM	Main Vac valve opened
2/1/2012	10:20:06 AM	Helium MFC set to  0.000000
2/1/2012	10:20:06 AM	H2 MFC set to  0.000000
2/1/2012	10:20:06 AM	BCl3 MFC set to  0.000000
2/1/2012	10:20:07 AM	PH3 MFC set to  0.000000
2/1/2012	10:20:07 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:20:07 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:20:07 AM	Tube furnace set to 150
2/1/2012	10:20:08 AM	Run finished at 10:20 AM
2/1/2012	10:25:37 AM	Main Vac valve closed
2/1/2012	10:25:53 AM	Main Vac valve opened
2/1/2012	10:26:55 AM	Tube furnace set to 0
2/1/2012	10:31:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2012	10:31:17 AM	Recipe started at 10:31 AM
2/1/2012	10:31:17 AM	Helium valve closed
2/1/2012	10:31:17 AM	H2 valve closed
2/1/2012	10:31:17 AM	BCl3 valve closed
2/1/2012	10:31:17 AM	PH3 valve closed
2/1/2012	10:31:17 AM	SiCl4 pre valve closed
2/1/2012	10:31:17 AM	SiCl4 post valve closed
2/1/2012	10:31:17 AM	Main Vac valve closed
2/1/2012	10:31:17 AM	Bypass valve closed
2/1/2012	10:31:17 AM	Bubbler valve closed
2/1/2012	10:31:17 AM	Helium MFC set to  0.000000
2/1/2012	10:31:17 AM	H2 MFC set to  0.000000
2/1/2012	10:31:17 AM	BCl3 MFC set to  0.000000
2/1/2012	10:31:17 AM	PH3 MFC set to  0.000000
2/1/2012	10:31:17 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:31:17 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:31:18 AM	Tube furnace set to 0
2/1/2012	10:31:21 AM	H2 valve closed
2/1/2012	10:31:21 AM	BCl3 valve closed
2/1/2012	10:31:21 AM	PH3 valve closed
2/1/2012	10:31:21 AM	SiCl4 pre valve closed
2/1/2012	10:31:21 AM	SiCl4 post valve closed
2/1/2012	10:31:21 AM	Main Vac valve closed
2/1/2012	10:31:21 AM	Bypass valve closed
2/1/2012	10:31:21 AM	Bubbler valve closed
2/1/2012	10:31:21 AM	Helium valve opened
2/1/2012	10:31:21 AM	Helium MFC set to  500.000000
2/1/2012	10:31:21 AM	H2 MFC set to  0.000000
2/1/2012	10:31:21 AM	BCl3 MFC set to  0.000000
2/1/2012	10:31:21 AM	PH3 MFC set to  0.000000
2/1/2012	10:31:21 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:31:21 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:31:21 AM	Tube furnace set to 0
2/1/2012	10:32:26 AM	Helium valve closed
2/1/2012	10:32:26 AM	H2 valve closed
2/1/2012	10:32:26 AM	BCl3 valve closed
2/1/2012	10:32:26 AM	PH3 valve closed
2/1/2012	10:32:26 AM	SiCl4 pre valve closed
2/1/2012	10:32:26 AM	SiCl4 post valve closed
2/1/2012	10:32:26 AM	Main Vac valve closed
2/1/2012	10:32:26 AM	Bypass valve closed
2/1/2012	10:32:26 AM	Bubbler valve closed
2/1/2012	10:32:26 AM	Helium MFC set to  0.000000
2/1/2012	10:32:26 AM	H2 MFC set to  0.000000
2/1/2012	10:32:26 AM	BCl3 MFC set to  0.000000
2/1/2012	10:32:26 AM	PH3 MFC set to  0.000000
2/1/2012	10:32:26 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:32:26 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:32:26 AM	Tube furnace set to 0
2/1/2012	10:32:27 AM	Run finished at 10:32 AM
2/1/2012	10:32:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/1/2012	10:35:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	10:35:23 AM	Recipe started at 10:35 AM
2/1/2012	10:35:23 AM	Helium valve closed
2/1/2012	10:35:23 AM	H2 valve closed
2/1/2012	10:35:23 AM	BCl3 valve closed
2/1/2012	10:35:23 AM	PH3 valve closed
2/1/2012	10:35:23 AM	SiCl4 pre valve closed
2/1/2012	10:35:23 AM	SiCl4 post valve closed
2/1/2012	10:35:23 AM	Main Vac valve closed
2/1/2012	10:35:23 AM	Bubbler valve closed
2/1/2012	10:35:23 AM	Bypass valve opened
2/1/2012	10:35:23 AM	Helium MFC set to  0.000000
2/1/2012	10:35:23 AM	H2 MFC set to  0.000000
2/1/2012	10:35:23 AM	BCl3 MFC set to  0.000000
2/1/2012	10:35:23 AM	PH3 MFC set to  0.000000
2/1/2012	10:35:23 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:35:23 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:35:23 AM	Tube furnace set to 0
2/1/2012	10:36:20 AM	Helium valve closed
2/1/2012	10:36:20 AM	H2 valve closed
2/1/2012	10:36:20 AM	BCl3 valve closed
2/1/2012	10:36:20 AM	PH3 valve closed
2/1/2012	10:36:20 AM	SiCl4 pre valve closed
2/1/2012	10:36:20 AM	SiCl4 post valve closed
2/1/2012	10:36:20 AM	Main Vac valve closed
2/1/2012	10:36:20 AM	Bubbler valve closed
2/1/2012	10:36:20 AM	Bypass valve opened
2/1/2012	10:36:20 AM	Helium MFC set to  0.000000
2/1/2012	10:36:20 AM	H2 MFC set to  0.000000
2/1/2012	10:36:20 AM	BCl3 MFC set to  0.000000
2/1/2012	10:36:20 AM	PH3 MFC set to  0.000000
2/1/2012	10:36:20 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:36:20 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:36:21 AM	Tube furnace set to 0
2/1/2012	10:37:21 AM	Helium valve closed
2/1/2012	10:37:21 AM	H2 valve closed
2/1/2012	10:37:21 AM	BCl3 valve closed
2/1/2012	10:37:21 AM	PH3 valve closed
2/1/2012	10:37:21 AM	SiCl4 pre valve closed
2/1/2012	10:37:21 AM	SiCl4 post valve closed
2/1/2012	10:37:21 AM	Bypass valve closed
2/1/2012	10:37:21 AM	Bubbler valve closed
2/1/2012	10:37:21 AM	Main Vac valve opened
2/1/2012	10:37:21 AM	Helium MFC set to  0.000000
2/1/2012	10:37:21 AM	H2 MFC set to  0.000000
2/1/2012	10:37:21 AM	BCl3 MFC set to  0.000000
2/1/2012	10:37:21 AM	PH3 MFC set to  0.000000
2/1/2012	10:37:21 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:37:21 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:37:21 AM	Tube furnace set to 0
2/1/2012	10:37:22 AM	Run finished at 10:37 AM
2/1/2012	10:37:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	10:37:39 AM	Recipe started at 10:37 AM
2/1/2012	10:37:39 AM	Helium valve closed
2/1/2012	10:37:39 AM	H2 valve closed
2/1/2012	10:37:39 AM	BCl3 valve closed
2/1/2012	10:37:39 AM	PH3 valve closed
2/1/2012	10:37:39 AM	SiCl4 pre valve closed
2/1/2012	10:37:39 AM	SiCl4 post valve closed
2/1/2012	10:37:39 AM	Bypass valve closed
2/1/2012	10:37:39 AM	Bubbler valve closed
2/1/2012	10:37:39 AM	Main Vac valve opened
2/1/2012	10:37:39 AM	Helium MFC set to  0.000000
2/1/2012	10:37:39 AM	H2 MFC set to  0.000000
2/1/2012	10:37:39 AM	BCl3 MFC set to  0.000000
2/1/2012	10:37:39 AM	PH3 MFC set to  0.000000
2/1/2012	10:37:39 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:37:39 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:37:39 AM	Tube furnace set to 150
2/1/2012	10:38:09 AM	H2 valve closed
2/1/2012	10:38:09 AM	BCl3 valve closed
2/1/2012	10:38:09 AM	PH3 valve closed
2/1/2012	10:38:09 AM	SiCl4 pre valve closed
2/1/2012	10:38:09 AM	SiCl4 post valve closed
2/1/2012	10:38:09 AM	Bypass valve closed
2/1/2012	10:38:09 AM	Bubbler valve closed
2/1/2012	10:38:09 AM	Helium valve opened
2/1/2012	10:38:09 AM	Main Vac valve opened
2/1/2012	10:38:09 AM	Helium MFC set to  20.000000
2/1/2012	10:38:09 AM	H2 MFC set to  0.000000
2/1/2012	10:38:09 AM	BCl3 MFC set to  0.000000
2/1/2012	10:38:09 AM	PH3 MFC set to  0.000000
2/1/2012	10:38:09 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:38:09 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:38:09 AM	Tube furnace set to 150
2/1/2012	10:38:39 AM	Helium valve closed
2/1/2012	10:38:39 AM	H2 valve closed
2/1/2012	10:38:39 AM	BCl3 valve closed
2/1/2012	10:38:39 AM	PH3 valve closed
2/1/2012	10:38:39 AM	SiCl4 pre valve closed
2/1/2012	10:38:39 AM	SiCl4 post valve closed
2/1/2012	10:38:39 AM	Bypass valve closed
2/1/2012	10:38:39 AM	Bubbler valve closed
2/1/2012	10:38:39 AM	Main Vac valve opened
2/1/2012	10:38:39 AM	Helium MFC set to  0.000000
2/1/2012	10:38:39 AM	H2 MFC set to  0.000000
2/1/2012	10:38:39 AM	BCl3 MFC set to  0.000000
2/1/2012	10:38:39 AM	PH3 MFC set to  0.000000
2/1/2012	10:38:39 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:38:39 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:38:40 AM	Tube furnace set to 150
2/1/2012	10:39:10 AM	H2 valve closed
2/1/2012	10:39:10 AM	BCl3 valve closed
2/1/2012	10:39:10 AM	PH3 valve closed
2/1/2012	10:39:10 AM	SiCl4 pre valve closed
2/1/2012	10:39:10 AM	SiCl4 post valve closed
2/1/2012	10:39:10 AM	Bypass valve closed
2/1/2012	10:39:10 AM	Bubbler valve closed
2/1/2012	10:39:10 AM	Helium valve opened
2/1/2012	10:39:10 AM	Main Vac valve opened
2/1/2012	10:39:10 AM	Helium MFC set to  20.000000
2/1/2012	10:39:10 AM	H2 MFC set to  0.000000
2/1/2012	10:39:10 AM	BCl3 MFC set to  0.000000
2/1/2012	10:39:10 AM	PH3 MFC set to  0.000000
2/1/2012	10:39:10 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:39:10 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:39:10 AM	Tube furnace set to 150
2/1/2012	10:39:40 AM	Helium valve closed
2/1/2012	10:39:40 AM	H2 valve closed
2/1/2012	10:39:40 AM	BCl3 valve closed
2/1/2012	10:39:40 AM	PH3 valve closed
2/1/2012	10:39:40 AM	SiCl4 pre valve closed
2/1/2012	10:39:40 AM	SiCl4 post valve closed
2/1/2012	10:39:40 AM	Bypass valve closed
2/1/2012	10:39:40 AM	Bubbler valve closed
2/1/2012	10:39:40 AM	Main Vac valve opened
2/1/2012	10:39:40 AM	Helium MFC set to  0.000000
2/1/2012	10:39:40 AM	H2 MFC set to  0.000000
2/1/2012	10:39:40 AM	BCl3 MFC set to  0.000000
2/1/2012	10:39:40 AM	PH3 MFC set to  0.000000
2/1/2012	10:39:40 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:39:40 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:39:40 AM	Tube furnace set to 150
2/1/2012	10:40:10 AM	H2 valve closed
2/1/2012	10:40:10 AM	BCl3 valve closed
2/1/2012	10:40:10 AM	PH3 valve closed
2/1/2012	10:40:10 AM	SiCl4 pre valve closed
2/1/2012	10:40:10 AM	SiCl4 post valve closed
2/1/2012	10:40:10 AM	Bypass valve closed
2/1/2012	10:40:10 AM	Bubbler valve closed
2/1/2012	10:40:10 AM	Helium valve opened
2/1/2012	10:40:10 AM	Main Vac valve opened
2/1/2012	10:40:10 AM	Helium MFC set to  20.000000
2/1/2012	10:40:10 AM	H2 MFC set to  0.000000
2/1/2012	10:40:10 AM	BCl3 MFC set to  0.000000
2/1/2012	10:40:10 AM	PH3 MFC set to  0.000000
2/1/2012	10:40:10 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:40:10 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:40:10 AM	Tube furnace set to 150
2/1/2012	10:40:40 AM	Helium valve closed
2/1/2012	10:40:40 AM	H2 valve closed
2/1/2012	10:40:40 AM	BCl3 valve closed
2/1/2012	10:40:40 AM	PH3 valve closed
2/1/2012	10:40:40 AM	SiCl4 pre valve closed
2/1/2012	10:40:40 AM	SiCl4 post valve closed
2/1/2012	10:40:40 AM	Bypass valve closed
2/1/2012	10:40:40 AM	Bubbler valve closed
2/1/2012	10:40:40 AM	Main Vac valve opened
2/1/2012	10:40:40 AM	Helium MFC set to  0.000000
2/1/2012	10:40:40 AM	H2 MFC set to  0.000000
2/1/2012	10:40:40 AM	BCl3 MFC set to  0.000000
2/1/2012	10:40:40 AM	PH3 MFC set to  0.000000
2/1/2012	10:40:40 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:40:40 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:40:40 AM	Tube furnace set to 150
2/1/2012	10:41:10 AM	H2 valve closed
2/1/2012	10:41:10 AM	BCl3 valve closed
2/1/2012	10:41:10 AM	PH3 valve closed
2/1/2012	10:41:10 AM	SiCl4 pre valve closed
2/1/2012	10:41:10 AM	SiCl4 post valve closed
2/1/2012	10:41:10 AM	Bypass valve closed
2/1/2012	10:41:10 AM	Bubbler valve closed
2/1/2012	10:41:10 AM	Helium valve opened
2/1/2012	10:41:10 AM	Main Vac valve opened
2/1/2012	10:41:10 AM	Helium MFC set to  20.000000
2/1/2012	10:41:10 AM	H2 MFC set to  0.000000
2/1/2012	10:41:10 AM	BCl3 MFC set to  0.000000
2/1/2012	10:41:10 AM	PH3 MFC set to  0.000000
2/1/2012	10:41:10 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:41:10 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:41:11 AM	Tube furnace set to 150
2/1/2012	10:41:41 AM	Helium valve closed
2/1/2012	10:41:41 AM	H2 valve closed
2/1/2012	10:41:41 AM	BCl3 valve closed
2/1/2012	10:41:41 AM	PH3 valve closed
2/1/2012	10:41:41 AM	SiCl4 pre valve closed
2/1/2012	10:41:41 AM	SiCl4 post valve closed
2/1/2012	10:41:41 AM	Bypass valve closed
2/1/2012	10:41:41 AM	Bubbler valve closed
2/1/2012	10:41:41 AM	Main Vac valve opened
2/1/2012	10:41:41 AM	Helium MFC set to  0.000000
2/1/2012	10:41:41 AM	H2 MFC set to  0.000000
2/1/2012	10:41:41 AM	BCl3 MFC set to  0.000000
2/1/2012	10:41:41 AM	PH3 MFC set to  0.000000
2/1/2012	10:41:41 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:41:41 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:41:41 AM	Tube furnace set to 150
2/1/2012	10:42:11 AM	H2 valve closed
2/1/2012	10:42:11 AM	BCl3 valve closed
2/1/2012	10:42:11 AM	PH3 valve closed
2/1/2012	10:42:11 AM	SiCl4 pre valve closed
2/1/2012	10:42:11 AM	SiCl4 post valve closed
2/1/2012	10:42:11 AM	Bypass valve closed
2/1/2012	10:42:11 AM	Bubbler valve closed
2/1/2012	10:42:11 AM	Helium valve opened
2/1/2012	10:42:11 AM	Main Vac valve opened
2/1/2012	10:42:11 AM	Helium MFC set to  20.000000
2/1/2012	10:42:11 AM	H2 MFC set to  0.000000
2/1/2012	10:42:11 AM	BCl3 MFC set to  0.000000
2/1/2012	10:42:11 AM	PH3 MFC set to  0.000000
2/1/2012	10:42:11 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:42:11 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:42:11 AM	Tube furnace set to 150
2/1/2012	10:42:41 AM	Helium valve closed
2/1/2012	10:42:41 AM	H2 valve closed
2/1/2012	10:42:41 AM	BCl3 valve closed
2/1/2012	10:42:41 AM	PH3 valve closed
2/1/2012	10:42:41 AM	SiCl4 pre valve closed
2/1/2012	10:42:41 AM	SiCl4 post valve closed
2/1/2012	10:42:41 AM	Bypass valve closed
2/1/2012	10:42:41 AM	Bubbler valve closed
2/1/2012	10:42:41 AM	Main Vac valve opened
2/1/2012	10:42:41 AM	Helium MFC set to  0.000000
2/1/2012	10:42:41 AM	H2 MFC set to  0.000000
2/1/2012	10:42:41 AM	BCl3 MFC set to  0.000000
2/1/2012	10:42:41 AM	PH3 MFC set to  0.000000
2/1/2012	10:42:41 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:42:41 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:42:41 AM	Tube furnace set to 150
2/1/2012	10:43:11 AM	H2 valve closed
2/1/2012	10:43:11 AM	BCl3 valve closed
2/1/2012	10:43:11 AM	PH3 valve closed
2/1/2012	10:43:11 AM	SiCl4 pre valve closed
2/1/2012	10:43:11 AM	SiCl4 post valve closed
2/1/2012	10:43:11 AM	Bypass valve closed
2/1/2012	10:43:11 AM	Bubbler valve closed
2/1/2012	10:43:11 AM	Helium valve opened
2/1/2012	10:43:11 AM	Main Vac valve opened
2/1/2012	10:43:11 AM	Helium MFC set to  20.000000
2/1/2012	10:43:11 AM	H2 MFC set to  0.000000
2/1/2012	10:43:11 AM	BCl3 MFC set to  0.000000
2/1/2012	10:43:11 AM	PH3 MFC set to  0.000000
2/1/2012	10:43:11 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:43:11 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:43:11 AM	Tube furnace set to 150
2/1/2012	10:43:41 AM	Helium valve closed
2/1/2012	10:43:41 AM	H2 valve closed
2/1/2012	10:43:41 AM	BCl3 valve closed
2/1/2012	10:43:41 AM	PH3 valve closed
2/1/2012	10:43:41 AM	SiCl4 pre valve closed
2/1/2012	10:43:41 AM	SiCl4 post valve closed
2/1/2012	10:43:41 AM	Bypass valve closed
2/1/2012	10:43:41 AM	Bubbler valve closed
2/1/2012	10:43:41 AM	Main Vac valve opened
2/1/2012	10:43:41 AM	Helium MFC set to  0.000000
2/1/2012	10:43:41 AM	H2 MFC set to  0.000000
2/1/2012	10:43:41 AM	BCl3 MFC set to  0.000000
2/1/2012	10:43:41 AM	PH3 MFC set to  0.000000
2/1/2012	10:43:41 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:43:41 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:43:42 AM	Tube furnace set to 150
2/1/2012	10:44:12 AM	H2 valve closed
2/1/2012	10:44:12 AM	BCl3 valve closed
2/1/2012	10:44:12 AM	PH3 valve closed
2/1/2012	10:44:12 AM	SiCl4 pre valve closed
2/1/2012	10:44:12 AM	SiCl4 post valve closed
2/1/2012	10:44:12 AM	Bypass valve closed
2/1/2012	10:44:12 AM	Bubbler valve closed
2/1/2012	10:44:12 AM	Helium valve opened
2/1/2012	10:44:12 AM	Main Vac valve opened
2/1/2012	10:44:12 AM	Helium MFC set to  20.000000
2/1/2012	10:44:12 AM	H2 MFC set to  0.000000
2/1/2012	10:44:12 AM	BCl3 MFC set to  0.000000
2/1/2012	10:44:12 AM	PH3 MFC set to  0.000000
2/1/2012	10:44:12 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:44:12 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:44:12 AM	Tube furnace set to 150
2/1/2012	10:44:42 AM	Helium valve closed
2/1/2012	10:44:42 AM	H2 valve closed
2/1/2012	10:44:42 AM	BCl3 valve closed
2/1/2012	10:44:42 AM	PH3 valve closed
2/1/2012	10:44:42 AM	SiCl4 pre valve closed
2/1/2012	10:44:42 AM	SiCl4 post valve closed
2/1/2012	10:44:42 AM	Bypass valve closed
2/1/2012	10:44:42 AM	Bubbler valve closed
2/1/2012	10:44:42 AM	Main Vac valve opened
2/1/2012	10:44:42 AM	Helium MFC set to  0.000000
2/1/2012	10:44:42 AM	H2 MFC set to  0.000000
2/1/2012	10:44:42 AM	BCl3 MFC set to  0.000000
2/1/2012	10:44:42 AM	PH3 MFC set to  0.000000
2/1/2012	10:44:42 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:44:42 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:44:42 AM	Tube furnace set to 150
2/1/2012	10:45:12 AM	H2 valve closed
2/1/2012	10:45:12 AM	BCl3 valve closed
2/1/2012	10:45:12 AM	PH3 valve closed
2/1/2012	10:45:12 AM	SiCl4 pre valve closed
2/1/2012	10:45:12 AM	SiCl4 post valve closed
2/1/2012	10:45:12 AM	Bypass valve closed
2/1/2012	10:45:12 AM	Bubbler valve closed
2/1/2012	10:45:12 AM	Helium valve opened
2/1/2012	10:45:12 AM	Main Vac valve opened
2/1/2012	10:45:12 AM	Helium MFC set to  20.000000
2/1/2012	10:45:12 AM	H2 MFC set to  0.000000
2/1/2012	10:45:12 AM	BCl3 MFC set to  0.000000
2/1/2012	10:45:12 AM	PH3 MFC set to  0.000000
2/1/2012	10:45:12 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:45:12 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:45:12 AM	Tube furnace set to 150
2/1/2012	10:45:42 AM	Helium valve closed
2/1/2012	10:45:42 AM	H2 valve closed
2/1/2012	10:45:42 AM	BCl3 valve closed
2/1/2012	10:45:42 AM	PH3 valve closed
2/1/2012	10:45:42 AM	SiCl4 pre valve closed
2/1/2012	10:45:42 AM	SiCl4 post valve closed
2/1/2012	10:45:42 AM	Bypass valve closed
2/1/2012	10:45:42 AM	Bubbler valve closed
2/1/2012	10:45:42 AM	Main Vac valve opened
2/1/2012	10:45:42 AM	Helium MFC set to  0.000000
2/1/2012	10:45:42 AM	H2 MFC set to  0.000000
2/1/2012	10:45:42 AM	BCl3 MFC set to  0.000000
2/1/2012	10:45:42 AM	PH3 MFC set to  0.000000
2/1/2012	10:45:42 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:45:42 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:45:42 AM	Tube furnace set to 150
2/1/2012	10:46:12 AM	H2 valve closed
2/1/2012	10:46:12 AM	BCl3 valve closed
2/1/2012	10:46:12 AM	PH3 valve closed
2/1/2012	10:46:12 AM	SiCl4 pre valve closed
2/1/2012	10:46:12 AM	SiCl4 post valve closed
2/1/2012	10:46:12 AM	Bypass valve closed
2/1/2012	10:46:12 AM	Bubbler valve closed
2/1/2012	10:46:12 AM	Helium valve opened
2/1/2012	10:46:12 AM	Main Vac valve opened
2/1/2012	10:46:12 AM	Helium MFC set to  20.000000
2/1/2012	10:46:12 AM	H2 MFC set to  0.000000
2/1/2012	10:46:12 AM	BCl3 MFC set to  0.000000
2/1/2012	10:46:12 AM	PH3 MFC set to  0.000000
2/1/2012	10:46:12 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:46:12 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:46:13 AM	Tube furnace set to 150
2/1/2012	10:46:43 AM	Helium valve closed
2/1/2012	10:46:43 AM	H2 valve closed
2/1/2012	10:46:43 AM	BCl3 valve closed
2/1/2012	10:46:43 AM	PH3 valve closed
2/1/2012	10:46:43 AM	SiCl4 pre valve closed
2/1/2012	10:46:43 AM	SiCl4 post valve closed
2/1/2012	10:46:43 AM	Bypass valve closed
2/1/2012	10:46:43 AM	Bubbler valve closed
2/1/2012	10:46:43 AM	Main Vac valve opened
2/1/2012	10:46:43 AM	Helium MFC set to  0.000000
2/1/2012	10:46:43 AM	H2 MFC set to  0.000000
2/1/2012	10:46:43 AM	BCl3 MFC set to  0.000000
2/1/2012	10:46:43 AM	PH3 MFC set to  0.000000
2/1/2012	10:46:43 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:46:43 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:46:43 AM	Tube furnace set to 150
2/1/2012	10:47:13 AM	H2 valve closed
2/1/2012	10:47:13 AM	BCl3 valve closed
2/1/2012	10:47:13 AM	PH3 valve closed
2/1/2012	10:47:13 AM	SiCl4 pre valve closed
2/1/2012	10:47:13 AM	SiCl4 post valve closed
2/1/2012	10:47:13 AM	Bypass valve closed
2/1/2012	10:47:13 AM	Bubbler valve closed
2/1/2012	10:47:13 AM	Helium valve opened
2/1/2012	10:47:13 AM	Main Vac valve opened
2/1/2012	10:47:13 AM	Helium MFC set to  20.000000
2/1/2012	10:47:13 AM	H2 MFC set to  0.000000
2/1/2012	10:47:13 AM	BCl3 MFC set to  0.000000
2/1/2012	10:47:13 AM	PH3 MFC set to  0.000000
2/1/2012	10:47:13 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:47:13 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:47:13 AM	Tube furnace set to 150
2/1/2012	10:47:43 AM	Helium valve closed
2/1/2012	10:47:43 AM	H2 valve closed
2/1/2012	10:47:43 AM	BCl3 valve closed
2/1/2012	10:47:43 AM	PH3 valve closed
2/1/2012	10:47:43 AM	SiCl4 pre valve closed
2/1/2012	10:47:43 AM	SiCl4 post valve closed
2/1/2012	10:47:43 AM	Bypass valve closed
2/1/2012	10:47:43 AM	Bubbler valve closed
2/1/2012	10:47:43 AM	Main Vac valve opened
2/1/2012	10:47:43 AM	Helium MFC set to  0.000000
2/1/2012	10:47:43 AM	H2 MFC set to  0.000000
2/1/2012	10:47:43 AM	BCl3 MFC set to  0.000000
2/1/2012	10:47:43 AM	PH3 MFC set to  0.000000
2/1/2012	10:47:43 AM	SiCl4 MFC set to  0.000000
2/1/2012	10:47:43 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	10:47:43 AM	Tube furnace set to 150
2/1/2012	10:47:44 AM	Run finished at 10:47 AM
2/1/2012	10:50:00 AM	Main Vac valve closed
2/1/2012	10:50:05 AM	Main Vac valve opened
2/1/2012	11:18:17 AM	Main Vac valve closed
2/1/2012	11:18:24 AM	Main Vac valve opened
2/1/2012	11:21:54 AM	Recipe started at 11:21 AM
2/1/2012	11:21:54 AM	Helium valve closed
2/1/2012	11:21:54 AM	H2 valve closed
2/1/2012	11:21:54 AM	BCl3 valve closed
2/1/2012	11:21:54 AM	PH3 valve closed
2/1/2012	11:21:54 AM	SiCl4 pre valve closed
2/1/2012	11:21:54 AM	SiCl4 post valve closed
2/1/2012	11:21:54 AM	Main Vac valve closed
2/1/2012	11:21:54 AM	Bypass valve closed
2/1/2012	11:21:54 AM	Bubbler valve closed
2/1/2012	11:21:54 AM	Helium MFC set to  0.000000
2/1/2012	11:21:54 AM	H2 MFC set to  0.000000
2/1/2012	11:21:54 AM	BCl3 MFC set to  0.000000
2/1/2012	11:21:54 AM	PH3 MFC set to  0.000000
2/1/2012	11:21:54 AM	SiCl4 MFC set to  0.000000
2/1/2012	11:21:54 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	11:21:55 AM	Tube furnace set to 0
2/1/2012	11:21:58 AM	Helium valve closed
2/1/2012	11:21:58 AM	BCl3 valve closed
2/1/2012	11:21:58 AM	PH3 valve closed
2/1/2012	11:21:58 AM	SiCl4 pre valve closed
2/1/2012	11:21:58 AM	SiCl4 post valve closed
2/1/2012	11:21:58 AM	Main Vac valve closed
2/1/2012	11:21:58 AM	Bypass valve closed
2/1/2012	11:21:58 AM	Bubbler valve closed
2/1/2012	11:21:58 AM	H2 valve opened
2/1/2012	11:21:58 AM	Helium MFC set to  0.000000
2/1/2012	11:21:58 AM	H2 MFC set to  500.000000
2/1/2012	11:21:58 AM	BCl3 MFC set to  0.000000
2/1/2012	11:21:58 AM	PH3 MFC set to  0.000000
2/1/2012	11:21:58 AM	SiCl4 MFC set to  0.000000
2/1/2012	11:21:58 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	11:21:58 AM	Tube furnace set to 0
2/1/2012	11:23:02 AM	Helium valve closed
2/1/2012	11:23:02 AM	BCl3 valve closed
2/1/2012	11:23:02 AM	PH3 valve closed
2/1/2012	11:23:02 AM	SiCl4 pre valve closed
2/1/2012	11:23:02 AM	SiCl4 post valve closed
2/1/2012	11:23:02 AM	Main Vac valve closed
2/1/2012	11:23:02 AM	Bypass valve closed
2/1/2012	11:23:02 AM	H2 valve opened
2/1/2012	11:23:02 AM	Bubbler valve opened
2/1/2012	11:23:02 AM	Helium MFC set to  0.000000
2/1/2012	11:23:02 AM	H2 MFC set to  500.000000
2/1/2012	11:23:02 AM	BCl3 MFC set to  0.000000
2/1/2012	11:23:02 AM	PH3 MFC set to  0.000000
2/1/2012	11:23:02 AM	SiCl4 MFC set to  0.000000
2/1/2012	11:23:02 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	11:23:02 AM	Tube furnace set to 0
2/1/2012	11:23:03 AM	Helium valve closed
2/1/2012	11:23:03 AM	BCl3 valve closed
2/1/2012	11:23:03 AM	PH3 valve closed
2/1/2012	11:23:03 AM	SiCl4 pre valve closed
2/1/2012	11:23:03 AM	SiCl4 post valve closed
2/1/2012	11:23:03 AM	Main Vac valve closed
2/1/2012	11:23:03 AM	Bypass valve closed
2/1/2012	11:23:03 AM	H2 valve opened
2/1/2012	11:23:03 AM	Bubbler valve opened
2/1/2012	11:23:03 AM	Helium MFC set to  0.000000
2/1/2012	11:23:03 AM	H2 MFC set to  500.000000
2/1/2012	11:23:04 AM	BCl3 MFC set to  0.000000
2/1/2012	11:23:04 AM	PH3 MFC set to  0.000000
2/1/2012	11:23:04 AM	SiCl4 MFC set to  0.000000
2/1/2012	11:23:04 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	11:23:04 AM	Tube furnace set to 1000
2/1/2012	11:45:04 AM	Helium valve closed
2/1/2012	11:45:04 AM	PH3 valve closed
2/1/2012	11:45:04 AM	Main Vac valve closed
2/1/2012	11:45:04 AM	Bypass valve closed
2/1/2012	11:45:04 AM	H2 valve opened
2/1/2012	11:45:04 AM	BCl3 valve opened
2/1/2012	11:45:04 AM	SiCl4 pre valve opened
2/1/2012	11:45:04 AM	SiCl4 post valve opened
2/1/2012	11:45:04 AM	Bubbler valve opened
2/1/2012	11:45:04 AM	Helium MFC set to  0.000000
2/1/2012	11:45:04 AM	H2 MFC set to  500.000000
2/1/2012	11:45:04 AM	BCl3 MFC set to  3.000000
2/1/2012	11:45:04 AM	PH3 MFC set to  0.000000
2/1/2012	11:45:04 AM	SiCl4 MFC set to  25.000000
2/1/2012	11:45:04 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	11:45:04 AM	Tube furnace set to 1000
2/1/2012	11:55:04 AM	Helium valve closed
2/1/2012	11:55:04 AM	BCl3 valve closed
2/1/2012	11:55:04 AM	PH3 valve closed
2/1/2012	11:55:04 AM	SiCl4 pre valve closed
2/1/2012	11:55:04 AM	SiCl4 post valve closed
2/1/2012	11:55:04 AM	Main Vac valve closed
2/1/2012	11:55:04 AM	Bypass valve closed
2/1/2012	11:55:04 AM	H2 valve opened
2/1/2012	11:55:04 AM	Bubbler valve opened
2/1/2012	11:55:04 AM	Helium MFC set to  0.000000
2/1/2012	11:55:04 AM	H2 MFC set to  500.000000
2/1/2012	11:55:04 AM	BCl3 MFC set to  0.000000
2/1/2012	11:55:04 AM	PH3 MFC set to  0.000000
2/1/2012	11:55:04 AM	SiCl4 MFC set to  0.000000
2/1/2012	11:55:04 AM	Bypass solenoid MFC set to  0.000000
2/1/2012	11:55:04 AM	Tube furnace set to 750
2/1/2012	12:00:04 PM	H2 valve closed
2/1/2012	12:00:04 PM	BCl3 valve closed
2/1/2012	12:00:04 PM	PH3 valve closed
2/1/2012	12:00:04 PM	SiCl4 pre valve closed
2/1/2012	12:00:04 PM	SiCl4 post valve closed
2/1/2012	12:00:04 PM	Main Vac valve closed
2/1/2012	12:00:04 PM	Bypass valve closed
2/1/2012	12:00:04 PM	Helium valve opened
2/1/2012	12:00:04 PM	Bubbler valve opened
2/1/2012	12:00:04 PM	Helium MFC set to  500.000000
2/1/2012	12:00:04 PM	H2 MFC set to  0.000000
2/1/2012	12:00:04 PM	BCl3 MFC set to  0.000000
2/1/2012	12:00:04 PM	PH3 MFC set to  0.000000
2/1/2012	12:00:04 PM	SiCl4 MFC set to  0.000000
2/1/2012	12:00:04 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	12:00:04 PM	Tube furnace set to 0
2/1/2012	12:20:04 PM	Helium valve closed
2/1/2012	12:20:04 PM	H2 valve closed
2/1/2012	12:20:04 PM	BCl3 valve closed
2/1/2012	12:20:04 PM	PH3 valve closed
2/1/2012	12:20:04 PM	SiCl4 pre valve closed
2/1/2012	12:20:04 PM	SiCl4 post valve closed
2/1/2012	12:20:04 PM	Main Vac valve closed
2/1/2012	12:20:04 PM	Bypass valve closed
2/1/2012	12:20:04 PM	Bubbler valve closed
2/1/2012	12:20:04 PM	Helium MFC set to  0.000000
2/1/2012	12:20:04 PM	H2 MFC set to  0.000000
2/1/2012	12:20:04 PM	BCl3 MFC set to  0.000000
2/1/2012	12:20:04 PM	PH3 MFC set to  0.000000
2/1/2012	12:20:04 PM	SiCl4 MFC set to  0.000000
2/1/2012	12:20:04 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	12:20:04 PM	Tube furnace set to 0
2/1/2012	12:20:05 PM	Run finished at 12:20 PM
2/1/2012	1:18:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	1:18:07 PM	Recipe started at 1:18 PM
2/1/2012	1:18:07 PM	Helium valve closed
2/1/2012	1:18:07 PM	H2 valve closed
2/1/2012	1:18:07 PM	BCl3 valve closed
2/1/2012	1:18:07 PM	PH3 valve closed
2/1/2012	1:18:07 PM	SiCl4 pre valve closed
2/1/2012	1:18:07 PM	SiCl4 post valve closed
2/1/2012	1:18:07 PM	Main Vac valve closed
2/1/2012	1:18:07 PM	Bubbler valve closed
2/1/2012	1:18:07 PM	Bypass valve opened
2/1/2012	1:18:07 PM	Helium MFC set to  0.000000
2/1/2012	1:18:07 PM	H2 MFC set to  0.000000
2/1/2012	1:18:07 PM	BCl3 MFC set to  0.000000
2/1/2012	1:18:07 PM	PH3 MFC set to  0.000000
2/1/2012	1:18:07 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:18:07 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:18:08 PM	Tube furnace set to 0
2/1/2012	1:19:04 PM	Helium valve closed
2/1/2012	1:19:04 PM	H2 valve closed
2/1/2012	1:19:04 PM	BCl3 valve closed
2/1/2012	1:19:04 PM	PH3 valve closed
2/1/2012	1:19:04 PM	SiCl4 pre valve closed
2/1/2012	1:19:04 PM	SiCl4 post valve closed
2/1/2012	1:19:04 PM	Main Vac valve closed
2/1/2012	1:19:04 PM	Bubbler valve closed
2/1/2012	1:19:04 PM	Bypass valve opened
2/1/2012	1:19:04 PM	Helium MFC set to  0.000000
2/1/2012	1:19:04 PM	H2 MFC set to  0.000000
2/1/2012	1:19:04 PM	BCl3 MFC set to  0.000000
2/1/2012	1:19:04 PM	PH3 MFC set to  0.000000
2/1/2012	1:19:04 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:19:04 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:19:04 PM	Tube furnace set to 0
2/1/2012	1:20:04 PM	Helium valve closed
2/1/2012	1:20:04 PM	H2 valve closed
2/1/2012	1:20:04 PM	BCl3 valve closed
2/1/2012	1:20:04 PM	PH3 valve closed
2/1/2012	1:20:04 PM	SiCl4 pre valve closed
2/1/2012	1:20:04 PM	SiCl4 post valve closed
2/1/2012	1:20:04 PM	Bypass valve closed
2/1/2012	1:20:04 PM	Bubbler valve closed
2/1/2012	1:20:04 PM	Main Vac valve opened
2/1/2012	1:20:04 PM	Helium MFC set to  0.000000
2/1/2012	1:20:04 PM	H2 MFC set to  0.000000
2/1/2012	1:20:04 PM	BCl3 MFC set to  0.000000
2/1/2012	1:20:04 PM	PH3 MFC set to  0.000000
2/1/2012	1:20:04 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:20:04 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:20:04 PM	Tube furnace set to 0
2/1/2012	1:20:05 PM	Run finished at 1:20 PM
2/1/2012	1:20:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	1:23:11 PM	Recipe started at 1:23 PM
2/1/2012	1:23:11 PM	Helium valve closed
2/1/2012	1:23:11 PM	H2 valve closed
2/1/2012	1:23:11 PM	BCl3 valve closed
2/1/2012	1:23:11 PM	PH3 valve closed
2/1/2012	1:23:11 PM	SiCl4 pre valve closed
2/1/2012	1:23:11 PM	SiCl4 post valve closed
2/1/2012	1:23:11 PM	Bypass valve closed
2/1/2012	1:23:11 PM	Bubbler valve closed
2/1/2012	1:23:11 PM	Main Vac valve opened
2/1/2012	1:23:11 PM	Helium MFC set to  0.000000
2/1/2012	1:23:11 PM	H2 MFC set to  0.000000
2/1/2012	1:23:11 PM	BCl3 MFC set to  0.000000
2/1/2012	1:23:11 PM	PH3 MFC set to  0.000000
2/1/2012	1:23:11 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:23:11 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:23:11 PM	Tube furnace set to 150
2/1/2012	1:23:41 PM	H2 valve closed
2/1/2012	1:23:41 PM	BCl3 valve closed
2/1/2012	1:23:41 PM	PH3 valve closed
2/1/2012	1:23:41 PM	SiCl4 pre valve closed
2/1/2012	1:23:41 PM	SiCl4 post valve closed
2/1/2012	1:23:41 PM	Bypass valve closed
2/1/2012	1:23:41 PM	Bubbler valve closed
2/1/2012	1:23:41 PM	Helium valve opened
2/1/2012	1:23:41 PM	Main Vac valve opened
2/1/2012	1:23:41 PM	Helium MFC set to  20.000000
2/1/2012	1:23:41 PM	H2 MFC set to  0.000000
2/1/2012	1:23:41 PM	BCl3 MFC set to  0.000000
2/1/2012	1:23:41 PM	PH3 MFC set to  0.000000
2/1/2012	1:23:41 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:23:41 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:23:42 PM	Tube furnace set to 150
2/1/2012	1:24:12 PM	Helium valve closed
2/1/2012	1:24:12 PM	H2 valve closed
2/1/2012	1:24:12 PM	BCl3 valve closed
2/1/2012	1:24:12 PM	PH3 valve closed
2/1/2012	1:24:12 PM	SiCl4 pre valve closed
2/1/2012	1:24:12 PM	SiCl4 post valve closed
2/1/2012	1:24:12 PM	Bypass valve closed
2/1/2012	1:24:12 PM	Bubbler valve closed
2/1/2012	1:24:12 PM	Main Vac valve opened
2/1/2012	1:24:12 PM	Helium MFC set to  0.000000
2/1/2012	1:24:12 PM	H2 MFC set to  0.000000
2/1/2012	1:24:12 PM	BCl3 MFC set to  0.000000
2/1/2012	1:24:12 PM	PH3 MFC set to  0.000000
2/1/2012	1:24:12 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:24:12 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:24:12 PM	Tube furnace set to 150
2/1/2012	1:24:42 PM	H2 valve closed
2/1/2012	1:24:42 PM	BCl3 valve closed
2/1/2012	1:24:42 PM	PH3 valve closed
2/1/2012	1:24:42 PM	SiCl4 pre valve closed
2/1/2012	1:24:42 PM	SiCl4 post valve closed
2/1/2012	1:24:42 PM	Bypass valve closed
2/1/2012	1:24:42 PM	Bubbler valve closed
2/1/2012	1:24:42 PM	Helium valve opened
2/1/2012	1:24:42 PM	Main Vac valve opened
2/1/2012	1:24:42 PM	Helium MFC set to  20.000000
2/1/2012	1:24:42 PM	H2 MFC set to  0.000000
2/1/2012	1:24:42 PM	BCl3 MFC set to  0.000000
2/1/2012	1:24:42 PM	PH3 MFC set to  0.000000
2/1/2012	1:24:42 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:24:42 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:24:42 PM	Tube furnace set to 150
2/1/2012	1:25:12 PM	Helium valve closed
2/1/2012	1:25:12 PM	H2 valve closed
2/1/2012	1:25:12 PM	BCl3 valve closed
2/1/2012	1:25:12 PM	PH3 valve closed
2/1/2012	1:25:12 PM	SiCl4 pre valve closed
2/1/2012	1:25:12 PM	SiCl4 post valve closed
2/1/2012	1:25:12 PM	Bypass valve closed
2/1/2012	1:25:12 PM	Bubbler valve closed
2/1/2012	1:25:12 PM	Main Vac valve opened
2/1/2012	1:25:12 PM	Helium MFC set to  0.000000
2/1/2012	1:25:12 PM	H2 MFC set to  0.000000
2/1/2012	1:25:12 PM	BCl3 MFC set to  0.000000
2/1/2012	1:25:12 PM	PH3 MFC set to  0.000000
2/1/2012	1:25:12 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:25:12 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:25:12 PM	Tube furnace set to 150
2/1/2012	1:25:42 PM	H2 valve closed
2/1/2012	1:25:42 PM	BCl3 valve closed
2/1/2012	1:25:42 PM	PH3 valve closed
2/1/2012	1:25:42 PM	SiCl4 pre valve closed
2/1/2012	1:25:42 PM	SiCl4 post valve closed
2/1/2012	1:25:42 PM	Bypass valve closed
2/1/2012	1:25:42 PM	Bubbler valve closed
2/1/2012	1:25:42 PM	Helium valve opened
2/1/2012	1:25:42 PM	Main Vac valve opened
2/1/2012	1:25:42 PM	Helium MFC set to  20.000000
2/1/2012	1:25:42 PM	H2 MFC set to  0.000000
2/1/2012	1:25:42 PM	BCl3 MFC set to  0.000000
2/1/2012	1:25:42 PM	PH3 MFC set to  0.000000
2/1/2012	1:25:42 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:25:42 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:25:42 PM	Tube furnace set to 150
2/1/2012	1:26:12 PM	Helium valve closed
2/1/2012	1:26:12 PM	H2 valve closed
2/1/2012	1:26:12 PM	BCl3 valve closed
2/1/2012	1:26:12 PM	PH3 valve closed
2/1/2012	1:26:12 PM	SiCl4 pre valve closed
2/1/2012	1:26:12 PM	SiCl4 post valve closed
2/1/2012	1:26:12 PM	Bypass valve closed
2/1/2012	1:26:12 PM	Bubbler valve closed
2/1/2012	1:26:12 PM	Main Vac valve opened
2/1/2012	1:26:12 PM	Helium MFC set to  0.000000
2/1/2012	1:26:12 PM	H2 MFC set to  0.000000
2/1/2012	1:26:12 PM	BCl3 MFC set to  0.000000
2/1/2012	1:26:12 PM	PH3 MFC set to  0.000000
2/1/2012	1:26:12 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:26:12 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:26:13 PM	Tube furnace set to 150
2/1/2012	1:26:43 PM	H2 valve closed
2/1/2012	1:26:43 PM	BCl3 valve closed
2/1/2012	1:26:43 PM	PH3 valve closed
2/1/2012	1:26:43 PM	SiCl4 pre valve closed
2/1/2012	1:26:43 PM	SiCl4 post valve closed
2/1/2012	1:26:43 PM	Bypass valve closed
2/1/2012	1:26:43 PM	Bubbler valve closed
2/1/2012	1:26:43 PM	Helium valve opened
2/1/2012	1:26:43 PM	Main Vac valve opened
2/1/2012	1:26:43 PM	Helium MFC set to  20.000000
2/1/2012	1:26:43 PM	H2 MFC set to  0.000000
2/1/2012	1:26:43 PM	BCl3 MFC set to  0.000000
2/1/2012	1:26:43 PM	PH3 MFC set to  0.000000
2/1/2012	1:26:43 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:26:43 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:26:43 PM	Tube furnace set to 150
2/1/2012	1:27:13 PM	Helium valve closed
2/1/2012	1:27:13 PM	H2 valve closed
2/1/2012	1:27:13 PM	BCl3 valve closed
2/1/2012	1:27:13 PM	PH3 valve closed
2/1/2012	1:27:13 PM	SiCl4 pre valve closed
2/1/2012	1:27:13 PM	SiCl4 post valve closed
2/1/2012	1:27:13 PM	Bypass valve closed
2/1/2012	1:27:13 PM	Bubbler valve closed
2/1/2012	1:27:13 PM	Main Vac valve opened
2/1/2012	1:27:13 PM	Helium MFC set to  0.000000
2/1/2012	1:27:13 PM	H2 MFC set to  0.000000
2/1/2012	1:27:13 PM	BCl3 MFC set to  0.000000
2/1/2012	1:27:13 PM	PH3 MFC set to  0.000000
2/1/2012	1:27:13 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:27:13 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:27:13 PM	Tube furnace set to 150
2/1/2012	1:27:43 PM	H2 valve closed
2/1/2012	1:27:43 PM	BCl3 valve closed
2/1/2012	1:27:43 PM	PH3 valve closed
2/1/2012	1:27:43 PM	SiCl4 pre valve closed
2/1/2012	1:27:43 PM	SiCl4 post valve closed
2/1/2012	1:27:43 PM	Bypass valve closed
2/1/2012	1:27:43 PM	Bubbler valve closed
2/1/2012	1:27:43 PM	Helium valve opened
2/1/2012	1:27:43 PM	Main Vac valve opened
2/1/2012	1:27:43 PM	Helium MFC set to  20.000000
2/1/2012	1:27:43 PM	H2 MFC set to  0.000000
2/1/2012	1:27:43 PM	BCl3 MFC set to  0.000000
2/1/2012	1:27:43 PM	PH3 MFC set to  0.000000
2/1/2012	1:27:43 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:27:43 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:27:43 PM	Tube furnace set to 150
2/1/2012	1:28:13 PM	Helium valve closed
2/1/2012	1:28:13 PM	H2 valve closed
2/1/2012	1:28:13 PM	BCl3 valve closed
2/1/2012	1:28:13 PM	PH3 valve closed
2/1/2012	1:28:13 PM	SiCl4 pre valve closed
2/1/2012	1:28:13 PM	SiCl4 post valve closed
2/1/2012	1:28:13 PM	Bypass valve closed
2/1/2012	1:28:13 PM	Bubbler valve closed
2/1/2012	1:28:13 PM	Main Vac valve opened
2/1/2012	1:28:13 PM	Helium MFC set to  0.000000
2/1/2012	1:28:13 PM	H2 MFC set to  0.000000
2/1/2012	1:28:13 PM	BCl3 MFC set to  0.000000
2/1/2012	1:28:13 PM	PH3 MFC set to  0.000000
2/1/2012	1:28:13 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:28:13 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:28:13 PM	Tube furnace set to 150
2/1/2012	1:28:43 PM	H2 valve closed
2/1/2012	1:28:43 PM	BCl3 valve closed
2/1/2012	1:28:43 PM	PH3 valve closed
2/1/2012	1:28:43 PM	SiCl4 pre valve closed
2/1/2012	1:28:43 PM	SiCl4 post valve closed
2/1/2012	1:28:43 PM	Bypass valve closed
2/1/2012	1:28:43 PM	Bubbler valve closed
2/1/2012	1:28:43 PM	Helium valve opened
2/1/2012	1:28:43 PM	Main Vac valve opened
2/1/2012	1:28:43 PM	Helium MFC set to  20.000000
2/1/2012	1:28:43 PM	H2 MFC set to  0.000000
2/1/2012	1:28:43 PM	BCl3 MFC set to  0.000000
2/1/2012	1:28:43 PM	PH3 MFC set to  0.000000
2/1/2012	1:28:43 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:28:43 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:28:44 PM	Tube furnace set to 150
2/1/2012	1:29:14 PM	Helium valve closed
2/1/2012	1:29:14 PM	H2 valve closed
2/1/2012	1:29:14 PM	BCl3 valve closed
2/1/2012	1:29:14 PM	PH3 valve closed
2/1/2012	1:29:14 PM	SiCl4 pre valve closed
2/1/2012	1:29:14 PM	SiCl4 post valve closed
2/1/2012	1:29:14 PM	Bypass valve closed
2/1/2012	1:29:14 PM	Bubbler valve closed
2/1/2012	1:29:14 PM	Main Vac valve opened
2/1/2012	1:29:14 PM	Helium MFC set to  0.000000
2/1/2012	1:29:14 PM	H2 MFC set to  0.000000
2/1/2012	1:29:14 PM	BCl3 MFC set to  0.000000
2/1/2012	1:29:14 PM	PH3 MFC set to  0.000000
2/1/2012	1:29:14 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:29:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:29:14 PM	Tube furnace set to 150
2/1/2012	1:29:44 PM	H2 valve closed
2/1/2012	1:29:44 PM	BCl3 valve closed
2/1/2012	1:29:44 PM	PH3 valve closed
2/1/2012	1:29:44 PM	SiCl4 pre valve closed
2/1/2012	1:29:44 PM	SiCl4 post valve closed
2/1/2012	1:29:44 PM	Bypass valve closed
2/1/2012	1:29:44 PM	Bubbler valve closed
2/1/2012	1:29:44 PM	Helium valve opened
2/1/2012	1:29:44 PM	Main Vac valve opened
2/1/2012	1:29:44 PM	Helium MFC set to  20.000000
2/1/2012	1:29:44 PM	H2 MFC set to  0.000000
2/1/2012	1:29:44 PM	BCl3 MFC set to  0.000000
2/1/2012	1:29:44 PM	PH3 MFC set to  0.000000
2/1/2012	1:29:44 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:29:44 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:29:44 PM	Tube furnace set to 150
2/1/2012	1:30:14 PM	Helium valve closed
2/1/2012	1:30:14 PM	H2 valve closed
2/1/2012	1:30:14 PM	BCl3 valve closed
2/1/2012	1:30:14 PM	PH3 valve closed
2/1/2012	1:30:14 PM	SiCl4 pre valve closed
2/1/2012	1:30:14 PM	SiCl4 post valve closed
2/1/2012	1:30:14 PM	Bypass valve closed
2/1/2012	1:30:14 PM	Bubbler valve closed
2/1/2012	1:30:14 PM	Main Vac valve opened
2/1/2012	1:30:14 PM	Helium MFC set to  0.000000
2/1/2012	1:30:14 PM	H2 MFC set to  0.000000
2/1/2012	1:30:14 PM	BCl3 MFC set to  0.000000
2/1/2012	1:30:14 PM	PH3 MFC set to  0.000000
2/1/2012	1:30:14 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:30:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:30:14 PM	Tube furnace set to 150
2/1/2012	1:30:44 PM	H2 valve closed
2/1/2012	1:30:44 PM	BCl3 valve closed
2/1/2012	1:30:44 PM	PH3 valve closed
2/1/2012	1:30:44 PM	SiCl4 pre valve closed
2/1/2012	1:30:44 PM	SiCl4 post valve closed
2/1/2012	1:30:44 PM	Bypass valve closed
2/1/2012	1:30:44 PM	Bubbler valve closed
2/1/2012	1:30:44 PM	Helium valve opened
2/1/2012	1:30:44 PM	Main Vac valve opened
2/1/2012	1:30:44 PM	Helium MFC set to  20.000000
2/1/2012	1:30:44 PM	H2 MFC set to  0.000000
2/1/2012	1:30:44 PM	BCl3 MFC set to  0.000000
2/1/2012	1:30:44 PM	PH3 MFC set to  0.000000
2/1/2012	1:30:44 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:30:44 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:30:44 PM	Tube furnace set to 150
2/1/2012	1:31:14 PM	Helium valve closed
2/1/2012	1:31:14 PM	H2 valve closed
2/1/2012	1:31:14 PM	BCl3 valve closed
2/1/2012	1:31:14 PM	PH3 valve closed
2/1/2012	1:31:14 PM	SiCl4 pre valve closed
2/1/2012	1:31:14 PM	SiCl4 post valve closed
2/1/2012	1:31:14 PM	Bypass valve closed
2/1/2012	1:31:14 PM	Bubbler valve closed
2/1/2012	1:31:14 PM	Main Vac valve opened
2/1/2012	1:31:14 PM	Helium MFC set to  0.000000
2/1/2012	1:31:14 PM	H2 MFC set to  0.000000
2/1/2012	1:31:14 PM	BCl3 MFC set to  0.000000
2/1/2012	1:31:14 PM	PH3 MFC set to  0.000000
2/1/2012	1:31:14 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:31:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:31:15 PM	Tube furnace set to 150
2/1/2012	1:31:45 PM	H2 valve closed
2/1/2012	1:31:45 PM	BCl3 valve closed
2/1/2012	1:31:45 PM	PH3 valve closed
2/1/2012	1:31:45 PM	SiCl4 pre valve closed
2/1/2012	1:31:45 PM	SiCl4 post valve closed
2/1/2012	1:31:45 PM	Bypass valve closed
2/1/2012	1:31:45 PM	Bubbler valve closed
2/1/2012	1:31:45 PM	Helium valve opened
2/1/2012	1:31:45 PM	Main Vac valve opened
2/1/2012	1:31:45 PM	Helium MFC set to  20.000000
2/1/2012	1:31:45 PM	H2 MFC set to  0.000000
2/1/2012	1:31:45 PM	BCl3 MFC set to  0.000000
2/1/2012	1:31:45 PM	PH3 MFC set to  0.000000
2/1/2012	1:31:45 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:31:45 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:31:45 PM	Tube furnace set to 150
2/1/2012	1:32:15 PM	Helium valve closed
2/1/2012	1:32:15 PM	H2 valve closed
2/1/2012	1:32:15 PM	BCl3 valve closed
2/1/2012	1:32:15 PM	PH3 valve closed
2/1/2012	1:32:15 PM	SiCl4 pre valve closed
2/1/2012	1:32:15 PM	SiCl4 post valve closed
2/1/2012	1:32:15 PM	Bypass valve closed
2/1/2012	1:32:15 PM	Bubbler valve closed
2/1/2012	1:32:15 PM	Main Vac valve opened
2/1/2012	1:32:15 PM	Helium MFC set to  0.000000
2/1/2012	1:32:15 PM	H2 MFC set to  0.000000
2/1/2012	1:32:15 PM	BCl3 MFC set to  0.000000
2/1/2012	1:32:15 PM	PH3 MFC set to  0.000000
2/1/2012	1:32:15 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:32:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:32:15 PM	Tube furnace set to 150
2/1/2012	1:32:45 PM	H2 valve closed
2/1/2012	1:32:45 PM	BCl3 valve closed
2/1/2012	1:32:45 PM	PH3 valve closed
2/1/2012	1:32:45 PM	SiCl4 pre valve closed
2/1/2012	1:32:45 PM	SiCl4 post valve closed
2/1/2012	1:32:45 PM	Bypass valve closed
2/1/2012	1:32:45 PM	Bubbler valve closed
2/1/2012	1:32:45 PM	Helium valve opened
2/1/2012	1:32:45 PM	Main Vac valve opened
2/1/2012	1:32:45 PM	Helium MFC set to  20.000000
2/1/2012	1:32:45 PM	H2 MFC set to  0.000000
2/1/2012	1:32:45 PM	BCl3 MFC set to  0.000000
2/1/2012	1:32:45 PM	PH3 MFC set to  0.000000
2/1/2012	1:32:45 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:32:45 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:32:45 PM	Tube furnace set to 150
2/1/2012	1:33:15 PM	Helium valve closed
2/1/2012	1:33:15 PM	H2 valve closed
2/1/2012	1:33:15 PM	BCl3 valve closed
2/1/2012	1:33:15 PM	PH3 valve closed
2/1/2012	1:33:15 PM	SiCl4 pre valve closed
2/1/2012	1:33:15 PM	SiCl4 post valve closed
2/1/2012	1:33:15 PM	Bypass valve closed
2/1/2012	1:33:15 PM	Bubbler valve closed
2/1/2012	1:33:15 PM	Main Vac valve opened
2/1/2012	1:33:15 PM	Helium MFC set to  0.000000
2/1/2012	1:33:15 PM	H2 MFC set to  0.000000
2/1/2012	1:33:15 PM	BCl3 MFC set to  0.000000
2/1/2012	1:33:15 PM	PH3 MFC set to  0.000000
2/1/2012	1:33:15 PM	SiCl4 MFC set to  0.000000
2/1/2012	1:33:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	1:33:15 PM	Tube furnace set to 150
2/1/2012	1:33:16 PM	Run finished at 1:33 PM
2/1/2012	2:55:04 PM	Main Vac valve closed
2/1/2012	2:55:11 PM	Main Vac valve opened
2/1/2012	2:56:05 PM	Recipe started at 2:56 PM
2/1/2012	2:56:05 PM	Helium valve closed
2/1/2012	2:56:05 PM	H2 valve closed
2/1/2012	2:56:05 PM	BCl3 valve closed
2/1/2012	2:56:05 PM	PH3 valve closed
2/1/2012	2:56:06 PM	SiCl4 pre valve closed
2/1/2012	2:56:06 PM	SiCl4 post valve closed
2/1/2012	2:56:06 PM	Main Vac valve closed
2/1/2012	2:56:06 PM	Bypass valve closed
2/1/2012	2:56:06 PM	Bubbler valve closed
2/1/2012	2:56:06 PM	Helium MFC set to  0.000000
2/1/2012	2:56:06 PM	H2 MFC set to  0.000000
2/1/2012	2:56:06 PM	BCl3 MFC set to  0.000000
2/1/2012	2:56:06 PM	PH3 MFC set to  0.000000
2/1/2012	2:56:06 PM	SiCl4 MFC set to  0.000000
2/1/2012	2:56:06 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	2:56:06 PM	Tube furnace set to 0
2/1/2012	2:56:09 PM	Helium valve closed
2/1/2012	2:56:09 PM	BCl3 valve closed
2/1/2012	2:56:09 PM	PH3 valve closed
2/1/2012	2:56:09 PM	SiCl4 pre valve closed
2/1/2012	2:56:09 PM	SiCl4 post valve closed
2/1/2012	2:56:09 PM	Main Vac valve closed
2/1/2012	2:56:09 PM	Bypass valve closed
2/1/2012	2:56:09 PM	Bubbler valve closed
2/1/2012	2:56:09 PM	H2 valve opened
2/1/2012	2:56:09 PM	Helium MFC set to  0.000000
2/1/2012	2:56:09 PM	H2 MFC set to  500.000000
2/1/2012	2:56:09 PM	BCl3 MFC set to  0.000000
2/1/2012	2:56:09 PM	PH3 MFC set to  0.000000
2/1/2012	2:56:09 PM	SiCl4 MFC set to  0.000000
2/1/2012	2:56:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	2:56:09 PM	Tube furnace set to 0
2/1/2012	2:57:14 PM	Helium valve closed
2/1/2012	2:57:14 PM	BCl3 valve closed
2/1/2012	2:57:14 PM	PH3 valve closed
2/1/2012	2:57:14 PM	SiCl4 pre valve closed
2/1/2012	2:57:14 PM	SiCl4 post valve closed
2/1/2012	2:57:14 PM	Main Vac valve closed
2/1/2012	2:57:14 PM	Bypass valve closed
2/1/2012	2:57:14 PM	H2 valve opened
2/1/2012	2:57:14 PM	Bubbler valve opened
2/1/2012	2:57:14 PM	Helium MFC set to  0.000000
2/1/2012	2:57:14 PM	H2 MFC set to  500.000000
2/1/2012	2:57:14 PM	BCl3 MFC set to  0.000000
2/1/2012	2:57:14 PM	PH3 MFC set to  0.000000
2/1/2012	2:57:14 PM	SiCl4 MFC set to  0.000000
2/1/2012	2:57:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	2:57:14 PM	Tube furnace set to 0
2/1/2012	2:57:15 PM	Helium valve closed
2/1/2012	2:57:15 PM	BCl3 valve closed
2/1/2012	2:57:15 PM	PH3 valve closed
2/1/2012	2:57:15 PM	SiCl4 pre valve closed
2/1/2012	2:57:15 PM	SiCl4 post valve closed
2/1/2012	2:57:15 PM	Main Vac valve closed
2/1/2012	2:57:15 PM	Bypass valve closed
2/1/2012	2:57:15 PM	H2 valve opened
2/1/2012	2:57:15 PM	Bubbler valve opened
2/1/2012	2:57:15 PM	Helium MFC set to  0.000000
2/1/2012	2:57:15 PM	H2 MFC set to  500.000000
2/1/2012	2:57:15 PM	BCl3 MFC set to  0.000000
2/1/2012	2:57:15 PM	PH3 MFC set to  0.000000
2/1/2012	2:57:15 PM	SiCl4 MFC set to  0.000000
2/1/2012	2:57:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	2:57:15 PM	Tube furnace set to 1000
2/1/2012	3:19:15 PM	Helium valve closed
2/1/2012	3:19:15 PM	PH3 valve closed
2/1/2012	3:19:15 PM	Main Vac valve closed
2/1/2012	3:19:15 PM	Bypass valve closed
2/1/2012	3:19:15 PM	H2 valve opened
2/1/2012	3:19:15 PM	BCl3 valve opened
2/1/2012	3:19:15 PM	SiCl4 pre valve opened
2/1/2012	3:19:15 PM	SiCl4 post valve opened
2/1/2012	3:19:15 PM	Bubbler valve opened
2/1/2012	3:19:15 PM	Helium MFC set to  0.000000
2/1/2012	3:19:15 PM	H2 MFC set to  500.000000
2/1/2012	3:19:15 PM	BCl3 MFC set to  3.000000
2/1/2012	3:19:15 PM	PH3 MFC set to  0.000000
2/1/2012	3:19:15 PM	SiCl4 MFC set to  25.000000
2/1/2012	3:19:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	3:19:15 PM	Tube furnace set to 1000
2/1/2012	3:39:15 PM	Helium valve closed
2/1/2012	3:39:15 PM	BCl3 valve closed
2/1/2012	3:39:15 PM	PH3 valve closed
2/1/2012	3:39:15 PM	SiCl4 pre valve closed
2/1/2012	3:39:15 PM	SiCl4 post valve closed
2/1/2012	3:39:15 PM	Main Vac valve closed
2/1/2012	3:39:15 PM	Bypass valve closed
2/1/2012	3:39:15 PM	H2 valve opened
2/1/2012	3:39:15 PM	Bubbler valve opened
2/1/2012	3:39:15 PM	Helium MFC set to  0.000000
2/1/2012	3:39:15 PM	H2 MFC set to  500.000000
2/1/2012	3:39:15 PM	BCl3 MFC set to  0.000000
2/1/2012	3:39:15 PM	PH3 MFC set to  0.000000
2/1/2012	3:39:15 PM	SiCl4 MFC set to  0.000000
2/1/2012	3:39:15 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	3:39:16 PM	Tube furnace set to 750
2/1/2012	3:44:16 PM	H2 valve closed
2/1/2012	3:44:16 PM	BCl3 valve closed
2/1/2012	3:44:16 PM	PH3 valve closed
2/1/2012	3:44:16 PM	SiCl4 pre valve closed
2/1/2012	3:44:16 PM	SiCl4 post valve closed
2/1/2012	3:44:16 PM	Main Vac valve closed
2/1/2012	3:44:16 PM	Bypass valve closed
2/1/2012	3:44:16 PM	Helium valve opened
2/1/2012	3:44:16 PM	Bubbler valve opened
2/1/2012	3:44:16 PM	Helium MFC set to  500.000000
2/1/2012	3:44:16 PM	H2 MFC set to  0.000000
2/1/2012	3:44:16 PM	BCl3 MFC set to  0.000000
2/1/2012	3:44:16 PM	PH3 MFC set to  0.000000
2/1/2012	3:44:16 PM	SiCl4 MFC set to  0.000000
2/1/2012	3:44:16 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	3:44:16 PM	Tube furnace set to 0
2/1/2012	4:04:16 PM	Helium valve closed
2/1/2012	4:04:16 PM	H2 valve closed
2/1/2012	4:04:16 PM	BCl3 valve closed
2/1/2012	4:04:16 PM	PH3 valve closed
2/1/2012	4:04:16 PM	SiCl4 pre valve closed
2/1/2012	4:04:16 PM	SiCl4 post valve closed
2/1/2012	4:04:16 PM	Main Vac valve closed
2/1/2012	4:04:16 PM	Bypass valve closed
2/1/2012	4:04:16 PM	Bubbler valve closed
2/1/2012	4:04:16 PM	Helium MFC set to  0.000000
2/1/2012	4:04:16 PM	H2 MFC set to  0.000000
2/1/2012	4:04:16 PM	BCl3 MFC set to  0.000000
2/1/2012	4:04:16 PM	PH3 MFC set to  0.000000
2/1/2012	4:04:16 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:04:16 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:04:16 PM	Tube furnace set to 0
2/1/2012	4:04:17 PM	Run finished at 4:04 PM
2/1/2012	4:25:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	4:25:09 PM	Recipe started at 4:25 PM
2/1/2012	4:25:09 PM	Helium valve closed
2/1/2012	4:25:09 PM	H2 valve closed
2/1/2012	4:25:09 PM	BCl3 valve closed
2/1/2012	4:25:09 PM	PH3 valve closed
2/1/2012	4:25:09 PM	SiCl4 pre valve closed
2/1/2012	4:25:09 PM	SiCl4 post valve closed
2/1/2012	4:25:09 PM	Main Vac valve closed
2/1/2012	4:25:09 PM	Bubbler valve closed
2/1/2012	4:25:09 PM	Bypass valve opened
2/1/2012	4:25:09 PM	Helium MFC set to  0.000000
2/1/2012	4:25:09 PM	H2 MFC set to  0.000000
2/1/2012	4:25:09 PM	BCl3 MFC set to  0.000000
2/1/2012	4:25:09 PM	PH3 MFC set to  0.000000
2/1/2012	4:25:09 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:25:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:25:09 PM	Tube furnace set to 0
2/1/2012	4:26:08 PM	Helium valve closed
2/1/2012	4:26:08 PM	H2 valve closed
2/1/2012	4:26:08 PM	BCl3 valve closed
2/1/2012	4:26:08 PM	PH3 valve closed
2/1/2012	4:26:08 PM	SiCl4 pre valve closed
2/1/2012	4:26:08 PM	SiCl4 post valve closed
2/1/2012	4:26:08 PM	Main Vac valve closed
2/1/2012	4:26:08 PM	Bubbler valve closed
2/1/2012	4:26:08 PM	Bypass valve opened
2/1/2012	4:26:08 PM	Helium MFC set to  0.000000
2/1/2012	4:26:08 PM	H2 MFC set to  0.000000
2/1/2012	4:26:08 PM	BCl3 MFC set to  0.000000
2/1/2012	4:26:08 PM	PH3 MFC set to  0.000000
2/1/2012	4:26:08 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:26:08 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:26:08 PM	Tube furnace set to 0
2/1/2012	4:27:08 PM	Helium valve closed
2/1/2012	4:27:08 PM	H2 valve closed
2/1/2012	4:27:08 PM	BCl3 valve closed
2/1/2012	4:27:08 PM	PH3 valve closed
2/1/2012	4:27:08 PM	SiCl4 pre valve closed
2/1/2012	4:27:08 PM	SiCl4 post valve closed
2/1/2012	4:27:08 PM	Bypass valve closed
2/1/2012	4:27:08 PM	Bubbler valve closed
2/1/2012	4:27:08 PM	Main Vac valve opened
2/1/2012	4:27:08 PM	Helium MFC set to  0.000000
2/1/2012	4:27:08 PM	H2 MFC set to  0.000000
2/1/2012	4:27:08 PM	BCl3 MFC set to  0.000000
2/1/2012	4:27:08 PM	PH3 MFC set to  0.000000
2/1/2012	4:27:08 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:27:08 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:27:08 PM	Tube furnace set to 0
2/1/2012	4:27:09 PM	Run finished at 4:27 PM
2/1/2012	4:27:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	4:27:37 PM	Recipe started at 4:27 PM
2/1/2012	4:27:37 PM	Helium valve closed
2/1/2012	4:27:37 PM	H2 valve closed
2/1/2012	4:27:37 PM	BCl3 valve closed
2/1/2012	4:27:37 PM	PH3 valve closed
2/1/2012	4:27:37 PM	SiCl4 pre valve closed
2/1/2012	4:27:37 PM	SiCl4 post valve closed
2/1/2012	4:27:37 PM	Bypass valve closed
2/1/2012	4:27:37 PM	Bubbler valve closed
2/1/2012	4:27:37 PM	Main Vac valve opened
2/1/2012	4:27:37 PM	Helium MFC set to  0.000000
2/1/2012	4:27:37 PM	H2 MFC set to  0.000000
2/1/2012	4:27:37 PM	BCl3 MFC set to  0.000000
2/1/2012	4:27:37 PM	PH3 MFC set to  0.000000
2/1/2012	4:27:37 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:27:37 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:27:37 PM	Tube furnace set to 150
2/1/2012	4:28:07 PM	H2 valve closed
2/1/2012	4:28:07 PM	BCl3 valve closed
2/1/2012	4:28:07 PM	PH3 valve closed
2/1/2012	4:28:07 PM	SiCl4 pre valve closed
2/1/2012	4:28:07 PM	SiCl4 post valve closed
2/1/2012	4:28:07 PM	Bypass valve closed
2/1/2012	4:28:07 PM	Bubbler valve closed
2/1/2012	4:28:07 PM	Helium valve opened
2/1/2012	4:28:07 PM	Main Vac valve opened
2/1/2012	4:28:07 PM	Helium MFC set to  20.000000
2/1/2012	4:28:07 PM	H2 MFC set to  0.000000
2/1/2012	4:28:07 PM	BCl3 MFC set to  0.000000
2/1/2012	4:28:07 PM	PH3 MFC set to  0.000000
2/1/2012	4:28:07 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:28:07 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:28:07 PM	Tube furnace set to 150
2/1/2012	4:28:37 PM	Helium valve closed
2/1/2012	4:28:37 PM	H2 valve closed
2/1/2012	4:28:37 PM	BCl3 valve closed
2/1/2012	4:28:37 PM	PH3 valve closed
2/1/2012	4:28:37 PM	SiCl4 pre valve closed
2/1/2012	4:28:37 PM	SiCl4 post valve closed
2/1/2012	4:28:37 PM	Bypass valve closed
2/1/2012	4:28:37 PM	Bubbler valve closed
2/1/2012	4:28:37 PM	Main Vac valve opened
2/1/2012	4:28:37 PM	Helium MFC set to  0.000000
2/1/2012	4:28:37 PM	H2 MFC set to  0.000000
2/1/2012	4:28:37 PM	BCl3 MFC set to  0.000000
2/1/2012	4:28:37 PM	PH3 MFC set to  0.000000
2/1/2012	4:28:37 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:28:37 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:28:37 PM	Tube furnace set to 150
2/1/2012	4:29:07 PM	H2 valve closed
2/1/2012	4:29:07 PM	BCl3 valve closed
2/1/2012	4:29:07 PM	PH3 valve closed
2/1/2012	4:29:07 PM	SiCl4 pre valve closed
2/1/2012	4:29:07 PM	SiCl4 post valve closed
2/1/2012	4:29:07 PM	Bypass valve closed
2/1/2012	4:29:07 PM	Bubbler valve closed
2/1/2012	4:29:07 PM	Helium valve opened
2/1/2012	4:29:07 PM	Main Vac valve opened
2/1/2012	4:29:07 PM	Helium MFC set to  20.000000
2/1/2012	4:29:07 PM	H2 MFC set to  0.000000
2/1/2012	4:29:07 PM	BCl3 MFC set to  0.000000
2/1/2012	4:29:07 PM	PH3 MFC set to  0.000000
2/1/2012	4:29:07 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:29:07 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:29:07 PM	Tube furnace set to 150
2/1/2012	4:29:37 PM	Helium valve closed
2/1/2012	4:29:37 PM	H2 valve closed
2/1/2012	4:29:38 PM	BCl3 valve closed
2/1/2012	4:29:38 PM	PH3 valve closed
2/1/2012	4:29:38 PM	SiCl4 pre valve closed
2/1/2012	4:29:38 PM	SiCl4 post valve closed
2/1/2012	4:29:38 PM	Bypass valve closed
2/1/2012	4:29:38 PM	Bubbler valve closed
2/1/2012	4:29:38 PM	Main Vac valve opened
2/1/2012	4:29:38 PM	Helium MFC set to  0.000000
2/1/2012	4:29:38 PM	H2 MFC set to  0.000000
2/1/2012	4:29:38 PM	BCl3 MFC set to  0.000000
2/1/2012	4:29:38 PM	PH3 MFC set to  0.000000
2/1/2012	4:29:38 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:29:38 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:29:38 PM	Tube furnace set to 150
2/1/2012	4:30:08 PM	H2 valve closed
2/1/2012	4:30:08 PM	BCl3 valve closed
2/1/2012	4:30:08 PM	PH3 valve closed
2/1/2012	4:30:08 PM	SiCl4 pre valve closed
2/1/2012	4:30:08 PM	SiCl4 post valve closed
2/1/2012	4:30:08 PM	Bypass valve closed
2/1/2012	4:30:08 PM	Bubbler valve closed
2/1/2012	4:30:08 PM	Helium valve opened
2/1/2012	4:30:08 PM	Main Vac valve opened
2/1/2012	4:30:08 PM	Helium MFC set to  20.000000
2/1/2012	4:30:08 PM	H2 MFC set to  0.000000
2/1/2012	4:30:08 PM	BCl3 MFC set to  0.000000
2/1/2012	4:30:08 PM	PH3 MFC set to  0.000000
2/1/2012	4:30:08 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:30:08 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:30:08 PM	Tube furnace set to 150
2/1/2012	4:30:38 PM	Helium valve closed
2/1/2012	4:30:38 PM	H2 valve closed
2/1/2012	4:30:38 PM	BCl3 valve closed
2/1/2012	4:30:38 PM	PH3 valve closed
2/1/2012	4:30:38 PM	SiCl4 pre valve closed
2/1/2012	4:30:38 PM	SiCl4 post valve closed
2/1/2012	4:30:38 PM	Bypass valve closed
2/1/2012	4:30:38 PM	Bubbler valve closed
2/1/2012	4:30:38 PM	Main Vac valve opened
2/1/2012	4:30:38 PM	Helium MFC set to  0.000000
2/1/2012	4:30:38 PM	H2 MFC set to  0.000000
2/1/2012	4:30:38 PM	BCl3 MFC set to  0.000000
2/1/2012	4:30:38 PM	PH3 MFC set to  0.000000
2/1/2012	4:30:38 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:30:38 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:30:38 PM	Tube furnace set to 150
2/1/2012	4:31:08 PM	H2 valve closed
2/1/2012	4:31:08 PM	BCl3 valve closed
2/1/2012	4:31:08 PM	PH3 valve closed
2/1/2012	4:31:08 PM	SiCl4 pre valve closed
2/1/2012	4:31:08 PM	SiCl4 post valve closed
2/1/2012	4:31:08 PM	Bypass valve closed
2/1/2012	4:31:08 PM	Bubbler valve closed
2/1/2012	4:31:08 PM	Helium valve opened
2/1/2012	4:31:08 PM	Main Vac valve opened
2/1/2012	4:31:08 PM	Helium MFC set to  20.000000
2/1/2012	4:31:08 PM	H2 MFC set to  0.000000
2/1/2012	4:31:08 PM	BCl3 MFC set to  0.000000
2/1/2012	4:31:08 PM	PH3 MFC set to  0.000000
2/1/2012	4:31:08 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:31:08 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:31:08 PM	Tube furnace set to 150
2/1/2012	4:31:38 PM	Helium valve closed
2/1/2012	4:31:38 PM	H2 valve closed
2/1/2012	4:31:38 PM	BCl3 valve closed
2/1/2012	4:31:38 PM	PH3 valve closed
2/1/2012	4:31:38 PM	SiCl4 pre valve closed
2/1/2012	4:31:38 PM	SiCl4 post valve closed
2/1/2012	4:31:38 PM	Bypass valve closed
2/1/2012	4:31:38 PM	Bubbler valve closed
2/1/2012	4:31:38 PM	Main Vac valve opened
2/1/2012	4:31:38 PM	Helium MFC set to  0.000000
2/1/2012	4:31:38 PM	H2 MFC set to  0.000000
2/1/2012	4:31:38 PM	BCl3 MFC set to  0.000000
2/1/2012	4:31:38 PM	PH3 MFC set to  0.000000
2/1/2012	4:31:38 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:31:38 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:31:38 PM	Tube furnace set to 150
2/1/2012	4:32:09 PM	H2 valve closed
2/1/2012	4:32:09 PM	BCl3 valve closed
2/1/2012	4:32:09 PM	PH3 valve closed
2/1/2012	4:32:09 PM	SiCl4 pre valve closed
2/1/2012	4:32:09 PM	SiCl4 post valve closed
2/1/2012	4:32:09 PM	Bypass valve closed
2/1/2012	4:32:09 PM	Bubbler valve closed
2/1/2012	4:32:09 PM	Helium valve opened
2/1/2012	4:32:09 PM	Main Vac valve opened
2/1/2012	4:32:09 PM	Helium MFC set to  20.000000
2/1/2012	4:32:09 PM	H2 MFC set to  0.000000
2/1/2012	4:32:09 PM	BCl3 MFC set to  0.000000
2/1/2012	4:32:09 PM	PH3 MFC set to  0.000000
2/1/2012	4:32:09 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:32:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:32:09 PM	Tube furnace set to 150
2/1/2012	4:32:39 PM	Helium valve closed
2/1/2012	4:32:39 PM	H2 valve closed
2/1/2012	4:32:39 PM	BCl3 valve closed
2/1/2012	4:32:39 PM	PH3 valve closed
2/1/2012	4:32:39 PM	SiCl4 pre valve closed
2/1/2012	4:32:39 PM	SiCl4 post valve closed
2/1/2012	4:32:39 PM	Bypass valve closed
2/1/2012	4:32:39 PM	Bubbler valve closed
2/1/2012	4:32:39 PM	Main Vac valve opened
2/1/2012	4:32:39 PM	Helium MFC set to  0.000000
2/1/2012	4:32:39 PM	H2 MFC set to  0.000000
2/1/2012	4:32:39 PM	BCl3 MFC set to  0.000000
2/1/2012	4:32:39 PM	PH3 MFC set to  0.000000
2/1/2012	4:32:39 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:32:39 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:32:39 PM	Tube furnace set to 150
2/1/2012	4:33:09 PM	H2 valve closed
2/1/2012	4:33:09 PM	BCl3 valve closed
2/1/2012	4:33:09 PM	PH3 valve closed
2/1/2012	4:33:09 PM	SiCl4 pre valve closed
2/1/2012	4:33:09 PM	SiCl4 post valve closed
2/1/2012	4:33:09 PM	Bypass valve closed
2/1/2012	4:33:09 PM	Bubbler valve closed
2/1/2012	4:33:09 PM	Helium valve opened
2/1/2012	4:33:09 PM	Main Vac valve opened
2/1/2012	4:33:09 PM	Helium MFC set to  20.000000
2/1/2012	4:33:09 PM	H2 MFC set to  0.000000
2/1/2012	4:33:09 PM	BCl3 MFC set to  0.000000
2/1/2012	4:33:09 PM	PH3 MFC set to  0.000000
2/1/2012	4:33:09 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:33:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:33:09 PM	Tube furnace set to 150
2/1/2012	4:33:39 PM	Helium valve closed
2/1/2012	4:33:39 PM	H2 valve closed
2/1/2012	4:33:39 PM	BCl3 valve closed
2/1/2012	4:33:39 PM	PH3 valve closed
2/1/2012	4:33:39 PM	SiCl4 pre valve closed
2/1/2012	4:33:39 PM	SiCl4 post valve closed
2/1/2012	4:33:39 PM	Bypass valve closed
2/1/2012	4:33:39 PM	Bubbler valve closed
2/1/2012	4:33:39 PM	Main Vac valve opened
2/1/2012	4:33:39 PM	Helium MFC set to  0.000000
2/1/2012	4:33:39 PM	H2 MFC set to  0.000000
2/1/2012	4:33:39 PM	BCl3 MFC set to  0.000000
2/1/2012	4:33:39 PM	PH3 MFC set to  0.000000
2/1/2012	4:33:39 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:33:39 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:33:39 PM	Tube furnace set to 150
2/1/2012	4:34:09 PM	H2 valve closed
2/1/2012	4:34:09 PM	BCl3 valve closed
2/1/2012	4:34:09 PM	PH3 valve closed
2/1/2012	4:34:09 PM	SiCl4 pre valve closed
2/1/2012	4:34:09 PM	SiCl4 post valve closed
2/1/2012	4:34:09 PM	Bypass valve closed
2/1/2012	4:34:09 PM	Bubbler valve closed
2/1/2012	4:34:09 PM	Helium valve opened
2/1/2012	4:34:09 PM	Main Vac valve opened
2/1/2012	4:34:09 PM	Helium MFC set to  20.000000
2/1/2012	4:34:09 PM	H2 MFC set to  0.000000
2/1/2012	4:34:09 PM	BCl3 MFC set to  0.000000
2/1/2012	4:34:09 PM	PH3 MFC set to  0.000000
2/1/2012	4:34:09 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:34:09 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:34:10 PM	Tube furnace set to 150
2/1/2012	4:34:40 PM	Helium valve closed
2/1/2012	4:34:40 PM	H2 valve closed
2/1/2012	4:34:40 PM	BCl3 valve closed
2/1/2012	4:34:40 PM	PH3 valve closed
2/1/2012	4:34:40 PM	SiCl4 pre valve closed
2/1/2012	4:34:40 PM	SiCl4 post valve closed
2/1/2012	4:34:40 PM	Bypass valve closed
2/1/2012	4:34:40 PM	Bubbler valve closed
2/1/2012	4:34:40 PM	Main Vac valve opened
2/1/2012	4:34:40 PM	Helium MFC set to  0.000000
2/1/2012	4:34:40 PM	H2 MFC set to  0.000000
2/1/2012	4:34:40 PM	BCl3 MFC set to  0.000000
2/1/2012	4:34:40 PM	PH3 MFC set to  0.000000
2/1/2012	4:34:40 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:34:40 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:34:40 PM	Tube furnace set to 150
2/1/2012	4:35:10 PM	H2 valve closed
2/1/2012	4:35:10 PM	BCl3 valve closed
2/1/2012	4:35:10 PM	PH3 valve closed
2/1/2012	4:35:10 PM	SiCl4 pre valve closed
2/1/2012	4:35:10 PM	SiCl4 post valve closed
2/1/2012	4:35:10 PM	Bypass valve closed
2/1/2012	4:35:10 PM	Bubbler valve closed
2/1/2012	4:35:10 PM	Helium valve opened
2/1/2012	4:35:10 PM	Main Vac valve opened
2/1/2012	4:35:10 PM	Helium MFC set to  20.000000
2/1/2012	4:35:10 PM	H2 MFC set to  0.000000
2/1/2012	4:35:10 PM	BCl3 MFC set to  0.000000
2/1/2012	4:35:10 PM	PH3 MFC set to  0.000000
2/1/2012	4:35:10 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:35:10 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:35:10 PM	Tube furnace set to 150
2/1/2012	4:35:40 PM	Helium valve closed
2/1/2012	4:35:40 PM	H2 valve closed
2/1/2012	4:35:40 PM	BCl3 valve closed
2/1/2012	4:35:40 PM	PH3 valve closed
2/1/2012	4:35:40 PM	SiCl4 pre valve closed
2/1/2012	4:35:40 PM	SiCl4 post valve closed
2/1/2012	4:35:40 PM	Bypass valve closed
2/1/2012	4:35:40 PM	Bubbler valve closed
2/1/2012	4:35:40 PM	Main Vac valve opened
2/1/2012	4:35:40 PM	Helium MFC set to  0.000000
2/1/2012	4:35:40 PM	H2 MFC set to  0.000000
2/1/2012	4:35:40 PM	BCl3 MFC set to  0.000000
2/1/2012	4:35:40 PM	PH3 MFC set to  0.000000
2/1/2012	4:35:40 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:35:40 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:35:40 PM	Tube furnace set to 150
2/1/2012	4:36:10 PM	H2 valve closed
2/1/2012	4:36:10 PM	BCl3 valve closed
2/1/2012	4:36:10 PM	PH3 valve closed
2/1/2012	4:36:10 PM	SiCl4 pre valve closed
2/1/2012	4:36:10 PM	SiCl4 post valve closed
2/1/2012	4:36:10 PM	Bypass valve closed
2/1/2012	4:36:10 PM	Bubbler valve closed
2/1/2012	4:36:10 PM	Helium valve opened
2/1/2012	4:36:10 PM	Main Vac valve opened
2/1/2012	4:36:10 PM	Helium MFC set to  20.000000
2/1/2012	4:36:10 PM	H2 MFC set to  0.000000
2/1/2012	4:36:10 PM	BCl3 MFC set to  0.000000
2/1/2012	4:36:10 PM	PH3 MFC set to  0.000000
2/1/2012	4:36:10 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:36:10 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:36:10 PM	Tube furnace set to 150
2/1/2012	4:36:40 PM	Helium valve closed
2/1/2012	4:36:40 PM	H2 valve closed
2/1/2012	4:36:40 PM	BCl3 valve closed
2/1/2012	4:36:40 PM	PH3 valve closed
2/1/2012	4:36:40 PM	SiCl4 pre valve closed
2/1/2012	4:36:40 PM	SiCl4 post valve closed
2/1/2012	4:36:40 PM	Bypass valve closed
2/1/2012	4:36:40 PM	Bubbler valve closed
2/1/2012	4:36:40 PM	Main Vac valve opened
2/1/2012	4:36:40 PM	Helium MFC set to  0.000000
2/1/2012	4:36:40 PM	H2 MFC set to  0.000000
2/1/2012	4:36:40 PM	BCl3 MFC set to  0.000000
2/1/2012	4:36:40 PM	PH3 MFC set to  0.000000
2/1/2012	4:36:40 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:36:40 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:36:41 PM	Tube furnace set to 150
2/1/2012	4:37:11 PM	H2 valve closed
2/1/2012	4:37:11 PM	BCl3 valve closed
2/1/2012	4:37:11 PM	PH3 valve closed
2/1/2012	4:37:11 PM	SiCl4 pre valve closed
2/1/2012	4:37:11 PM	SiCl4 post valve closed
2/1/2012	4:37:11 PM	Bypass valve closed
2/1/2012	4:37:11 PM	Bubbler valve closed
2/1/2012	4:37:11 PM	Helium valve opened
2/1/2012	4:37:11 PM	Main Vac valve opened
2/1/2012	4:37:11 PM	Helium MFC set to  20.000000
2/1/2012	4:37:11 PM	H2 MFC set to  0.000000
2/1/2012	4:37:11 PM	BCl3 MFC set to  0.000000
2/1/2012	4:37:11 PM	PH3 MFC set to  0.000000
2/1/2012	4:37:11 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:37:11 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:37:11 PM	Tube furnace set to 150
2/1/2012	4:37:41 PM	Helium valve closed
2/1/2012	4:37:41 PM	H2 valve closed
2/1/2012	4:37:41 PM	BCl3 valve closed
2/1/2012	4:37:41 PM	PH3 valve closed
2/1/2012	4:37:41 PM	SiCl4 pre valve closed
2/1/2012	4:37:41 PM	SiCl4 post valve closed
2/1/2012	4:37:41 PM	Bypass valve closed
2/1/2012	4:37:41 PM	Bubbler valve closed
2/1/2012	4:37:41 PM	Main Vac valve opened
2/1/2012	4:37:41 PM	Helium MFC set to  0.000000
2/1/2012	4:37:41 PM	H2 MFC set to  0.000000
2/1/2012	4:37:41 PM	BCl3 MFC set to  0.000000
2/1/2012	4:37:41 PM	PH3 MFC set to  0.000000
2/1/2012	4:37:41 PM	SiCl4 MFC set to  0.000000
2/1/2012	4:37:41 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	4:37:41 PM	Tube furnace set to 150
2/1/2012	4:37:42 PM	Run finished at 4:37 PM
2/1/2012	4:46:52 PM	Main Vac valve closed
2/1/2012	4:46:58 PM	Main Vac valve opened
2/1/2012	5:00:32 PM	Main Vac valve closed
2/1/2012	5:00:38 PM	Main Vac valve opened
2/1/2012	5:01:22 PM	Recipe started at 5:01 PM
2/1/2012	5:01:22 PM	Helium valve closed
2/1/2012	5:01:22 PM	H2 valve closed
2/1/2012	5:01:22 PM	BCl3 valve closed
2/1/2012	5:01:22 PM	PH3 valve closed
2/1/2012	5:01:22 PM	SiCl4 pre valve closed
2/1/2012	5:01:22 PM	SiCl4 post valve closed
2/1/2012	5:01:22 PM	Main Vac valve closed
2/1/2012	5:01:22 PM	Bypass valve closed
2/1/2012	5:01:22 PM	Bubbler valve closed
2/1/2012	5:01:22 PM	Helium MFC set to  0.000000
2/1/2012	5:01:22 PM	H2 MFC set to  0.000000
2/1/2012	5:01:22 PM	BCl3 MFC set to  0.000000
2/1/2012	5:01:22 PM	PH3 MFC set to  0.000000
2/1/2012	5:01:22 PM	SiCl4 MFC set to  0.000000
2/1/2012	5:01:22 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	5:01:23 PM	Tube furnace set to 0
2/1/2012	5:01:26 PM	Helium valve closed
2/1/2012	5:01:26 PM	BCl3 valve closed
2/1/2012	5:01:26 PM	PH3 valve closed
2/1/2012	5:01:26 PM	SiCl4 pre valve closed
2/1/2012	5:01:26 PM	SiCl4 post valve closed
2/1/2012	5:01:26 PM	Main Vac valve closed
2/1/2012	5:01:26 PM	Bypass valve closed
2/1/2012	5:01:26 PM	Bubbler valve closed
2/1/2012	5:01:26 PM	H2 valve opened
2/1/2012	5:01:26 PM	Helium MFC set to  0.000000
2/1/2012	5:01:26 PM	H2 MFC set to  500.000000
2/1/2012	5:01:26 PM	BCl3 MFC set to  0.000000
2/1/2012	5:01:26 PM	PH3 MFC set to  0.000000
2/1/2012	5:01:26 PM	SiCl4 MFC set to  0.000000
2/1/2012	5:01:26 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	5:01:26 PM	Tube furnace set to 0
2/1/2012	5:02:31 PM	Helium valve closed
2/1/2012	5:02:31 PM	BCl3 valve closed
2/1/2012	5:02:31 PM	PH3 valve closed
2/1/2012	5:02:31 PM	SiCl4 pre valve closed
2/1/2012	5:02:31 PM	SiCl4 post valve closed
2/1/2012	5:02:31 PM	Main Vac valve closed
2/1/2012	5:02:31 PM	Bypass valve closed
2/1/2012	5:02:31 PM	H2 valve opened
2/1/2012	5:02:31 PM	Bubbler valve opened
2/1/2012	5:02:31 PM	Helium MFC set to  0.000000
2/1/2012	5:02:31 PM	H2 MFC set to  500.000000
2/1/2012	5:02:31 PM	BCl3 MFC set to  0.000000
2/1/2012	5:02:31 PM	PH3 MFC set to  0.000000
2/1/2012	5:02:31 PM	SiCl4 MFC set to  0.000000
2/1/2012	5:02:31 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	5:02:31 PM	Tube furnace set to 0
2/1/2012	5:02:32 PM	Helium valve closed
2/1/2012	5:02:32 PM	BCl3 valve closed
2/1/2012	5:02:32 PM	PH3 valve closed
2/1/2012	5:02:32 PM	SiCl4 pre valve closed
2/1/2012	5:02:32 PM	SiCl4 post valve closed
2/1/2012	5:02:32 PM	Main Vac valve closed
2/1/2012	5:02:32 PM	Bypass valve closed
2/1/2012	5:02:32 PM	H2 valve opened
2/1/2012	5:02:32 PM	Bubbler valve opened
2/1/2012	5:02:32 PM	Helium MFC set to  0.000000
2/1/2012	5:02:32 PM	H2 MFC set to  500.000000
2/1/2012	5:02:32 PM	BCl3 MFC set to  0.000000
2/1/2012	5:02:32 PM	PH3 MFC set to  0.000000
2/1/2012	5:02:32 PM	SiCl4 MFC set to  0.000000
2/1/2012	5:02:32 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	5:02:32 PM	Tube furnace set to 1000
2/1/2012	5:24:32 PM	Helium valve closed
2/1/2012	5:24:32 PM	PH3 valve closed
2/1/2012	5:24:32 PM	Main Vac valve closed
2/1/2012	5:24:32 PM	Bypass valve closed
2/1/2012	5:24:32 PM	H2 valve opened
2/1/2012	5:24:32 PM	BCl3 valve opened
2/1/2012	5:24:32 PM	SiCl4 pre valve opened
2/1/2012	5:24:32 PM	SiCl4 post valve opened
2/1/2012	5:24:32 PM	Bubbler valve opened
2/1/2012	5:24:32 PM	Helium MFC set to  0.000000
2/1/2012	5:24:32 PM	H2 MFC set to  500.000000
2/1/2012	5:24:32 PM	BCl3 MFC set to  3.000000
2/1/2012	5:24:32 PM	PH3 MFC set to  0.000000
2/1/2012	5:24:32 PM	SiCl4 MFC set to  25.000000
2/1/2012	5:24:32 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	5:24:33 PM	Tube furnace set to 1000
2/1/2012	5:54:33 PM	Helium valve closed
2/1/2012	5:54:33 PM	BCl3 valve closed
2/1/2012	5:54:33 PM	PH3 valve closed
2/1/2012	5:54:33 PM	SiCl4 pre valve closed
2/1/2012	5:54:33 PM	SiCl4 post valve closed
2/1/2012	5:54:33 PM	Main Vac valve closed
2/1/2012	5:54:33 PM	Bypass valve closed
2/1/2012	5:54:33 PM	H2 valve opened
2/1/2012	5:54:33 PM	Bubbler valve opened
2/1/2012	5:54:33 PM	Helium MFC set to  0.000000
2/1/2012	5:54:33 PM	H2 MFC set to  500.000000
2/1/2012	5:54:33 PM	BCl3 MFC set to  0.000000
2/1/2012	5:54:33 PM	PH3 MFC set to  0.000000
2/1/2012	5:54:33 PM	SiCl4 MFC set to  0.000000
2/1/2012	5:54:33 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	5:54:33 PM	Tube furnace set to 750
2/1/2012	5:59:33 PM	H2 valve closed
2/1/2012	5:59:33 PM	BCl3 valve closed
2/1/2012	5:59:33 PM	PH3 valve closed
2/1/2012	5:59:33 PM	SiCl4 pre valve closed
2/1/2012	5:59:33 PM	SiCl4 post valve closed
2/1/2012	5:59:33 PM	Main Vac valve closed
2/1/2012	5:59:33 PM	Bypass valve closed
2/1/2012	5:59:33 PM	Helium valve opened
2/1/2012	5:59:33 PM	Bubbler valve opened
2/1/2012	5:59:33 PM	Helium MFC set to  500.000000
2/1/2012	5:59:33 PM	H2 MFC set to  0.000000
2/1/2012	5:59:33 PM	BCl3 MFC set to  0.000000
2/1/2012	5:59:33 PM	PH3 MFC set to  0.000000
2/1/2012	5:59:33 PM	SiCl4 MFC set to  0.000000
2/1/2012	5:59:33 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	5:59:33 PM	Tube furnace set to 0
2/1/2012	6:19:33 PM	Helium valve closed
2/1/2012	6:19:33 PM	H2 valve closed
2/1/2012	6:19:33 PM	BCl3 valve closed
2/1/2012	6:19:33 PM	PH3 valve closed
2/1/2012	6:19:33 PM	SiCl4 pre valve closed
2/1/2012	6:19:33 PM	SiCl4 post valve closed
2/1/2012	6:19:33 PM	Main Vac valve closed
2/1/2012	6:19:33 PM	Bypass valve closed
2/1/2012	6:19:33 PM	Bubbler valve closed
2/1/2012	6:19:33 PM	Helium MFC set to  0.000000
2/1/2012	6:19:33 PM	H2 MFC set to  0.000000
2/1/2012	6:19:33 PM	BCl3 MFC set to  0.000000
2/1/2012	6:19:33 PM	PH3 MFC set to  0.000000
2/1/2012	6:19:33 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:19:33 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:19:33 PM	Tube furnace set to 0
2/1/2012	6:19:34 PM	Run finished at 6:19 PM
2/1/2012	6:24:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	6:24:25 PM	Recipe started at 6:24 PM
2/1/2012	6:24:25 PM	Helium valve closed
2/1/2012	6:24:25 PM	H2 valve closed
2/1/2012	6:24:25 PM	BCl3 valve closed
2/1/2012	6:24:25 PM	PH3 valve closed
2/1/2012	6:24:25 PM	SiCl4 pre valve closed
2/1/2012	6:24:25 PM	SiCl4 post valve closed
2/1/2012	6:24:25 PM	Main Vac valve closed
2/1/2012	6:24:25 PM	Bubbler valve closed
2/1/2012	6:24:25 PM	Bypass valve opened
2/1/2012	6:24:25 PM	Helium MFC set to  0.000000
2/1/2012	6:24:25 PM	H2 MFC set to  0.000000
2/1/2012	6:24:25 PM	BCl3 MFC set to  0.000000
2/1/2012	6:24:25 PM	PH3 MFC set to  0.000000
2/1/2012	6:24:25 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:24:25 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:24:26 PM	Tube furnace set to 0
2/1/2012	6:25:24 PM	Helium valve closed
2/1/2012	6:25:24 PM	H2 valve closed
2/1/2012	6:25:24 PM	BCl3 valve closed
2/1/2012	6:25:24 PM	PH3 valve closed
2/1/2012	6:25:24 PM	SiCl4 pre valve closed
2/1/2012	6:25:24 PM	SiCl4 post valve closed
2/1/2012	6:25:24 PM	Main Vac valve closed
2/1/2012	6:25:24 PM	Bubbler valve closed
2/1/2012	6:25:24 PM	Bypass valve opened
2/1/2012	6:25:24 PM	Helium MFC set to  0.000000
2/1/2012	6:25:24 PM	H2 MFC set to  0.000000
2/1/2012	6:25:24 PM	BCl3 MFC set to  0.000000
2/1/2012	6:25:24 PM	PH3 MFC set to  0.000000
2/1/2012	6:25:24 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:25:24 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:25:24 PM	Tube furnace set to 0
2/1/2012	6:26:24 PM	Helium valve closed
2/1/2012	6:26:24 PM	H2 valve closed
2/1/2012	6:26:24 PM	BCl3 valve closed
2/1/2012	6:26:24 PM	PH3 valve closed
2/1/2012	6:26:24 PM	SiCl4 pre valve closed
2/1/2012	6:26:24 PM	SiCl4 post valve closed
2/1/2012	6:26:24 PM	Bypass valve closed
2/1/2012	6:26:24 PM	Bubbler valve closed
2/1/2012	6:26:24 PM	Main Vac valve opened
2/1/2012	6:26:24 PM	Helium MFC set to  0.000000
2/1/2012	6:26:24 PM	H2 MFC set to  0.000000
2/1/2012	6:26:24 PM	BCl3 MFC set to  0.000000
2/1/2012	6:26:24 PM	PH3 MFC set to  0.000000
2/1/2012	6:26:24 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:26:24 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:26:24 PM	Tube furnace set to 0
2/1/2012	6:26:25 PM	Run finished at 6:26 PM
2/1/2012	6:26:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	6:27:02 PM	Recipe started at 6:26 PM
2/1/2012	6:27:02 PM	Helium valve closed
2/1/2012	6:27:02 PM	H2 valve closed
2/1/2012	6:27:02 PM	BCl3 valve closed
2/1/2012	6:27:02 PM	PH3 valve closed
2/1/2012	6:27:02 PM	SiCl4 pre valve closed
2/1/2012	6:27:02 PM	SiCl4 post valve closed
2/1/2012	6:27:02 PM	Bypass valve closed
2/1/2012	6:27:02 PM	Bubbler valve closed
2/1/2012	6:27:02 PM	Main Vac valve opened
2/1/2012	6:27:02 PM	Helium MFC set to  0.000000
2/1/2012	6:27:02 PM	H2 MFC set to  0.000000
2/1/2012	6:27:02 PM	BCl3 MFC set to  0.000000
2/1/2012	6:27:02 PM	PH3 MFC set to  0.000000
2/1/2012	6:27:02 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:27:02 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:27:03 PM	Tube furnace set to 150
2/1/2012	6:27:33 PM	H2 valve closed
2/1/2012	6:27:33 PM	BCl3 valve closed
2/1/2012	6:27:33 PM	PH3 valve closed
2/1/2012	6:27:33 PM	SiCl4 pre valve closed
2/1/2012	6:27:33 PM	SiCl4 post valve closed
2/1/2012	6:27:33 PM	Bypass valve closed
2/1/2012	6:27:33 PM	Bubbler valve closed
2/1/2012	6:27:33 PM	Helium valve opened
2/1/2012	6:27:33 PM	Main Vac valve opened
2/1/2012	6:27:33 PM	Helium MFC set to  20.000000
2/1/2012	6:27:33 PM	H2 MFC set to  0.000000
2/1/2012	6:27:33 PM	BCl3 MFC set to  0.000000
2/1/2012	6:27:33 PM	PH3 MFC set to  0.000000
2/1/2012	6:27:33 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:27:33 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:27:33 PM	Tube furnace set to 150
2/1/2012	6:28:03 PM	Helium valve closed
2/1/2012	6:28:03 PM	H2 valve closed
2/1/2012	6:28:03 PM	BCl3 valve closed
2/1/2012	6:28:03 PM	PH3 valve closed
2/1/2012	6:28:03 PM	SiCl4 pre valve closed
2/1/2012	6:28:03 PM	SiCl4 post valve closed
2/1/2012	6:28:03 PM	Bypass valve closed
2/1/2012	6:28:03 PM	Bubbler valve closed
2/1/2012	6:28:03 PM	Main Vac valve opened
2/1/2012	6:28:03 PM	Helium MFC set to  0.000000
2/1/2012	6:28:03 PM	H2 MFC set to  0.000000
2/1/2012	6:28:03 PM	BCl3 MFC set to  0.000000
2/1/2012	6:28:03 PM	PH3 MFC set to  0.000000
2/1/2012	6:28:03 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:28:03 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:28:03 PM	Tube furnace set to 150
2/1/2012	6:28:33 PM	H2 valve closed
2/1/2012	6:28:33 PM	BCl3 valve closed
2/1/2012	6:28:33 PM	PH3 valve closed
2/1/2012	6:28:33 PM	SiCl4 pre valve closed
2/1/2012	6:28:33 PM	SiCl4 post valve closed
2/1/2012	6:28:33 PM	Bypass valve closed
2/1/2012	6:28:33 PM	Bubbler valve closed
2/1/2012	6:28:33 PM	Helium valve opened
2/1/2012	6:28:33 PM	Main Vac valve opened
2/1/2012	6:28:33 PM	Helium MFC set to  20.000000
2/1/2012	6:28:33 PM	H2 MFC set to  0.000000
2/1/2012	6:28:33 PM	BCl3 MFC set to  0.000000
2/1/2012	6:28:33 PM	PH3 MFC set to  0.000000
2/1/2012	6:28:33 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:28:33 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:28:33 PM	Tube furnace set to 150
2/1/2012	6:29:03 PM	Helium valve closed
2/1/2012	6:29:03 PM	H2 valve closed
2/1/2012	6:29:03 PM	BCl3 valve closed
2/1/2012	6:29:03 PM	PH3 valve closed
2/1/2012	6:29:03 PM	SiCl4 pre valve closed
2/1/2012	6:29:03 PM	SiCl4 post valve closed
2/1/2012	6:29:03 PM	Bypass valve closed
2/1/2012	6:29:03 PM	Bubbler valve closed
2/1/2012	6:29:03 PM	Main Vac valve opened
2/1/2012	6:29:03 PM	Helium MFC set to  0.000000
2/1/2012	6:29:03 PM	H2 MFC set to  0.000000
2/1/2012	6:29:03 PM	BCl3 MFC set to  0.000000
2/1/2012	6:29:03 PM	PH3 MFC set to  0.000000
2/1/2012	6:29:03 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:29:03 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:29:03 PM	Tube furnace set to 150
2/1/2012	6:29:33 PM	H2 valve closed
2/1/2012	6:29:33 PM	BCl3 valve closed
2/1/2012	6:29:33 PM	PH3 valve closed
2/1/2012	6:29:33 PM	SiCl4 pre valve closed
2/1/2012	6:29:33 PM	SiCl4 post valve closed
2/1/2012	6:29:33 PM	Bypass valve closed
2/1/2012	6:29:33 PM	Bubbler valve closed
2/1/2012	6:29:33 PM	Helium valve opened
2/1/2012	6:29:33 PM	Main Vac valve opened
2/1/2012	6:29:33 PM	Helium MFC set to  20.000000
2/1/2012	6:29:33 PM	H2 MFC set to  0.000000
2/1/2012	6:29:33 PM	BCl3 MFC set to  0.000000
2/1/2012	6:29:33 PM	PH3 MFC set to  0.000000
2/1/2012	6:29:33 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:29:33 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:29:34 PM	Tube furnace set to 150
2/1/2012	6:30:04 PM	Helium valve closed
2/1/2012	6:30:04 PM	H2 valve closed
2/1/2012	6:30:04 PM	BCl3 valve closed
2/1/2012	6:30:04 PM	PH3 valve closed
2/1/2012	6:30:04 PM	SiCl4 pre valve closed
2/1/2012	6:30:04 PM	SiCl4 post valve closed
2/1/2012	6:30:04 PM	Bypass valve closed
2/1/2012	6:30:04 PM	Bubbler valve closed
2/1/2012	6:30:04 PM	Main Vac valve opened
2/1/2012	6:30:04 PM	Helium MFC set to  0.000000
2/1/2012	6:30:04 PM	H2 MFC set to  0.000000
2/1/2012	6:30:04 PM	BCl3 MFC set to  0.000000
2/1/2012	6:30:04 PM	PH3 MFC set to  0.000000
2/1/2012	6:30:04 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:30:04 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:30:04 PM	Tube furnace set to 150
2/1/2012	6:30:34 PM	H2 valve closed
2/1/2012	6:30:34 PM	BCl3 valve closed
2/1/2012	6:30:34 PM	PH3 valve closed
2/1/2012	6:30:34 PM	SiCl4 pre valve closed
2/1/2012	6:30:34 PM	SiCl4 post valve closed
2/1/2012	6:30:34 PM	Bypass valve closed
2/1/2012	6:30:34 PM	Bubbler valve closed
2/1/2012	6:30:34 PM	Helium valve opened
2/1/2012	6:30:34 PM	Main Vac valve opened
2/1/2012	6:30:34 PM	Helium MFC set to  20.000000
2/1/2012	6:30:34 PM	H2 MFC set to  0.000000
2/1/2012	6:30:34 PM	BCl3 MFC set to  0.000000
2/1/2012	6:30:34 PM	PH3 MFC set to  0.000000
2/1/2012	6:30:34 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:30:34 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:30:34 PM	Tube furnace set to 150
2/1/2012	6:31:04 PM	Helium valve closed
2/1/2012	6:31:04 PM	H2 valve closed
2/1/2012	6:31:04 PM	BCl3 valve closed
2/1/2012	6:31:04 PM	PH3 valve closed
2/1/2012	6:31:04 PM	SiCl4 pre valve closed
2/1/2012	6:31:04 PM	SiCl4 post valve closed
2/1/2012	6:31:04 PM	Bypass valve closed
2/1/2012	6:31:04 PM	Bubbler valve closed
2/1/2012	6:31:04 PM	Main Vac valve opened
2/1/2012	6:31:04 PM	Helium MFC set to  0.000000
2/1/2012	6:31:04 PM	H2 MFC set to  0.000000
2/1/2012	6:31:04 PM	BCl3 MFC set to  0.000000
2/1/2012	6:31:04 PM	PH3 MFC set to  0.000000
2/1/2012	6:31:04 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:31:04 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:31:04 PM	Tube furnace set to 150
2/1/2012	6:31:34 PM	H2 valve closed
2/1/2012	6:31:34 PM	BCl3 valve closed
2/1/2012	6:31:34 PM	PH3 valve closed
2/1/2012	6:31:34 PM	SiCl4 pre valve closed
2/1/2012	6:31:34 PM	SiCl4 post valve closed
2/1/2012	6:31:34 PM	Bypass valve closed
2/1/2012	6:31:34 PM	Bubbler valve closed
2/1/2012	6:31:34 PM	Helium valve opened
2/1/2012	6:31:34 PM	Main Vac valve opened
2/1/2012	6:31:34 PM	Helium MFC set to  20.000000
2/1/2012	6:31:34 PM	H2 MFC set to  0.000000
2/1/2012	6:31:34 PM	BCl3 MFC set to  0.000000
2/1/2012	6:31:34 PM	PH3 MFC set to  0.000000
2/1/2012	6:31:34 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:31:34 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:31:34 PM	Tube furnace set to 150
2/1/2012	6:32:04 PM	Helium valve closed
2/1/2012	6:32:04 PM	H2 valve closed
2/1/2012	6:32:04 PM	BCl3 valve closed
2/1/2012	6:32:04 PM	PH3 valve closed
2/1/2012	6:32:04 PM	SiCl4 pre valve closed
2/1/2012	6:32:04 PM	SiCl4 post valve closed
2/1/2012	6:32:04 PM	Bypass valve closed
2/1/2012	6:32:04 PM	Bubbler valve closed
2/1/2012	6:32:04 PM	Main Vac valve opened
2/1/2012	6:32:04 PM	Helium MFC set to  0.000000
2/1/2012	6:32:04 PM	H2 MFC set to  0.000000
2/1/2012	6:32:04 PM	BCl3 MFC set to  0.000000
2/1/2012	6:32:04 PM	PH3 MFC set to  0.000000
2/1/2012	6:32:04 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:32:04 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:32:05 PM	Tube furnace set to 150
2/1/2012	6:32:35 PM	H2 valve closed
2/1/2012	6:32:35 PM	BCl3 valve closed
2/1/2012	6:32:35 PM	PH3 valve closed
2/1/2012	6:32:35 PM	SiCl4 pre valve closed
2/1/2012	6:32:35 PM	SiCl4 post valve closed
2/1/2012	6:32:35 PM	Bypass valve closed
2/1/2012	6:32:35 PM	Bubbler valve closed
2/1/2012	6:32:35 PM	Helium valve opened
2/1/2012	6:32:35 PM	Main Vac valve opened
2/1/2012	6:32:35 PM	Helium MFC set to  20.000000
2/1/2012	6:32:35 PM	H2 MFC set to  0.000000
2/1/2012	6:32:35 PM	BCl3 MFC set to  0.000000
2/1/2012	6:32:35 PM	PH3 MFC set to  0.000000
2/1/2012	6:32:35 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:32:35 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:32:35 PM	Tube furnace set to 150
2/1/2012	6:33:05 PM	Helium valve closed
2/1/2012	6:33:05 PM	H2 valve closed
2/1/2012	6:33:05 PM	BCl3 valve closed
2/1/2012	6:33:05 PM	PH3 valve closed
2/1/2012	6:33:05 PM	SiCl4 pre valve closed
2/1/2012	6:33:05 PM	SiCl4 post valve closed
2/1/2012	6:33:05 PM	Bypass valve closed
2/1/2012	6:33:05 PM	Bubbler valve closed
2/1/2012	6:33:05 PM	Main Vac valve opened
2/1/2012	6:33:05 PM	Helium MFC set to  0.000000
2/1/2012	6:33:05 PM	H2 MFC set to  0.000000
2/1/2012	6:33:05 PM	BCl3 MFC set to  0.000000
2/1/2012	6:33:05 PM	PH3 MFC set to  0.000000
2/1/2012	6:33:05 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:33:05 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:33:05 PM	Tube furnace set to 150
2/1/2012	6:33:35 PM	H2 valve closed
2/1/2012	6:33:35 PM	BCl3 valve closed
2/1/2012	6:33:35 PM	PH3 valve closed
2/1/2012	6:33:35 PM	SiCl4 pre valve closed
2/1/2012	6:33:35 PM	SiCl4 post valve closed
2/1/2012	6:33:35 PM	Bypass valve closed
2/1/2012	6:33:35 PM	Bubbler valve closed
2/1/2012	6:33:35 PM	Helium valve opened
2/1/2012	6:33:35 PM	Main Vac valve opened
2/1/2012	6:33:35 PM	Helium MFC set to  20.000000
2/1/2012	6:33:35 PM	H2 MFC set to  0.000000
2/1/2012	6:33:35 PM	BCl3 MFC set to  0.000000
2/1/2012	6:33:35 PM	PH3 MFC set to  0.000000
2/1/2012	6:33:35 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:33:35 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:33:35 PM	Tube furnace set to 150
2/1/2012	6:34:05 PM	Helium valve closed
2/1/2012	6:34:05 PM	H2 valve closed
2/1/2012	6:34:05 PM	BCl3 valve closed
2/1/2012	6:34:05 PM	PH3 valve closed
2/1/2012	6:34:05 PM	SiCl4 pre valve closed
2/1/2012	6:34:05 PM	SiCl4 post valve closed
2/1/2012	6:34:05 PM	Bypass valve closed
2/1/2012	6:34:05 PM	Bubbler valve closed
2/1/2012	6:34:05 PM	Main Vac valve opened
2/1/2012	6:34:05 PM	Helium MFC set to  0.000000
2/1/2012	6:34:05 PM	H2 MFC set to  0.000000
2/1/2012	6:34:05 PM	BCl3 MFC set to  0.000000
2/1/2012	6:34:05 PM	PH3 MFC set to  0.000000
2/1/2012	6:34:05 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:34:05 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:34:05 PM	Tube furnace set to 150
2/1/2012	6:34:35 PM	H2 valve closed
2/1/2012	6:34:35 PM	BCl3 valve closed
2/1/2012	6:34:35 PM	PH3 valve closed
2/1/2012	6:34:35 PM	SiCl4 pre valve closed
2/1/2012	6:34:35 PM	SiCl4 post valve closed
2/1/2012	6:34:35 PM	Bypass valve closed
2/1/2012	6:34:35 PM	Bubbler valve closed
2/1/2012	6:34:35 PM	Helium valve opened
2/1/2012	6:34:35 PM	Main Vac valve opened
2/1/2012	6:34:35 PM	Helium MFC set to  20.000000
2/1/2012	6:34:35 PM	H2 MFC set to  0.000000
2/1/2012	6:34:35 PM	BCl3 MFC set to  0.000000
2/1/2012	6:34:35 PM	PH3 MFC set to  0.000000
2/1/2012	6:34:35 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:34:35 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:34:36 PM	Tube furnace set to 150
2/1/2012	6:35:06 PM	Helium valve closed
2/1/2012	6:35:06 PM	H2 valve closed
2/1/2012	6:35:06 PM	BCl3 valve closed
2/1/2012	6:35:06 PM	PH3 valve closed
2/1/2012	6:35:06 PM	SiCl4 pre valve closed
2/1/2012	6:35:06 PM	SiCl4 post valve closed
2/1/2012	6:35:06 PM	Bypass valve closed
2/1/2012	6:35:06 PM	Bubbler valve closed
2/1/2012	6:35:06 PM	Main Vac valve opened
2/1/2012	6:35:06 PM	Helium MFC set to  0.000000
2/1/2012	6:35:06 PM	H2 MFC set to  0.000000
2/1/2012	6:35:06 PM	BCl3 MFC set to  0.000000
2/1/2012	6:35:06 PM	PH3 MFC set to  0.000000
2/1/2012	6:35:06 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:35:06 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:35:06 PM	Tube furnace set to 150
2/1/2012	6:35:36 PM	H2 valve closed
2/1/2012	6:35:36 PM	BCl3 valve closed
2/1/2012	6:35:36 PM	PH3 valve closed
2/1/2012	6:35:36 PM	SiCl4 pre valve closed
2/1/2012	6:35:36 PM	SiCl4 post valve closed
2/1/2012	6:35:36 PM	Bypass valve closed
2/1/2012	6:35:36 PM	Bubbler valve closed
2/1/2012	6:35:36 PM	Helium valve opened
2/1/2012	6:35:36 PM	Main Vac valve opened
2/1/2012	6:35:36 PM	Helium MFC set to  20.000000
2/1/2012	6:35:36 PM	H2 MFC set to  0.000000
2/1/2012	6:35:36 PM	BCl3 MFC set to  0.000000
2/1/2012	6:35:36 PM	PH3 MFC set to  0.000000
2/1/2012	6:35:36 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:35:36 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:35:36 PM	Tube furnace set to 150
2/1/2012	6:36:06 PM	Helium valve closed
2/1/2012	6:36:06 PM	H2 valve closed
2/1/2012	6:36:06 PM	BCl3 valve closed
2/1/2012	6:36:06 PM	PH3 valve closed
2/1/2012	6:36:06 PM	SiCl4 pre valve closed
2/1/2012	6:36:06 PM	SiCl4 post valve closed
2/1/2012	6:36:06 PM	Bypass valve closed
2/1/2012	6:36:06 PM	Bubbler valve closed
2/1/2012	6:36:06 PM	Main Vac valve opened
2/1/2012	6:36:06 PM	Helium MFC set to  0.000000
2/1/2012	6:36:06 PM	H2 MFC set to  0.000000
2/1/2012	6:36:06 PM	BCl3 MFC set to  0.000000
2/1/2012	6:36:06 PM	PH3 MFC set to  0.000000
2/1/2012	6:36:06 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:36:06 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:36:06 PM	Tube furnace set to 150
2/1/2012	6:36:36 PM	H2 valve closed
2/1/2012	6:36:36 PM	BCl3 valve closed
2/1/2012	6:36:36 PM	PH3 valve closed
2/1/2012	6:36:36 PM	SiCl4 pre valve closed
2/1/2012	6:36:36 PM	SiCl4 post valve closed
2/1/2012	6:36:36 PM	Bypass valve closed
2/1/2012	6:36:36 PM	Bubbler valve closed
2/1/2012	6:36:36 PM	Helium valve opened
2/1/2012	6:36:36 PM	Main Vac valve opened
2/1/2012	6:36:36 PM	Helium MFC set to  20.000000
2/1/2012	6:36:36 PM	H2 MFC set to  0.000000
2/1/2012	6:36:36 PM	BCl3 MFC set to  0.000000
2/1/2012	6:36:36 PM	PH3 MFC set to  0.000000
2/1/2012	6:36:36 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:36:36 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:36:36 PM	Tube furnace set to 150
2/1/2012	6:37:06 PM	Helium valve closed
2/1/2012	6:37:06 PM	H2 valve closed
2/1/2012	6:37:06 PM	BCl3 valve closed
2/1/2012	6:37:06 PM	PH3 valve closed
2/1/2012	6:37:06 PM	SiCl4 pre valve closed
2/1/2012	6:37:06 PM	SiCl4 post valve closed
2/1/2012	6:37:06 PM	Bypass valve closed
2/1/2012	6:37:06 PM	Bubbler valve closed
2/1/2012	6:37:06 PM	Main Vac valve opened
2/1/2012	6:37:06 PM	Helium MFC set to  0.000000
2/1/2012	6:37:06 PM	H2 MFC set to  0.000000
2/1/2012	6:37:06 PM	BCl3 MFC set to  0.000000
2/1/2012	6:37:06 PM	PH3 MFC set to  0.000000
2/1/2012	6:37:06 PM	SiCl4 MFC set to  0.000000
2/1/2012	6:37:06 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	6:37:07 PM	Tube furnace set to 150
2/1/2012	6:37:08 PM	Run finished at 6:37 PM
2/1/2012	7:00:30 PM	Main Vac valve closed
2/1/2012	7:00:38 PM	Main Vac valve opened
2/1/2012	7:03:07 PM	Main Vac valve closed
2/1/2012	7:03:24 PM	Main Vac valve opened
2/1/2012	7:04:04 PM	Recipe started at 7:04 PM
2/1/2012	7:04:04 PM	Helium valve closed
2/1/2012	7:04:04 PM	H2 valve closed
2/1/2012	7:04:04 PM	BCl3 valve closed
2/1/2012	7:04:04 PM	PH3 valve closed
2/1/2012	7:04:04 PM	SiCl4 pre valve closed
2/1/2012	7:04:04 PM	SiCl4 post valve closed
2/1/2012	7:04:04 PM	Main Vac valve closed
2/1/2012	7:04:04 PM	Bypass valve closed
2/1/2012	7:04:04 PM	Bubbler valve closed
2/1/2012	7:04:04 PM	Helium MFC set to  0.000000
2/1/2012	7:04:04 PM	H2 MFC set to  0.000000
2/1/2012	7:04:04 PM	BCl3 MFC set to  0.000000
2/1/2012	7:04:04 PM	PH3 MFC set to  0.000000
2/1/2012	7:04:04 PM	SiCl4 MFC set to  0.000000
2/1/2012	7:04:04 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	7:04:05 PM	Tube furnace set to 0
2/1/2012	7:04:08 PM	Helium valve closed
2/1/2012	7:04:08 PM	BCl3 valve closed
2/1/2012	7:04:08 PM	PH3 valve closed
2/1/2012	7:04:08 PM	SiCl4 pre valve closed
2/1/2012	7:04:08 PM	SiCl4 post valve closed
2/1/2012	7:04:08 PM	Main Vac valve closed
2/1/2012	7:04:08 PM	Bypass valve closed
2/1/2012	7:04:08 PM	Bubbler valve closed
2/1/2012	7:04:08 PM	H2 valve opened
2/1/2012	7:04:08 PM	Helium MFC set to  0.000000
2/1/2012	7:04:08 PM	H2 MFC set to  500.000000
2/1/2012	7:04:08 PM	BCl3 MFC set to  0.000000
2/1/2012	7:04:08 PM	PH3 MFC set to  0.000000
2/1/2012	7:04:08 PM	SiCl4 MFC set to  0.000000
2/1/2012	7:04:08 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	7:04:08 PM	Tube furnace set to 0
2/1/2012	7:05:12 PM	Helium valve closed
2/1/2012	7:05:12 PM	BCl3 valve closed
2/1/2012	7:05:12 PM	PH3 valve closed
2/1/2012	7:05:12 PM	SiCl4 pre valve closed
2/1/2012	7:05:12 PM	SiCl4 post valve closed
2/1/2012	7:05:12 PM	Main Vac valve closed
2/1/2012	7:05:12 PM	Bypass valve closed
2/1/2012	7:05:12 PM	H2 valve opened
2/1/2012	7:05:12 PM	Bubbler valve opened
2/1/2012	7:05:12 PM	Helium MFC set to  0.000000
2/1/2012	7:05:12 PM	H2 MFC set to  500.000000
2/1/2012	7:05:12 PM	BCl3 MFC set to  0.000000
2/1/2012	7:05:12 PM	PH3 MFC set to  0.000000
2/1/2012	7:05:12 PM	SiCl4 MFC set to  0.000000
2/1/2012	7:05:12 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	7:05:12 PM	Tube furnace set to 0
2/1/2012	7:05:13 PM	Helium valve closed
2/1/2012	7:05:13 PM	BCl3 valve closed
2/1/2012	7:05:13 PM	PH3 valve closed
2/1/2012	7:05:13 PM	SiCl4 pre valve closed
2/1/2012	7:05:13 PM	SiCl4 post valve closed
2/1/2012	7:05:13 PM	Main Vac valve closed
2/1/2012	7:05:13 PM	Bypass valve closed
2/1/2012	7:05:13 PM	H2 valve opened
2/1/2012	7:05:13 PM	Bubbler valve opened
2/1/2012	7:05:13 PM	Helium MFC set to  0.000000
2/1/2012	7:05:13 PM	H2 MFC set to  500.000000
2/1/2012	7:05:13 PM	BCl3 MFC set to  0.000000
2/1/2012	7:05:14 PM	PH3 MFC set to  0.000000
2/1/2012	7:05:14 PM	SiCl4 MFC set to  0.000000
2/1/2012	7:05:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	7:05:14 PM	Tube furnace set to 1000
2/1/2012	7:27:14 PM	Helium valve closed
2/1/2012	7:27:14 PM	PH3 valve closed
2/1/2012	7:27:14 PM	Main Vac valve closed
2/1/2012	7:27:14 PM	Bypass valve closed
2/1/2012	7:27:14 PM	H2 valve opened
2/1/2012	7:27:14 PM	BCl3 valve opened
2/1/2012	7:27:14 PM	SiCl4 pre valve opened
2/1/2012	7:27:14 PM	SiCl4 post valve opened
2/1/2012	7:27:14 PM	Bubbler valve opened
2/1/2012	7:27:14 PM	Helium MFC set to  0.000000
2/1/2012	7:27:14 PM	H2 MFC set to  500.000000
2/1/2012	7:27:14 PM	BCl3 MFC set to  3.000000
2/1/2012	7:27:14 PM	PH3 MFC set to  0.000000
2/1/2012	7:27:14 PM	SiCl4 MFC set to  25.000000
2/1/2012	7:27:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	7:27:14 PM	Tube furnace set to 1000
2/1/2012	8:07:14 PM	Helium valve closed
2/1/2012	8:07:14 PM	BCl3 valve closed
2/1/2012	8:07:14 PM	PH3 valve closed
2/1/2012	8:07:14 PM	SiCl4 pre valve closed
2/1/2012	8:07:14 PM	SiCl4 post valve closed
2/1/2012	8:07:14 PM	Main Vac valve closed
2/1/2012	8:07:14 PM	Bypass valve closed
2/1/2012	8:07:14 PM	H2 valve opened
2/1/2012	8:07:14 PM	Bubbler valve opened
2/1/2012	8:07:14 PM	Helium MFC set to  0.000000
2/1/2012	8:07:14 PM	H2 MFC set to  500.000000
2/1/2012	8:07:14 PM	BCl3 MFC set to  0.000000
2/1/2012	8:07:14 PM	PH3 MFC set to  0.000000
2/1/2012	8:07:14 PM	SiCl4 MFC set to  0.000000
2/1/2012	8:07:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:07:14 PM	Tube furnace set to 750
2/1/2012	8:12:14 PM	H2 valve closed
2/1/2012	8:12:14 PM	BCl3 valve closed
2/1/2012	8:12:14 PM	PH3 valve closed
2/1/2012	8:12:14 PM	SiCl4 pre valve closed
2/1/2012	8:12:14 PM	SiCl4 post valve closed
2/1/2012	8:12:14 PM	Main Vac valve closed
2/1/2012	8:12:14 PM	Bypass valve closed
2/1/2012	8:12:14 PM	Helium valve opened
2/1/2012	8:12:14 PM	Bubbler valve opened
2/1/2012	8:12:14 PM	Helium MFC set to  500.000000
2/1/2012	8:12:14 PM	H2 MFC set to  0.000000
2/1/2012	8:12:14 PM	BCl3 MFC set to  0.000000
2/1/2012	8:12:14 PM	PH3 MFC set to  0.000000
2/1/2012	8:12:14 PM	SiCl4 MFC set to  0.000000
2/1/2012	8:12:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:12:14 PM	Tube furnace set to 0
2/1/2012	8:32:14 PM	Helium valve closed
2/1/2012	8:32:14 PM	H2 valve closed
2/1/2012	8:32:14 PM	BCl3 valve closed
2/1/2012	8:32:14 PM	PH3 valve closed
2/1/2012	8:32:14 PM	SiCl4 pre valve closed
2/1/2012	8:32:14 PM	SiCl4 post valve closed
2/1/2012	8:32:14 PM	Main Vac valve closed
2/1/2012	8:32:14 PM	Bypass valve closed
2/1/2012	8:32:14 PM	Bubbler valve closed
2/1/2012	8:32:14 PM	Helium MFC set to  0.000000
2/1/2012	8:32:14 PM	H2 MFC set to  0.000000
2/1/2012	8:32:14 PM	BCl3 MFC set to  0.000000
2/1/2012	8:32:14 PM	PH3 MFC set to  0.000000
2/1/2012	8:32:14 PM	SiCl4 MFC set to  0.000000
2/1/2012	8:32:14 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	8:32:15 PM	Tube furnace set to 0
2/1/2012	8:32:16 PM	Run finished at 8:32 PM
2/1/2012	9:14:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/1/2012	9:14:51 PM	Recipe started at 9:14 PM
2/1/2012	9:14:51 PM	Helium valve closed
2/1/2012	9:14:51 PM	H2 valve closed
2/1/2012	9:14:51 PM	BCl3 valve closed
2/1/2012	9:14:51 PM	PH3 valve closed
2/1/2012	9:14:51 PM	SiCl4 pre valve closed
2/1/2012	9:14:51 PM	SiCl4 post valve closed
2/1/2012	9:14:51 PM	Main Vac valve closed
2/1/2012	9:14:51 PM	Bubbler valve closed
2/1/2012	9:14:51 PM	Bypass valve opened
2/1/2012	9:14:51 PM	Helium MFC set to  0.000000
2/1/2012	9:14:51 PM	H2 MFC set to  0.000000
2/1/2012	9:14:51 PM	BCl3 MFC set to  0.000000
2/1/2012	9:14:51 PM	PH3 MFC set to  0.000000
2/1/2012	9:14:51 PM	SiCl4 MFC set to  0.000000
2/1/2012	9:14:51 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:14:51 PM	Tube furnace set to 0
2/1/2012	9:15:46 PM	Helium valve closed
2/1/2012	9:15:46 PM	H2 valve closed
2/1/2012	9:15:46 PM	BCl3 valve closed
2/1/2012	9:15:46 PM	PH3 valve closed
2/1/2012	9:15:46 PM	SiCl4 pre valve closed
2/1/2012	9:15:46 PM	SiCl4 post valve closed
2/1/2012	9:15:46 PM	Main Vac valve closed
2/1/2012	9:15:46 PM	Bubbler valve closed
2/1/2012	9:15:46 PM	Bypass valve opened
2/1/2012	9:15:46 PM	Helium MFC set to  0.000000
2/1/2012	9:15:46 PM	H2 MFC set to  0.000000
2/1/2012	9:15:46 PM	BCl3 MFC set to  0.000000
2/1/2012	9:15:46 PM	PH3 MFC set to  0.000000
2/1/2012	9:15:46 PM	SiCl4 MFC set to  0.000000
2/1/2012	9:15:46 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:15:47 PM	Tube furnace set to 0
2/1/2012	9:16:47 PM	Helium valve closed
2/1/2012	9:16:47 PM	H2 valve closed
2/1/2012	9:16:47 PM	BCl3 valve closed
2/1/2012	9:16:47 PM	PH3 valve closed
2/1/2012	9:16:47 PM	SiCl4 pre valve closed
2/1/2012	9:16:47 PM	SiCl4 post valve closed
2/1/2012	9:16:47 PM	Bypass valve closed
2/1/2012	9:16:47 PM	Bubbler valve closed
2/1/2012	9:16:47 PM	Main Vac valve opened
2/1/2012	9:16:47 PM	Helium MFC set to  0.000000
2/1/2012	9:16:47 PM	H2 MFC set to  0.000000
2/1/2012	9:16:47 PM	BCl3 MFC set to  0.000000
2/1/2012	9:16:47 PM	PH3 MFC set to  0.000000
2/1/2012	9:16:47 PM	SiCl4 MFC set to  0.000000
2/1/2012	9:16:47 PM	Bypass solenoid MFC set to  0.000000
2/1/2012	9:16:47 PM	Tube furnace set to 0
2/1/2012	9:16:48 PM	Run finished at 9:16 PM
2/1/2012	9:16:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
